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2010-12-09T16:22:37+01:00
2010-10-31T23:49:31Z
2010-12-09T16:22:37+01:00
Jouve S.A., EPO - Publication - KB, TaggedPDF v1.27
EP-0329097-A2-19890823
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EP-0329097-A2-19890823
A magnetic object lens for electron beam exposure apparatus, an output or lower pole piece of which, facing an object to be exposed in the electron beam exposure apparatus, has a bore therethrough, through which the electron beam passes to the object, which bore provides a restricted opening, for the electron beam to pass through the pole pieces, corresponding to the restricted range and direction of scanning of the electron beam in the apparatus, thereby the allow scanning of the electron beam on the object but to substatially inhibit or restrict leakage of magnetic flux from the lens towards the object.
A magnetic object lens for electron beam exposure apparatus, an output or lower pole piece of which, facing an object to be exposed in the electron beam exposure apparatus, has a bore therethrough, through which the electron beam passes to the object, which bore provides a restricted opening, for the electron beam to pass through the pole pieces, corresponding to the restricted range and direction of scanning of the electron beam in the apparatus, thereby the allow scanning of the electron beam on the object but to substatially inhibit or restrict leakage of magnetic flux from the lens towards the object.
en
European Patent Office
EP0329097
EP 0329097
H01J 37/141
H01J 37/30
H01J 37/317
Magnetic object lens of electron beam exposure apparatus
Magnetic object lens of electron beam exposure apparatus - European Patent Office - EP 0329097 A2
Magnetic object lens of electron beam exposure apparatus - European Patent Office - EP 0329097 A2
Adobe PDF Library 8.0
"EP0329097"; "EP 0329097"; "H01J 37/141"; "H01J 37/30"; "H01J 37/317"; "Magnetic object lens of electron beam exposure apparatus"
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0329097
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1989-08-23
89102564
1989-02-15
JP
33088
1988-02-16
H01J 37/141
H01J 37/30
H01J 37/317
FUJITSU LIMITED
Yasuda, Hiroshi c/o Fujitsu Limited
Suzuki, Masahiko
Magnetic object lens of electron beam exposure apparatus
Magnetische Objektivlinse für Elektronenstrahl-Belichtungsgerät
Magnetic object lens of electron beam exposure apparatus
Lentille magnétique d'un objectif pour appareil d'exposition par faisceau d'électrons
A magnetic object lens for electron beam exposure apparatus, an output or lower pole piece of which, facing an object to be exposed in the electron beam exposure apparatus, has a bore therethrough, through which the electron beam passes to the object, which bore provides a restricted opening, for the electron beam to pass through the pole pieces, corresponding to the restricted range and direction of scanning of the electron beam in the apparatus, thereby the allow scanning of the electron beam on the object but to substatially inhibit or restrict leakage of magnetic flux from the lens towards the object.
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