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(11) | EP 0 930 167 A3 |
(12) | EUROPEAN PATENT APPLICATION |
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(54) | Ink jet recording head, substrate for this head, manufacturing method of this substrate and ink jet recording apparatus |
(57) In ink jet recording head in which a heating resistor (13) forming a heating portion
(20), a wiring (14) electrically connected to the heating resistor, and a protecting
film formed on the heating resistor and the wiring to protect the heating resistor
and the wiring are arranged on a substrate (11) for the ink jet recording head, and
an ink path communicated with a discharging port for discharging ink is formed on
the substrate (11) for the ink jet recording head, the protecting film includes a
first layer protecting film (15) for covering the heating resistor and the wiring,
a second layer protecting film (16) formed on the first layer protecting film by a
material different from that of the first layer protecting film and having an opening
in a portion corresponding to the heating portion of the heating resistor and constructed
by an inorganic material, and a third layer protecting film (17) constructed by the
same material system as the first layer protecting film and covering the second layer
protecting film and the first layer protecting film exposed from the opening. |