Description  Claims  Drawing  Cited references 

US20040183554A   [0004] 
US8907690B2   [0009] 
US6943571B   [0011] 
US4703252A   [0011] 
US5691648A   [0011] 
US6747445B   [0011] 
US7034519B2   [0011] 
US20050151552A   [0011] 
US20050081609A   [0011] 
US7852093B2   [0012] 
WO2007045246A   [0012] 
WO2009030230A1   [0013] 
WO2012083955A1   [0013] 
WO2015067818A1   [0014] 

Philips Res. Rep.   [0004] 
Philips Tech. Rev.   [0004] 
Appl. Phys. Lett.   [0004] 
Appl. Phys. Lett   [0009] 
J. Appl. Phys.   [0009] 
Journal of applied physics   [0013] 
J. Appl. Phys.   [0013] 
16th IEEE international conference on advanced thermal processing of semiconductors   [0013]