Description  Claims  Drawing  Cited references 

WO9938630A   [0014] 
WO0115819A   [0014] 

Journal of Micromechanics and Microengineering   [0056] 
Opt. Lett.   [0056] 
Micro & Nano Letters   [0056] 
Microelectronic Engineering   [0056] 
Appl. Phys. A   [0056] 
Fabrication of 3D solenoid microcoils in silica glass by femtosecond laser wet etch and microsolidics   [0056] 
Melt Infiltration of Metal Matrix Composites   [0056] 
Advanced Micro & Nanosystems   [0056] 
The International Journal of Advanced Manufacturing Technology   [0056] 
Microsyst Technol   [0056] 
Microsyst Technol   [0056] 
Journal of Micromechanics and Microengineering   [0056] 
Microsyst Technol   [0056] 
Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching   [0056] 
Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates†   [0056] 
Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing   [0056] 
Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH   [0056] 
Femtosecond Laser-Assisted Etching of Fluoride Crystals   [0056] 
Femtosecond laser-assisted formation of channels in sapphire using KOH solution   [0056] 
Nanomorphing with Ultrafast Lasers and Biomedical Applications   [0056] 
Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing   [0056] 
Three dimensional laser microfabrication in diamond using a dual adaptive optics system   [0056] 
Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica   [0056] 
Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching   [0056] 
Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser   [0056] 
Optics and Laser Technology   [0056] 
Opt. Lett.   [0056]