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(11) | EP 0 275 844 A3 |
(12) | EUROPEAN PATENT APPLICATION |
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(54) | Non evaporable getter device incorporating a ceramic support and method for the manufacture thereof |
(57) A porous non-evaporable getter device is described which comprises a ceramic support,
a layer of sintered non-evaporable getter material and an intermediate electrically
conducting layer at least partially diffused into the ceramic support and into the
porous sintered getter layer. There also is describÂed a method for the manufacture
of such a getter device in which the ceramic support is coated with a thin conducting
film on which is electrically deposited a thicker metallic layer which in turn is
covered, by electrophoresis, a mixture of a non-evaporable getter material and an
antisintering agent. The support is finally sintered to obtain the desired porous
getter device and it is then cooled. |