Description  Claims  Drawing  Cited references 

US5710059A   [0009] 

6H-SiC P+N Junctions Fabricated by Beryllium Implantation   [0007] 
Beryllium-Related Defect Centers in 4H-SiC   [0008] 
Al, Al/C and Al/Si Implantations in 6H-SiC   [0010]