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Jouve S.A., EPO - Publication - KB, TaggedPDF v1.27
EP-0589103-A1-19940330
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EP-0589103-A1-19940330
An image projection method is disclosed wherein a stop (30A) having a rectangular opening is disposed in an illumination optical system (30) and, through the function of this stop, a rectangular effective light source is defined on a pupil (50A) of a projection optical system (50). With light from this effective light source, longitudinal and transverse patterns of a reticle extending substantially long the configuration of the effective light source are illuminated. Zeroth order and first order diffraction light caused by these patterns is incident and distributed on the pupil so as to define thereon a rectangular configuration about the center of the pupil, and the longitudinal and transverse patterns are images with the diffraction light.
An image projection method is disclosed wherein a stop (30A) having a rectangular opening is disposed in an illumination optical system (30) and, through the function of this stop, a rectangular effective light source is defined on a pupil (50A) of a projection optical system (50). With light from this effective light source, longitudinal and transverse patterns of a reticle extending substantially long the configuration of the effective light source are illuminated. Zeroth order and first order diffraction light caused by these patterns is incident and distributed on the pupil so as to define thereon a rectangular configuration about the center of the pupil, and the longitudinal and transverse patterns are images with the diffraction light.
en
European Patent Office
EP0589103
EP 0589103
G03F 07/20
Image projection method and semiconductor device manufacturing method using the same
Image projection method and semiconductor device manufacturing method using the same - European Patent Office - EP 0589103 A1
Image projection method and semiconductor device manufacturing method using the same - European Patent Office - EP 0589103 A1
Adobe PDF Library 8.0
"EP0589103"; "EP 0589103"; "G03F 07/20"; "Image projection method and semiconductor device manufacturing method using the same"
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EP
0589103
A1
1994-03-30
92308599
1992-09-22
G03F 07/20
CANON KABUSHIKI KAISHA
Hayata, Shigeru, c/o Canon K.K.
Beresford, Keith Denis Lewis et al
Image projection method and semiconductor device manufacturing method using the same
Optische Projektionsmethode und Verfahren zur Herstellung von Halbleitervorrichtungen unter Verwendung dieser Methode
Image projection method and semiconductor device manufacturing method using the same
Méthode de projection d'une image et procédé de fabrication de dispositifs semi-conducteurs utilisant cette méthode
An image projection method is disclosed wherein a stop (30A) having a rectangular opening is disposed in an illumination optical system (30) and, through the function of this stop, a rectangular effective light source is defined on a pupil (50A) of a projection optical system (50). With light from this effective light source, longitudinal and transverse patterns of a reticle extending substantially long the configuration of the effective light source are illuminated. Zeroth order and first order diffraction light caused by these patterns is incident and distributed on the pupil so as to define thereon a rectangular configuration about the center of the pupil, and the longitudinal and transverse patterns are images with the diffraction light.
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