Description  Claims  Drawing  Cited references 

US2004086872A   [0008] 
WO2005024437A   [0008] 
US2004260204A   [0008] 
US2002120183A   [0008] 
US6503231B   [0033] 

Introduction to Microelectronic Fabrication   [0034] 
Semiconductor Integrated Circuit Processing Technology   [0034] 
Proceedings of the IEEE Micro Electro Mechanical Systems Conference   [0034] 
Handbook of Microlithography, Micromachining & Microfabrication   [0034] 
Sensors and Actuators A: Physical   [0034] 
Nucleic Acids Res.   [0052]