Description  Claims  Drawing  Cited references 

US3288142A   [0005] 
US5192265A   [0007] 
US4551128A   [0008] 
US4781673A   [0009] 
US6126628A   [0010] 
EP0414649A2   [0011]  [0015]  [0017] 
US3674050A   [0012] 
US3752183A   [0013] 
US4675003A   [0014] 
US4682625A   [0015]  [0016] 
US2977980A   [0016] 
FR2685206A   [0017] 
EP0982048A1   [0017] 
US1879197A   [0018] 
US7285296B   [0025] 

A constant flow-rate microvalve actuator based on silicon and micromachining technology   [0017]