(19)
(11)EP 3 617 341 A3

(12)EUROPEAN PATENT APPLICATION

(88)Date of publication A3:
01.07.2020 Bulletin 2020/27

(43)Date of publication A2:
04.03.2020 Bulletin 2020/10

(21)Application number: 19189420.3

(22)Date of filing:  31.07.2019
(51)International Patent Classification (IPC): 
C23C 14/04(2006.01)
H01L 51/00(2006.01)
H01L 27/32(2006.01)
H01L 51/56(2006.01)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30)Priority: 29.08.2018 KR 20180102175

(71)Applicant: Samsung Display Co., Ltd.
Gyeonggi-Do 17113 (KR)

(72)Inventor:
  • Kim, Yonghwan
    17113 Gyeonggi-Do (KR)

(74)Representative: Taor, Simon Edward William 
Venner Shipley LLP 200 Aldersgate
London EC1A 4HD
London EC1A 4HD (GB)

  


(54)MASK ASSEMBLY, AND APPARATUS AND METHOD FOR MANUFACTURING DISPLAY APPARATUS INCLUDING THE MASK ASSEMBLY


(57) A mask assembly includes a mask frame, a mask on the mask frame and including at least one opening through which a deposition material passes, and a stick on the mask frame and extending over the opening, wherein the stick includes a stick body portion connected to the mask frame and extending over the opening, and a protrusion protruding from the stick body portion toward the opening.







Search report















Search report