[0001] The present invention concerns a rotary vacuum pump and a structure and a method
for the balancing thereof.
[0002] In the field of rotary vacuum pumps, it is known that either mechanical bearings,
such as ball or roller bearings, or magnetic bearings can be used for supporting the
rotating pump shaft.
[0003] The present invention concerns a rotary vacuum pump of the kind equipped with mechanical
bearings.
[0004] More particularly, the present invention concerns a turbomolecular rotary vacuum
pump of the kind disclosed for instance in EP-A-0962264 or EP-A-0773367.
[0005] As known, rotary pumps, and especially turbomolecular rotary pumps, are machines
equipped with a rotating portion, including a rotating shaft to which a set of parallel
rotor discs are secured, and co-operating with a stationary portion, generally a set
of stator discs, in order to obtain gas pumping from an inlet port to an outlet port
of the pump.
[0006] Depending on the kind of pump, higher or lower vacuum degrees can be obtained. For
instance, a turbomolecular pump can generate a vacuum of the order of 10
-7 mbar (10
-5 Pa) with a shaft rotation speed in the range 2x10
4 to 9x10
4 rpm.
[0007] A vacuum pump is thus a machine with a mass that is rotated at extremely high speed.
In a vacuum pump, such a rotating mass generally includes a rotating shaft, the rotor
of the electric motor driving said shaft into rotation, the set of rotor discs and
the inner rings of the rolling bearings rotatably supporting the pump shaft.
[0008] When the rotating mass is not arranged with its centre of gravity on the rotation
axis and thus is not balanced, forces of inertia are generated within the pump and
are transmitted through the housing to the outside of the pump. Such forces of inertia
cause unwanted stresses and vibrations, which are sources of noise and lead to an
early wear of the rolling bearings.
[0009] Moreover, in some specific applications, for instance where the pump is connected
to a precision measuring instrument, such as in mass spectrometry, vibrations are
sources of disturbances altering the operation of the measuring instrument and therefore
they cannot be tolerated.
[0010] One of the problems encountered in designing a rotary vacuum pump equipped with mechanical
bearings is thus how to reduce the vibrations produced by the pump due to unbalance
of the rotating masses.
[0011] Generally, it is known that balancing of a rotating mass can be obtained by means
of further additional rotating masses, coupled to the main mass so that the centre
of gravity of the overall mass is brought again on the rotation axis (static balancing)
and the rotation axis coincides with a main axis of inertia (dynamic balancing). A
dynamically balanced rotor does not transmit stresses to the supports and it is therefore
an optimum solution.
[0012] In the field of rotary vacuum pumps, and in particular of turbomolecular ones, the
pump rotor is dynamically balanced through an iterative process in which measuring
steps of the vibrations transmitted by the pump to an external structure alternate
with adjusting steps of the position of one or more additional masses placed on the
rotor, until the optimum conditions are attained.
[0013] The main problems related to the rotor balancing step are, on the one hand, the definition
of the mathematical model used in order to relate the vibrations measured during the
balancing step to the rotor unbalance and, consequently, to the arrangement of the
correcting masses, and, on the other hand, the choice of the kind of vibration sensors
and the arrangement thereof.
[0014] In the field of rotary vacuum pumps, the sensors generally used during the rotor
balancing step are accelerometers, that is sensors capable of transforming the acceleration
of a moving body to which they are secured into an electric signal, the intensity
of which is just a function of the acceleration the sensor is being submitted to.
[0015] According to the prior art, the dynamic balancing of a vacuum pump rotor is performed
by placing the pump, without stator discs, inside a bell-shaped casing onto which
at least two accelerometers, for instance piezoelectric accelerometers, are located.
Once the rotor is rotated at high speed, the accelerometers located onto the stationary
bell allow measuring the vibrations induced by unbalances, if any, of the rotating
masses.
[0016] Yet such a solution has some drawbacks, of which the main is that the point where
vibrations are measured, i.e. the area where the accelerometer is located, is relatively
far from the source of said vibrations, i.e. the rotor.
[0017] The provision of a set of masses placed between the rotor and the accelerometer,
and comprising members that in part are very rigid and in part are resilient and damping,
makes it complex to define a reliable mathematical model relating the vibrations to
their cause, i.e. the unbalance of the rotor and the other moving masses.
[0018] Consequently, the iterative balancing process may need several pump stopping and
starting phases in order to apply the correcting masses, and this results in a considerable
increase of the time required to reach the optimum conditions and hence in a considerable
slowing down of the production.
[0019] It is the main object of the present invention to solve the problem of how effectively
and quickly to balance the rotating masses of a rotary vacuum pump, more particularly
a pump equipped with mechanical bearings such as a turbomolecular vacuum pump.
[0020] The above and other objects are achieved by means of a vacuum pump and a balancing
method as claimed in the appended claims.
[0021] Thanks to the positioning of displacement sensors close to the rotating masses of
the pump, it is possible to obtain a more direct measurement of the rotor vibrations
and hence to make the proper balancing thereof simpler and quicker.
[0022] According to the invention, the vibration measurement is not affected by the presence
of other pump components, which allows a considerable simplification of the mathematical
model relating the measured displacements to the rotor unbalance inducing them.
[0023] Advantageously, the provision of displacement sensors permanently located inside
the pump allows measuring the rotating mass unbalance also during steady state operation
of the same pump, that is when the pump has been completed with the stator part, assembled
and delivered to the customer.
