(19)
(11)EP 3 644 347 A1

(12)EUROPEAN PATENT APPLICATION
published in accordance with Art. 153(4) EPC

(43)Date of publication:
29.04.2020 Bulletin 2020/18

(21)Application number: 17915196.4

(22)Date of filing:  18.08.2017
(51)Int. Cl.: 
H01L 21/46  (2006.01)
H01L 21/34  (2006.01)
(86)International application number:
PCT/CN2017/098105
(87)International publication number:
WO 2018/232946 (27.12.2018 Gazette  2018/52)
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30)Priority: 21.06.2017 CN 201710477261

(71)Applicant: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
Wuhan, Hubei 430070 (CN)

(72)Inventor:
  • WANG, Xuanyun
    Wuhan Hubei 430070 (CN)

(74)Representative: Herrero & Asociados, S.L. 
Cedaceros, 1
28014 Madrid
28014 Madrid (ES)

  


(54)METHOD FOR IMPROVING THRESHOLD VOLTAGE OF OXIDE SEMICONDUCTOR THIN-FILM TRANSISTOR


(57) Disclosed is a method for improving the threshold voltage of an oxide semiconductor thin-film transistor. The method is performed by bending the oxide semiconductor thin-film transistor a preset number of times or bending the oxide semiconductor thin-film transistor and holding same for a preset duration, wherein using bending allows an oxide semiconductor layer (30) to be compressed or stretched, thus changing the distance between atoms in the channels of the oxide semiconductor thin-film transistor, so that the energy difference between the bonding orbital and the antibonding orbital between atoms in the oxide semiconductor layer (30) is altered. Finally, the threshold voltage of the oxide semiconductor thin-film transistor is regulated to an appropriate range to achieve the purpose of improving the threshold voltage of the oxide semiconductor thin-film transistor.




Description

TECHNICAL FIELD OF DISCLOSURE



[0001] The present invention relates to the field of display techniques, and in particular to a method for improving threshold voltage of oxide semiconductor thin film transistor (TFT).

BACKGROUND



[0002] The organic light-emitting display (OLED) devices have the advantages of active-luminous, no need of backlight, high contrast, thinness, wide viewing angle, fast response, ability to realize flexible display, wide temperature range, simple manufacturing process, are considered the emerging applications technology for the next generation display devices.

[0003] A flexible display device refers to the use of flexible substrate to make the display device, which is foldable and easy to carry which the traditional flat panel display device is unable achieve, and provides cost and user experience advantages. Thus, the flexible display device has become a mainstream research and development area in display technology.

[0004] The OLED display is currently the most suitable for the production of flexible display device. Like the traditional flat-panel display devices, the flexible OLED display devices also need TFT to control the operation of the pixels or to drive pixels. Based on the active layer, the commonly used TFT can be divided into amorphous silicon (a-Si), polysilicon (poly-Si), oxide semiconductor (oxide) and other types.

[0005] At present, the most commonly used TFT in flexible OLED display devices is still the low temperature polysilicon (LTPS) TFT. However, the oxide semiconductor has a higher electron migration rate than that of the amorphous silicon and has a simpler manufacturing process compared with LTPS, so the application in flexible display device still attracts attention, has a good application prospect, and is currently a industry research hot topic. However, the application and development of oxide semiconductors still face many issues, such as, indium gallium zinc oxide (IGZO) is an oxide semiconductor comprising In, Ga and Zn with a carrier concentration less than 1018/cm3. But the channel layer manufactured by IGZO production is usually amorphous, so the defects in the structure of the material is more and the material is more vulnerable to the environment influence, resulting in lower stability of the TFT and more serious issue in threshold voltage drift, which hinders the application and development of oxide semiconductors.

SUMMARY OF DISCLOSURE



[0006] The object of the present invention is to provide a method for improving the threshold voltage of oxide semiconductor TFT, able to change the distance among the atoms in the channel of the oxide semiconductor TFT, leading to improving the threshold voltage of oxide semiconductor TFT.

