(19) |
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(11) |
EP 1 172 455 A3 |
(12) |
EUROPEAN PATENT APPLICATION |
(88) |
Date of publication A3: |
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05.11.2003 Bulletin 2003/45 |
(43) |
Date of publication A2: |
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16.01.2002 Bulletin 2002/03 |
(22) |
Date of filing: 12.07.2001 |
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(51) |
International Patent Classification (IPC)7: C23C 8/36 |
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(84) |
Designated Contracting States: |
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AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
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Designated Extension States: |
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AL LT LV MK RO SI |
(30) |
Priority: |
12.07.2000 JP 2000211518
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(71) |
Applicants: |
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- OSAKA PREFECTURE
Osaka-shi, Osaka (JP)
- Tanaka Limited
Sumiyoshi- ku, Osaka (JP)
- SDC Incorporated
Sakai-shi, Osaka (JP)
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(72) |
Inventors: |
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- Ishii, Eiichi
Amagasaki-shi,Hyogo (JP)
- Sone, Takumi
Yao-shi, Osaka (JP)
- Sato, Yukihiro
Amagasaki-shi, Hyogo (JP)
- Demizu, Kei
Kawachinagano-shi, Osaka (JP)
- Kakutani, Hideo
Tondabayashi-shi, Osaka (JP)
- Tanaka, Koichi
Osaka (JP)
- Tanaka, Shinichi
Osaka (JP)
- Tsuji, Noriyoshi
Osakasayama-shi, Osaka (JP)
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(74) |
Representative: Glawe, Delfs, Moll & Partner |
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Patentanwälte Postfach 26 01 62 80058 München 80058 München (DE) |
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(54) |
Method of surface treatment of titanium metal |
(57) A method of carburizing treatment is proposed in which if carburizing is carried
out at a low temperature, carbon will not turn amorphose and deposit on the surface
of a titanium metal but reliably penetrate into between metallic atoms. It is a method
of surface treatment of a titanium metal comprising the steps of heating the titanium
metal to a temperature of 400-690 °C in a cleaning gas atmosphere containing hydrogen
gas, subjecting the surface of the titanium metal to cleaning by applying a DC voltage
of 200-1500 V, and plasma carburizing in an atmosphere comprising a carburizing gas
having the molar ratio of hydrogen atoms (H) to carbon atoms (C) adjusted to (H/C)
≦ 9 at a pressure of 13-400 Pa and a temperature of 400-690 °C . Ionization reaction
in the gas is suppressed suitably. Because there exists no excessive carbon which
is not used for carburization but turns soot or glass-like carbon, in the atmosphere
during carburization, carburizing reaction progresses smoothly.