Description  Claims  Drawing  Cited references 

EP1887110A1   [0015] 
US20110084366A1   [0016] 
US2001021574A1   [0017]  [0022]  [0072]  [0072]  [0072]  [0087] 
US20120306052A1   [0018]  [0020]  [0022] 
EP1420440A1   [0020] 
WO2017097675A1   [0021]  [0062] 

Getter efficiencies and their dependence on material parameters and thermal processes: How can this be modeled   [0004] 
J. Appl.Phys.   [0041] 
LST-300A and new generations of the Light Scattering Tomograph Micro- and Grown-in Defect Analyzer manufactured   [0042]