Description

Claims

Drawing

Cited references

US5409859A	[0014]
US5087576A	[0014]  [0020]
JPH0982663A	[0015]

Titanium and Aluminum-Titanium ohmic contacts to p-type SiC	[0008]
Mechanism of ohmic behavior of Al/Ti contacts to p-type 4H-SiC after annealing	[0008]
Ohmic contacts to SiC	[0009]
Phase formation at rapid thermal annealing of Al:Ti:Ni ohmic contacts on 4H-SiC	[0009]
Ternary TiAlGe ohmic contacts for p-type 4H-SiC	[0013]
Thermally stable low ohmic contacts to p-type 6H-SiC using cobalt silicides	[0013]