Description     Claims  

US20060246373A   [0002]  [0042]  [0043] 
US20080268376A1   [0003] 
EP1764652A2   [0003] 
US2008118860A1   [0003] 
EP1720072A1   [0003] 
EP2090598A1   [0003] 
EP2008123560A1   [0003] 
US6136501A   [0023] 
US6042997A   [0038]  [0038] 
US5492793A   [0038] 
US5929176A   [0038] 
US6090526A   [0038] 
US4983492A   [0038] 
US5130410A   [0038] 
US5216111A   [0038] 
US5529880A   [0038] 
US5843624A   [0038] 
US6048664A   [0038] 
US6057083A   [0038] 
EP01008913A1   [0038]  [0038] 
EP00930542A1   [0038] 
US091143462B   [0038] 
US6048662A   [0038] 
US0114914W   [0038] 
US567634A   [0038] 
US6803171B   [0038] 
US9921912W   [0038] 
EP0829766A2   [0053] 
EP0783136A2   [0053] 
EP930542A1   [0055] 
US6692888B   [0055] 
US6680159B   [0055] 
EP96118111A   [0062] 
EP0783136A   [0062] 

J. Vac. Sci. Techn. B   [0044]