Abstract     Description     Claims  

JP2003195003A   [0004] 
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FR2943798   [0079] 
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FR2957454   [0148] 
WO2008001011A   [0159] 
WO2012173596A   [0161] 
WO9949097A   [0162] 

Thin Film Processes'' and ''Thin Film Processes II   [0087]