Description     Claims     Drawing  

JP04128379A   [0012] 
USRE34861E   [0020] 
US4946547A   [0020] 
US5200022A   [0020] 

Semiconductors and Semimetals   [0002] 
Highly Uniform Growth on a Low-Pressure MOPVE Multiple Wafer System   [0007] 
Modeling of Chimney CVD Reactors   [0009] 
MOCVD in Inverted Stagnation Point Flow   [0011]