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EP-0254035-A1-19880127
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EP-0254035-A1-19880127
On a semiconductor film (11) to function as a lead-out electrode of a semiconductor element, a metal silicide film (13) and a metal nitride film (14) are successively provided, whereby alloying and inferior contact resistances attributed to heat during wiring with aluminum can be effectively suppressed, so that the reliability of a semiconductor device can be enhanced.
On a semiconductor film (11) to function as a lead-out electrode of a semiconductor element, a metal silicide film (13) and a metal nitride film (14) are successively provided, whereby alloying and inferior contact resistances attributed to heat during wiring with aluminum can be effectively suppressed, so that the reliability of a semiconductor device can be enhanced.
en
European Patent Office
EP0254035
EP 0254035
H01L 29/40
Electrodes for semiconductor devices
Electrodes for semiconductor devices - European Patent Office - EP 0254035 A1
Electrodes for semiconductor devices - European Patent Office - EP 0254035 A1
Adobe PDF Library 8.0
"EP0254035"; "EP 0254035"; "H01L 29/40"; "Electrodes for semiconductor devices"
1.4
1
B
9
EP
0254035
A1
1988-01-27
87108781
1987-06-19
JP
14006486
1986-06-18
H01L 29/40
HITACHI, LTD.
Owada, Nobuo
Horiuchi, Mitsuaki
Tsuneoka, Masatoshi
Taneoka, Tadayuki
Strehl Schübel-Hopf Groening & Partner
Electrodes for semiconductor devices
Elektroden für Halbleiteranordnungen
Electrodes for semiconductor devices
Electrodes pour dispositifs semi-conducteurs
On a semiconductor film (11) to function as a lead-out electrode of a semiconductor element, a metal silicide film (13) and a metal nitride film (14) are successively provided, whereby alloying and inferior contact resistances attributed to heat during wiring with aluminum can be effectively suppressed, so that the reliability of a semiconductor device can be enhanced.
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