Description  Claims  Drawing  Cited references 

US5409859A   [0014] 
US5087576A   [0014]  [0020] 
JPH0982663A   [0015] 

Titanium and Aluminum-Titanium ohmic contacts to p-type SiC   [0008] 
Mechanism of ohmic behavior of Al/Ti contacts to p-type 4H-SiC after annealing   [0008] 
Ohmic contacts to SiC   [0009] 
Phase formation at rapid thermal annealing of Al:Ti:Ni ohmic contacts on 4H-SiC   [0009] 
Ternary TiAlGe ohmic contacts for p-type 4H-SiC   [0013] 
Thermally stable low ohmic contacts to p-type 6H-SiC using cobalt silicides   [0013]