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2010-12-10T16:15:48+01:00
2010-11-10T06:09:29Z
2010-12-10T16:15:48+01:00
Jouve S.A., EPO - Publication - KB, TaggedPDF v1.27
EP-0353583-A2-19900207
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EP-0353583-A2-19900207
Es sollen durch Photohärtung dünne Schichten auf Siliconbasis mit hoher Reinheit, thermischer Beständigkeit und guten dielektrischen Eigenschaften bei kurzen Bestrahlungszeiten hergestellt werden.Dazu werden nicht-funktionalisierte Organosiloxane mit Alkylgruppen oder Alkyl- und Arylgruppen photochemisch mittels Impulslaserstrahlung mit einer Wellenlänge <400 nm polymerisiert und/oder vernetzt, wobei die Impulsdauer 10 ps bis 1 ms, die Impulsfrequenz 1 Hz bis 10 kHz und die Energiedichte mindestens 1 J/cm² beträgt und die Bestrahlung mit einem oder mehreren Impulsen erfolgt.Passivier- und Isolierschichten für Halbleiterbauelemente und -schaltungen
Es sollen durch Photohärtung dünne Schichten auf Siliconbasis mit hoher Reinheit, thermischer Beständigkeit und guten dielektrischen Eigenschaften bei kurzen Bestrahlungszeiten hergestellt werden.Dazu werden nicht-funktionalisierte Organosiloxane mit Alkylgruppen oder Alkyl- und Arylgruppen photochemisch mittels Impulslaserstrahlung mit einer Wellenlänge <400 nm polymerisiert und/oder vernetzt, wobei die Impulsdauer 10 ps bis 1 ms, die Impulsfrequenz 1 Hz bis 10 kHz und die Energiedichte mindestens 1 J/cm² beträgt und die Bestrahlung mit einem oder mehreren Impulsen erfolgt.Passivier- und Isolierschichten für Halbleiterbauelemente und -schaltungen
de
European Patent Office
EP0353583
EP 0353583
C08J 03/28
H01L 21/312
B05D 03/06
G03F 07/075
Method for making thin silicone coatings
Verfahren zur Erzeugung dünner Schichten auf Siliconbasis - European Patent Office - EP 0353583 A2
Verfahren zur Erzeugung dünner Schichten auf Siliconbasis - European Patent Office - EP 0353583 A2
Adobe PDF Library 8.0
"EP0353583"; "EP 0353583"; "C08J 03/28"; "H01L 21/312"; "B05D 03/06"; "G03F 07/075"; "Method for making thin silicone coatings"
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1988-08-05
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G03F 07/075
Siemens Aktiengesellschaft
Henkel, Hans-Joachim, Dr.
Roth, Wolfgang, Dr.
Markert, Helmut, Dr.
Kautek, Wolfgang, Dr.
Verfahren zur Erzeugung dünner Schichten auf Siliconbasis
Verfahren zur Erzeugung dünner Schichten auf Siliconbasis
Method for making thin silicone coatings
Procédé de fabrication de couches minces de revêtement à base de polysiloxanes
Es sollen durch Photohärtung dünne Schichten auf Siliconbasis mit hoher Reinheit, thermischer Beständigkeit und guten dielektrischen Eigenschaften bei kurzen Bestrahlungszeiten hergestellt werden.Dazu werden nicht-funktionalisierte Organosiloxane mit Alkylgruppen oder Alkyl- und Arylgruppen photochemisch mittels Impulslaserstrahlung mit einer Wellenlänge <400 nm polymerisiert und/oder vernetzt, wobei die Impulsdauer 10 ps bis 1 ms, die Impulsfrequenz 1 Hz bis 10 kHz und die Energiedichte mindestens 1 J/cm² beträgt und die Bestrahlung mit einem oder mehreren Impulsen erfolgt.Passivier- und Isolierschichten für Halbleiterbauelemente und -schaltungen
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