[0007] To achieve the above object, the present invention provides a method for improving threshold voltage of oxide semiconductor TFT, comprising the steps of:

Step 1: providing an oxide semiconductor thin film transistor (TFT), comprising: a gate, a gate insulating layer covering the gate, an oxide semiconductor layer disposed on the gate insulating layer, and a source and a drain disposed on the oxide semiconductor layer spaced form each other with an interval;

Step 2: performing a default number of bending operations on the oxide semiconductor TFT, or performing a bending operation on the oxide semiconductor TFT for a default duration; the bending operation compressing or stretching the oxide semiconductor layer to improve the threshold voltage of the oxide semiconductor TFT.



[0008] According to a preferred embodiment of the present invention, in Step 2, the default number of bending operations is more than or equal to 100,000 times.

[0009] According to a preferred embodiment of the present invention, in Step 2, the default duration for the bending operation is longer than or equal to 45 days.

[0010] According to a preferred embodiment of the present invention, the oxide semiconductor TFT has a bending radius less than or equal to 3mm during the bending operation.

[0011] According to a preferred embodiment of the present invention, in Step 2, the bending operation stretches the oxide semiconductor layer so that the threshold voltage of the oxide semiconductor TFT is reduced and gradually stabilized.

[0012] According to a preferred embodiment of the present invention, in Step 2, the bending operation compresses the oxide semiconductor layer so that the threshold voltage of the oxide semiconductor TFT is increased and gradually stabilized.

[0013] According to a preferred embodiment of the present invention, the oxide semiconductor layer is made of indium gallium zinc oxide (IGZO).

[0014] According to a preferred embodiment of the present invention, the gate, the source and the drain are made of one or more of the materials of molybdenum (Mo), aluminum (Al), and titanium (Ti).

[0015] According to a preferred embodiment of the present invention, the gate insulating layer comprise a silicon nitride layer covering the gate, and a silicon oxide layer covering silicon nitride layer.

[0016] According to a preferred embodiment of the present invention, Step 1 further comprises: providing a flexible base, and the oxide semiconductor TFT being disposed on the flexible base.

[0017] The present invention also provides a method for improving threshold voltage of oxide semiconductor TFT, comprising the steps of:

Step 1: providing an oxide semiconductor thin film transistor (TFT), comprising: a gate, a gate insulating layer covering the gate, an oxide semiconductor layer disposed on the gate insulating layer, and a source and a drain disposed on the oxide semiconductor layer spaced form each other with an interval;

Step 2: performing a default number of bending operations on the oxide semiconductor TFT, or performing a bending operation on the oxide semiconductor TFT for a default duration; the bending operation compressing or stretching the oxide semiconductor layer to improve the threshold voltage of the oxide semiconductor TFT;

wherein in Step 2, the default number of bending operations being more than or equal to 100,000 times;
wherein in Step 2, the default duration for the bending operation being longer than or equal to 45 days.
wherein the oxide semiconductor TFT having a bending radius less than or equal to 3mm during the bending operation.
wherein the gate, the source and the drain being made of one or more of the materials of molybdenum (Mo), aluminum (Al), and titanium (Ti).
wherein the gate insulating layer comprising a silicon nitride layer covering the gate, and a silicon oxide layer covering silicon nitride layer.

[0018] Compared to the known techniques, the present invention provides the following advantages. The present invention provides a method for improving threshold voltage of oxide semiconductor TFT, by bending the oxide semiconductor TFT for a default number of times or bending the oxide semiconductor TFT for a default duration, by bending the oxide semiconductor TFT to compress or stretch the oxide semiconductor layer to change the distance among the atoms in the channel of the oxide semiconductor TFT so as to change the energy difference between the inter-atom bonding orbital and anti-bonding orbital, resulting in controlling the threshold voltage of the oxide semiconductor TFT within a proper range to achieve improving the threshold voltage of the oxide semiconductor TFT.

