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US70548905   [0001] 
US71719205   [0001] 
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US6503231B   [0033] 

Introduction to Microelectronic Fabrication   [0034] 
Semiconductor Integrated Circuit Processing Technology   [0034] 
Proceedings of the IEEE Micro Electro Mechanical Systems Conference 1987-1998   [0034] 
Micromachining & Microfabrication   [0034] 
Sensors and Actuators A: Physical   [0034] 
Nucleic Acids Res.   [0052]