(19)
(11)EP 3 591 471 A3

(12)EUROPEAN PATENT APPLICATION

(88)Date of publication A3:
10.06.2020 Bulletin 2020/24

(43)Date of publication A2:
08.01.2020 Bulletin 2020/02

(21)Application number: 19182155.2

(22)Date of filing:  25.06.2019
(51)International Patent Classification (IPC): 
G03F 7/20(2006.01)
G03F 9/00(2006.01)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30)Priority: 04.07.2018 JP 2018127798

(71)Applicant: CANON KABUSHIKI KAISHA
Ohta-ku Tokyo 146-8501 (JP)

(72)Inventor:
  • KURIHARA, Takashi
    Tokyo, 146-8501 (JP)

(74)Representative: TBK 
Bavariaring 4-6
80336 München
80336 München (DE)

  


(54)CONTROL APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE


(57) The present invention provides a control apparatus for performing synchronous control to synchronize driving of a second moving member so as to follow driving of a first moving member, including a feedforward control system that includes a calculator configured to obtain an input/output response of the second moving member and position deviations of the first moving member and the second moving member while driving the first moving member and the second moving member in synchronism with each other, and calculate a feedforward manipulated variable based on the input/output response of the second moving member and the synchronous error between the first moving member and the second moving member obtained from the position deviations of the first moving member and the second moving member.







Search report















Search report