(19)
(11)EP 4 224 250 A3

(12)EUROPEAN PATENT APPLICATION

(88)Date of publication A3:
06.09.2023 Bulletin 2023/36

(43)Date of publication A2:
09.08.2023 Bulletin 2023/32

(21)Application number: 23166047.3

(22)Date of filing:  20.08.2020
(51)International Patent Classification (IPC): 
G02F 1/365(2006.01)
G02B 6/02(2006.01)
(52)Cooperative Patent Classification (CPC):
G01J 1/4257; G01M 11/35; G01M 11/33; G01J 2001/4247; G01J 1/0425; G03F 7/70616; H01S 3/0092; G02F 2202/32; G02F 1/365; G02B 6/4225; G02B 6/02309
(84)Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30)Priority: 02.09.2019 EP 19194974
11.12.2019 EP 19215183
20.01.2020 EP 20152635
26.03.2020 EP 20165824

(62)Application number of the earlier application in accordance with Art. 76 EPC:
20191997.4 / 3786703

(71)Applicants:
  • ASML Netherlands B.V.
    5500 AH Veldhoven (NL)
  • ASML Holding N.V.
    5500 AH Veldhoven (NL)

(72)Inventors:
  • GÖTZ, Peter, Maximilian
    5500 AH Veldhoven (NL)
  • BAUERSCHMIDT, Sebastian, Thomas
    5500 AH Veldhoven (NL)
  • UEBEL, Patrick, Sebastian
    5500 AH Veldhoven (NL)
  • HUGERS, Ronald Franciscus Herman
    5500AH Veldhoven (NL)
  • BOER, Jan, Adrianus
    5500 AH Veldhoven (NL)
  • BOS, Edwin, Johannes, Cornelis
    5500 AH Veldhoven (NL)
  • BROUNS, Andreas, Johannes, Antonius
    5500 AH Veldhoven (NL)
  • PROSYENTSOV, Vitaliy
    5500 AH Veldhoven (NL)
  • SCHOLTES - VAN EIJK, Paul, William
    5500 AH Veldhoven (NL)
  • TEUNISSEN, Paulus, Antonius, Andreas
    5500 AH Veldhoven (NL)
  • AJGAONKAR, Mahesh, Upendra
    Wilton, 06897 (US)

(74)Representative: ASML Netherlands B.V. 
Corporate Intellectual Property P.O. Box 324
5500 AH Veldhoven
5500 AH Veldhoven (NL)

  


(54)MODE CONTROL OF PHOTONIC CRYSTAL FIBER BASED BROADBAND LIGHT SOURCES


(57) Disclosed is a polarization control system and method. The system controls the output polarization of a broadband light source comprising a waveguide. The system comprises at least one detection unit configured to measure one or more parameters of radiation emitted from said broadband light source to generate measurement data; and comprises a processing unit configured to infer a polarization property of said radiation emitted from said broadband light source from said measurement data. Based on the evaluation, the polarization control system generates a control signal for optimization of the pump polarization conditions of said broadband light source. The pump polarization conditions relating to the coupling of a pump laser beam with respect to a fiber axis of the photonic crystal fiber.







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