Description  Claims  Drawing  Cited references 

EP1987535A   [0006] 
WO2010133550A   [0007] 
WO2010059118A1   [0008] 
US2005150683A1   [0009] 
US2009160058A1   [0010] 
EP2165362A   [0051] 

Barrier and Copper Seed Layer Wet Etching   [0005]