Abstract  Description  Claims  Drawing  Cited references 

Introduction to Microelectronic Fabrication   [0024] 
Semiconductor Integrated Circuit Processing Technology   [0024] 
Proceedings of the IEEE Micro Electro Mechanical Systems Conference   [0024] 
Handbook of Microlithography, Micromachining & Microfabrication   [0024] 
Journal of Microelectromechanical Systems   [0030] 
Microelectromechanical Systems   [0042] 
Transducers '03, The 12th International Conference on Solid State Sensors, Actuators, and Microsystems   [0042] 
Active Matrix Liquid Crystal Displays: Fundamentals and Applications   [0071] 
Liquid Crystal Displays: Driving Schemes and Electro-Optical Effects   [0120]