Beschreibung  Ansprüche  Zeichnung  Angeführte Verweise 

DE865215B   [0001] 
US4825968A   [0002] 
EP0241649A2   [0003] 
DE102011111238A1   [0005] 
DE19960418A1   [0006] 

High precision optical sensor for electromagnetic force compensated balances   [0002] 
The BIPM flexure-strip balance FB-2   [0002] 
Nanopositioning system with combined force measurement based on electromagnetic force compensated balances   [0005] 
Parameterization and optimization of EMC balances based on the frequency response of the impedance   [0030]  [0032]