Description  Claims  Drawing  Cited references 

US62520238   [0001] 
US2004071393A1   [0002] 
US2004202407A1   [0002] 
EP1099970A2   [0002] 

Optical Components and Devices for Next-Generation Photonic Networks   [0002] 
Modular MEMS design and fabrication for an 80 x 80 transparent optical cross-connect switch   [0002]