Description  Claims  Drawing  Cited references 

EP0810643A2   [0008] 
US2006042651A1   [0008] 
JP2007150164A   [0008] 
US6124214A   [0008] 
JP2008085150A   [0008] 

Removal of nano-particles by mixed-fluid jet: evaluation of cleaning performance and comparison with megasonic   [0008] 
The effective damage-free megasonic cleaning using N2 dissolved APM   [0008]