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EP-0607674-A1-19940727
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EP-0607674-A1-19940727
In an optical lithographical system (e.g., 100) for printing features of a patterned mask (e.g., 103) into a workpiece (e.g., 120), such as in a semiconductor device, a one- or two-dimensional (depending on the features of the mask) optical transmission phase-shift diffracting device (e.g., 107) is inserted between an optical condensor (e.g., 105) and the patterned mask whose features are to be printed into the workpiece. The diffracting device is designed so as to enable an imaging lens system (e.g., 102) to collect more than merely a single order of the resulting diffraction patterns of the features of the mask and, by varying the spatial periodicity of the diffracting device, to tailor the illumination incident on the mask in accordance with the features (e.g., 114, 115) of the mask.
In an optical lithographical system (e.g., 100) for printing features of a patterned mask (e.g., 103) into a workpiece (e.g., 120), such as in a semiconductor device, a one- or two-dimensional (depending on the features of the mask) optical transmission phase-shift diffracting device (e.g., 107) is inserted between an optical condensor (e.g., 105) and the patterned mask whose features are to be printed into the workpiece. The diffracting device is designed so as to enable an imaging lens system (e.g., 102) to collect more than merely a single order of the resulting diffraction patterns of the features of the mask and, by varying the spatial periodicity of the diffracting device, to tailor the illumination incident on the mask in accordance with the features (e.g., 114, 115) of the mask.
en
European Patent Office
EP0607674
EP 0607674
G03F 07/20
Optical lithographical imaging system including optical transmission diffraction devices
Optical lithographical imaging system including optical transmission diffraction devices - European Patent Office - EP 0607674 A1
Optical lithographical imaging system including optical transmission diffraction devices - European Patent Office - EP 0607674 A1
Adobe PDF Library 8.0
"EP0607674"; "EP 0607674"; "G03F 07/20"; "Optical lithographical imaging system including optical transmission diffraction devices"
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B
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EP
0607674
A1
1994-07-27
93309858
1993-12-08
US
999064
1992-12-31
US
29749
1993-03-11
G03F 07/20
ATT Corp.
Raab, Eric Lowell
Vaidya, Sheila
White, Donald Lawrence
Johnston, Kenneth Graham et al
Optical lithographical imaging system including optical transmission diffraction devices
Lithographisches System zur optischen Abbildung mit Vorrichtungen zur Durchlichtbeugung
Optical lithographical imaging system including optical transmission diffraction devices
Système lithographique de formation d'image optique avec dispositifs de diffraction de la lumière transmise
In an optical lithographical system (e.g., 100) for printing features of a patterned mask (e.g., 103) into a workpiece (e.g., 120), such as in a semiconductor device, a one- or two-dimensional (depending on the features of the mask) optical transmission phase-shift diffracting device (e.g., 107) is inserted between an optical condensor (e.g., 105) and the patterned mask whose features are to be printed into the workpiece. The diffracting device is designed so as to enable an imaging lens system (e.g., 102) to collect more than merely a single order of the resulting diffraction patterns of the features of the mask and, by varying the spatial periodicity of the diffracting device, to tailor the illumination incident on the mask in accordance with the features (e.g., 114, 115) of the mask.
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