BRIEF DESCRIPTION OF DRAWINGS



[0019] To make the technical solution of the embodiments according to the present invention, a brief description of the drawings that are necessary for the illustration of the embodiments will be given as follows. Apparently, the drawings described below show only example embodiments of the present invention and for those having ordinary skills in the art, other drawings may be easily obtained from these drawings without paying any creative effort. In the drawings:

Fig. 1 is a schematic view showing Step 1 of the method for improving threshold voltage of the oxide semiconductor TFT provided by an embodiment of the present invention;

Fig. 2 is a schematic view showing Step 2 of the method for improving threshold voltage of the oxide semiconductor TFT provided by an embodiment of the present invention;

Fig. 3 is a schematic view showing Step 2 of the method for improving threshold voltage of the oxide semiconductor TFT provided by another embodiment of the present invention;

Fig. 4 is a schematic view showing a flowchart of the method for improving threshold voltage of the oxide semiconductor TFT provided by an embodiment of the present invention.


DETAILED DESCRIPTION OF EMBODIMENTS



[0020] To further explain the technique means and effect of the present invention, the following uses preferred embodiments and drawings for detailed description.

[0021] Referring to Fig. 4, the present invention provides a method for improving threshold voltage of oxide semiconductor TFT, comprising the steps of:

Step 1: as shown in Fig. 1, providing an oxide semiconductor thin film transistor (TFT), comprising: a gate 10, a gate insulating layer 20 covering the gate 10, an oxide semiconductor layer 30 disposed on the gate insulating layer 20, and a source 40 and a drain 50 disposed on the oxide semiconductor layer 30 spaced form each other with an interval.



[0022] Specifically, Step 1 further comprises: providing a flexible base, and the oxide semiconductor TFT being disposed on the flexible base.

[0023] Preferably, the oxide semiconductor layer 30 is made of indium gallium zinc oxide (IGZO). The gate 10, the source 40 and the drain 50 are made of one or more of the materials of molybdenum (Mo), aluminum (Al), and titanium (Ti). The gate insulating layer 20 comprise a silicon nitride layer 21 covering the gate 10, and a silicon oxide layer 22 covering silicon nitride layer 21.

[0024] Step 2: as shown in Fig. 2 or Fig. 3, performing a default number of bending operations on the oxide semiconductor TFT, or performing a bending operation on the oxide semiconductor TFT for a default duration. The bending operation compressing or stretching the oxide semiconductor layer 30 to improve the threshold voltage of the oxide semiconductor TFT.

[0025] Preferably, in Step 2, the default number of bending operations is 100,000 times. Preferably, in Step 2, the default duration for the bending operation is longer than or equal to 45 days. Specifically, in Step 2, depending on actual needs, the bending operation can be opted to stretch the oxide semiconductor layer 30 so that the threshold voltage of the oxide semiconductor TFT is reduced and gradually stabilized. Alternatively, the bending operation compresses the oxide semiconductor layer 30 so that the threshold voltage of the oxide semiconductor TFT is increased and gradually stabilized; for example, as shown in Fig. 2, in Step 2, by bending the oxide semiconductor TFT towards the gate 10 to stretch the oxide semiconductor layer 30, or, as shown in Fig. 3, in Step 2, by bending the oxide semiconductor TFT away from the gate 10 to compress the oxide semiconductor layer 30.

[0026] Specifically, in the first embodiment of the present invention, the oxide semiconductor TFT has a bending radius less than or equal to 3mm during the bending operation of 100,000 times. By bending the oxide semiconductor TFT to stretch the oxide semiconductor layer 30 to improve the threshold voltage of the oxide semiconductor TFT, the relation between the threshold voltage of the oxide semiconductor TFT and the number of bending operations is shown in Table 1:
Table 1: relation between the threshold voltage of the oxide semiconductor TFT and the number of bending operations with 3mm bending radius.
Number of bending operationsThreshold voltage
0 1.06V
10000 1.00V
30000 0.87V
60000 0.75V
100000 0.56V


[0027] As shown in Table 1, in the first embodiment of the present invention, the threshold voltage of the oxide semiconductor TFT decreases as the number of bending operations increases.

