(19)
(11) EP 0 464 383 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
15.07.1992 Bulletin 1992/29

(43) Date of publication A2:
08.01.1992 Bulletin 1992/02

(21) Application number: 91109114.8

(22) Date of filing: 04.06.1991
(51) International Patent Classification (IPC)5: H01J 3/02
(84) Designated Contracting States:
AT CH DE FR GB IT LI NL

(30) Priority: 26.06.1990 SU 4843045

(71) Applicant: HAUZER TECHNO COATING EUROPE BV
NL-5916 PB Venlo (NL)

(72) Inventors:
  • Alexeevich, Arkhipov Boris
    236000 Kaliningrad-obl. (SU)
  • Mitrofanovich, Gorbachev Yuriy
    236005 Kaliningrad-obl. (SU)
  • Alexeevich, Ivanov Viktor
    236006 Kaliningrad-obl. (SU)
  • Nikolaevich, Kozubsky Konstantin
    236006 Kaliningrad-obl. (SU)
  • Alexeevich, Komarov Georgy
    236039 Kaliningrad-obl. (SU)

(74) Representative: Dipl.-Phys.Dr. Manitz Dipl.-Ing. Finsterwald Dipl.-Ing. Grämkow Dipl.Chem.Dr. Heyn Dipl.Phys. Rotermund Morgan, B.Sc.(Phys.) 
Postfach 22 16 11
80506 München
80506 München (DE)


(56) References cited: : 
   
       


    (54) Plasma neutralisation cathode


    (57) A plasma compensation cathode comprises a casing (1) accommodating coaxially with its outlet hole (2) a hollow holder (3) and a thermal emitter (4) with a central passage (5), a layer (10) of material chemically inert at high temperatures to the materials of the holder and emitter being interposed therebetween. The central passage (5) is blind at the side of admission of gas, and is communicated with the interior of the holder (3) by way of a through passage (8) made in the wall of the thermal emitter (4) so that its axis intersects the axis of passage (5), and longitudinal grooves (9) made in the side surface of the thermal emitter (4) at the location of the inlet holes of the through passage (8). The holder (3) is embraced by heater (6) having a support ring (7) positioned in its midportion and secured in an insulation sleeve (18) separating the heater (6) from the coaxial heat screens (11) interconnected successively to define a sealed cavity (14) wherethrough the interior of the holder (3) communicates with the gas feeding pipe (13) secured in the casing (1) through the support insulator (17). Interposed between mechanical filters (16) and between holder (3) and pipe (13) is a getter (15).






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