(19)
(11)EP 3 627 547 A3

(12)EUROPEAN PATENT APPLICATION

(88)Date of publication A3:
04.11.2020 Bulletin 2020/45

(43)Date of publication A2:
25.03.2020 Bulletin 2020/13

(21)Application number: 19207250.2

(22)Date of filing:  12.04.2018
(51)International Patent Classification (IPC): 
H01L 23/373(2006.01)
H01L 23/433(2006.01)
H01L 23/42(2006.01)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30)Priority: 13.04.2017 US 201715486907
03.04.2018 US 201815944549

(62)Application number of the earlier application in accordance with Art. 76 EPC:
18166919.3 / 3389086

(71)Applicant: Infineon Technologies Austria AG
9500 Villach (AT)

(72)Inventors:
  • Narayanasamy, Jayaganasan
    76100 Melaka-Durian Tunggal (MY)
  • Krishnan, Jagen
    75450 Melaka (MY)
  • Lau, Kok Tee
    76100 Melaka - Durian Tunggal (MY)
  • Lee, Hong Lim
    11700 Penang (MY)
  • Murugan, Sanjay Kumar
    75350 Malacca (MY)

(74)Representative: Westphal, Mussgnug & Partner Patentanwälte mbB 
Werinherstrasse 79
81541 München
81541 München (DE)

  


(54)METHOD FOR FORMING A COMPOSITE LAYER


(57) A method for forming a composite layer on a workpiece is disclosed. In an embodiment, the method comprises forming a wall around a metallic surface such that the wall extends in a vertical direction from a plane formed by the metallic surface of a workpiece, depositing a filler material in a walled area on the metallic surface, depositing a plastic material on the filler material, and performing a vacuum treatment of the filler material and the plastic material thereby forming a matrix composite layer disposed on the metallic surface.







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