[0028] Specifically, in the second embodiment of the present invention, the oxide semiconductor TFT has a bending radius less than or equal to 5mm during the bending operation of 100,000 times. By bending the oxide semiconductor TFT to stretch the oxide semiconductor layer 30 to improve the threshold voltage of the oxide semiconductor TFT, the relation between the threshold voltage of the oxide semiconductor TFT and the number of bending operations is shown in Table 2:
Table 2: relation between the threshold voltage of the oxide semiconductor TFT and the number of bending operations with 5mm bending radius.
Number of bending operationsThreshold voltage
0 1.06V
23000 1.11V
60000 1.01V
100000 1.04V


[0029] Comparing Table 1 and Table 2, when the bending radius is 3mm, the effect of bending on the threshold voltage of the oxide semiconductor TFT is more prominent than the bending radius of 5mm. As such, the bending operation is preferably to have a bending radius less than or equal to 3mm when bending the oxide semiconductor TFT.

[0030] Specifically, in the third embodiment of the present invention, the oxide semiconductor TFT has a 3mm bending radius less for 45 days. By bending the oxide semiconductor TFT to stretch the oxide semiconductor layer 30 to improve the threshold voltage of the oxide semiconductor TFT, the relation between the threshold voltage of the oxide semiconductor TFT and the number of days is shown in Table 3:
Table 3: relation between the threshold voltage of the oxide semiconductor TFT and the number of days bending operations with 3mm bending radius.
Number of daysThreshold voltage
0 1.06V
15 -0.23V
22 -0.37V
30 -0.35V
45 -0.72V


[0031] As shown in Table 3, in the third embodiment of the present invention, the threshold voltage of the oxide semiconductor TFT decreases as the number of days increases.

[0032] Specifically, in the fourth embodiment of the present invention, the oxide semiconductor TFT has a 5mm bending radius less for 45 days. By bending the oxide semiconductor TFT to stretch the oxide semiconductor layer 30 to improve the threshold voltage of the oxide semiconductor TFT, the relation between the threshold voltage of the oxide semiconductor TFT and the number of days is shown in Table 4:
Table 4: relation between the threshold voltage of the oxide semiconductor TFT and the number of days bending operations with 5mm bending radius.
Number of daysThreshold voltage
0 1.06V
15 0.19V
22 0.04V
30 0.09V
45 0.10V


[0033] Comparing Table 3 and Table 4, when the bending radius is 3mm, the effect of bending on the threshold voltage of the oxide semiconductor TFT is more prominent than the bending radius of 5mm. As such, the bending operation is preferably to have a bending radius less than or equal to 3mm when bending the oxide semiconductor TFT.

[0034] It should be noted that the above embodiments perform bending to stretch the oxide semiconductor layer 30. However, the present invention is not restricted to stretching. In other embodiments of the present invention, depending on needs, the present invention can also perform bending to compress the oxide semiconductor layer 30 to achieve improving the threshold of the oxide semiconductor TFT.

[0035] In summary, the present invention provides a method for improving threshold voltage of oxide semiconductor TFT, by bending the oxide semiconductor TFT for a default number of times or bending the oxide semiconductor TFT for a default duration, by bending the oxide semiconductor TFT to compress or stretch the oxide semiconductor layer to change the distance among the atoms in the channel of the oxide semiconductor TFT so as to change the energy difference between the inter-atom bonding orbital and anti-bonding orbital, resulting in controlling the threshold voltage of the oxide semiconductor TFT within a proper range to achieve improving the threshold voltage of the oxide semiconductor TFT.

[0036] It should be noted that in the present disclosure the terms, such as, first, second are only for distinguishing an entity or operation from another entity or operation, and does not imply any specific relation or order between the entities or operations. Also, the terms "comprises", "include", and other similar variations, do not exclude the inclusion of other non-listed elements. Without further restrictions, the expression "comprises a..." does not exclude other identical elements from presence besides the listed elements.

