Description

Claims

Drawing

JP04128379A	[0012]
USRE34861E	[0020]
US4946547A	[0020]
US5200022A	[0020]

Semiconductors and Semimetals	[0002]
Highly Uniform Growth on a Low-Pressure MOPVE Multiple Wafer System	[0007]
Modeling of Chimney CVD Reactors	[0009]
MOCVD in Inverted Stagnation Point Flow	[0011]