[0037] Embodiments of the present invention have been described, but not intending to impose any unduly constraint to the appended claims. Any modification of equivalent structure or equivalent process made according to the disclosure and drawings of the present invention, or any application thereof, directly or indirectly, to other related fields of technique, is considered encompassed in the scope of protection defined by the clams of the present invention.


Claims

1. A method for improving threshold voltage of oxide semiconductor thin film transistor (TFT), comprising the steps of:

Step 1: providing an oxide semiconductor TFT, comprising: a gate, a gate insulating layer covering the gate, an oxide semiconductor layer disposed on the gate insulating layer, and a source and a drain disposed on the oxide semiconductor layer spaced form each other with an interval;

Step 2: performing a default number of bending operations on the oxide semiconductor TFT, or performing a bending operation on the oxide semiconductor TFT for a default duration; the bending operation compressing or stretching the oxide semiconductor layer to improve the threshold voltage of the oxide semiconductor TFT.


 
2. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 1, wherein in Step 2, the default number of bending operations is more than or equal to 100,000 times.
 
3. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 1, wherein in Step 2, the default duration for the bending operation is longer than or equal to 45 days.
 
4. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 2, wherein the oxide semiconductor TFT has a bending radius less than or equal to 3mm during the bending operation.
 
5. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 1, wherein in Step 2, the bending operation stretches the oxide semiconductor layer so that the threshold voltage of the oxide semiconductor TFT is reduced and gradually stabilized.
 
6. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 1, wherein in Step 2, the bending operation compresses the oxide semiconductor layer so that the threshold voltage of the oxide semiconductor TFT is increased and gradually stabilized.
 
7. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 1, wherein the oxide semiconductor layer is made of indium gallium zinc oxide (IGZO).
 
8. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 1, wherein the gate, the source and the drain are made of one or more of the materials of molybdenum (Mo), aluminum (Al), and titanium (Ti).
 
9. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 1, wherein the gate insulating layer comprise a silicon nitride layer covering the gate, and a silicon oxide layer covering silicon nitride layer.
 
10. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 1, wherein Step 1 further comprises: providing a flexible base, and the oxide semiconductor TFT being disposed on the flexible base.
 
11. A method for improving threshold voltage of oxide semiconductor thin film transistor (TFT), comprising the steps of:

Step 1: providing an oxide semiconductor TFT, comprising: a gate, a gate insulating layer covering the gate, an oxide semiconductor layer disposed on the gate insulating layer, and a source and a drain disposed on the oxide semiconductor layer spaced form each other with an interval;

Step 2: performing a default number of bending operations on the oxide semiconductor TFT, or performing a bending operation on the oxide semiconductor TFT for a default duration; the bending operation compressing or stretching the oxide semiconductor layer to improve the threshold voltage of the oxide semiconductor TFT;

wherein in Step 2, the default number of bending operations being more than or equal to 100,000 times;
wherein in Step 2, the default duration for the bending operation being longer than or equal to 45 days;
wherein the oxide semiconductor TFT having a bending radius less than or equal to 3mm during the bending operation;
wherein the gate, the source and the drain being made of one or more of the materials of molybdenum (Mo), aluminum (Al), and titanium (Ti);
wherein the gate insulating layer comprising a silicon nitride layer covering the gate, and a silicon oxide layer covering silicon nitride layer.
 
12. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 11, wherein in Step 2, the bending operation stretches the oxide semiconductor layer so that the threshold voltage of the oxide semiconductor TFT is reduced and gradually stabilized.
 
13. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 11, wherein in Step 2, the bending operation compresses the oxide semiconductor layer so that the threshold voltage of the oxide semiconductor TFT is increased and gradually stabilized.
 
14. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 11, wherein the oxide semiconductor layer is made of indium gallium zinc oxide (IGZO).
 
15. The method for improving threshold voltage of oxide semiconductor TFT as claimed in Claim 11, wherein Step 1 further comprises: providing a flexible base, and the oxide semiconductor TFT being disposed on the flexible base.
 




Drawing