[0024] Two embodiments of the invention, given by way of non-limiting example, will be described
hereinbelow with reference to the accompanying drawings, in which:
- Fig. 1 is a diagrammatic view of the displacement sensor;
- Fig. 2 is a diagram of the electronic circuitry of the displacement sensor;
- Fig. 3a is a cross-sectional view of a first example of a vacuum pump according to
the invention;
- Fig. 3b is a cross-sectional view of a second example of a vacuum pump according to
the invention.
[0025] Referring to Fig. 3a, a first turbomolecular rotary pump 101 according to the invention
is schematically shown.
[0026] Said pump 101 comprises a stationary portion and a rotating portion. The stationary
portion comprises a basement 103 on which the rotating portion is mounted. The latter
comprises a rotating shaft 105 supported by rolling bearings 107, for instance ball
bearings. Rotor 109 of electric motor 111 (the stator of which has not been shown
for sake of simplicity) used to rotate shaft 105, and pump rotor 113, equipped with
smooth or finned discs 115, are mounted on said rotating shaft 105.
[0027] As clearly shown in Fig. 3a, according to the construction design of pump 101, said
pump rotor 113 has a bell-shaped cavity 117 housing rotating shaft 105 of the pump
and electric motor 111, in order to make the pump axially more compact. Such an arrangement
is generally used for big turbomolecular pumps (rotor diameter of about 250 mm).
[0028] In fig. 3a the pump is shown during the balancing phase and hence rotor 113 is not
located inside the pump housing, which, as known, is equipped with stator discs, but
inside a vacuum-tight stationary bell 119 specifically intended for the balancing
of said rotor 113. Vacuum in said bell is made by means of an ancillary pumping system,
not shown.
[0029] According to the invention, a plurality of displacement sensors (four in the disclosed
embodiment) 121A - 121D are directly mounted in basement 103 of pump 101, close to
rotor 113 and to rotating shaft 105 thereof. Each sensor faces said shaft 105 or said
rotor 113 so that changes, if any, in the distance between the rotor and the sensor
during rotation of the rotor can be detected.
[0030] More particularly, in the case depicted in Fig. 3a, a first pair of sensors 121A,
121B face rotating shaft 105 and are turned towards it, whereas a second pair of sensors
121C, 121D face inner wall 113a of rotor 113 and are turned towards such wall.
[0031] According to the invention, eddy current displacement sensors are advantageously
employed.
[0032] Referring to Fig. 1, there is schematically shown a generic displacement sensor 51
comprising a coil 53, which is wound on a core 55 and in which a high frequency AC
current generating a main magnetic field flows. The variation of distance "a" between
coil 53 and an electrically conducting body R, for instance the pump rotor or the
shaft thereof, causes a corresponding variation of the magnetic field induced and
consequently of impedance Z measured in the coil of sensor 51.
[0033] By using an impedance-to-voltage converter, such as that shown in Fig. 2, a voltage
signal U, the value of which depends on impedance Z and hence on the distance of the
metal body from the sensor, can be obtained at the output from sensor 51.
[0034] More precisely, the circuit shown in Fig. 2 comprises a high frequency oscillator
65, an impedance 67 in series and a demodulator 63. Impedance 67 must be sufficiently
high to obtain a high sensitivity. Demodulation of voltage signal u outgoing from
the sensor allows obtaining a voltage signal U that is a function of distance "a".
[0035] Eddy current displacement sensors are capable of measuring distance variations of
the order of 1 nm and are perfectly suitable for use in balancing turbomolecular pump
rotors.
[0036] More particularly, in the described case, a variation of the distance of internal
wall 113a of rotor 113 from facing sensors 121C, 121D, caused by an unbalance in rotor
113, will cause a measurable impedance variation in said sensors. By measuring such
an impedance variation, it is possible to obtain the distance variation, and hence
the unbalance having generated it, and to correct such unbalance.
[0037] The process in case of a distance variation between rotating shaft 105 and sensors
121A, 121B is similar.
[0038] To correct the unbalance of rotor 113, cylindrical threaded bores 123 are provided
in rotor 113 and are arranged with their axes lying in a plane orthogonal to the rotation
axis of the rotor and tangentially relative to the same rotor. Additional masses consisting
of threaded dowels can be located and displaced in said bores.
[0039] As an alternative, other balancing methods comprise the insertion of masses consisting
of threaded dowels to be screwed into bores with axes radially arranged relative to
the rotor.
[0040] Further in accordance with the invention, and still referring to Fig. 3a, a third
pair of displacement sensors 121E, 121F is provided, which sensors are arranged close
to external wall 113b of rotor 113, between a pair of said rotor discs, and are turned
towards said wall. Said sensors 121 E, 121F are cantilevered on a vertical support
120 adjacent to a wall of outer bell 119.
[0041] It is clear that, at the end of the balancing phase, bell 119 and support 120, if
provided, will be removed and replaced by pump housing 121 with the stator integral
thereto, so that the pump will be ready for being sent to the customer and used. Consequently,
at the end of the balancing phase, displacement sensors 121 E, 121F integral with
bell 119 will be removed. On the contrary, sensors 121A - 121D mounted in basement
103 of pump 101 will remain inside said pump even during operation thereof, and they
could be advantageously used to carry out measurements on the rotor balance conditions
during normal pump operation.
[0042] Turning now to Fig. 3b, a second embodiment of the invention is partly depicted.
[0043] A turbomolecular pump 201 differs from that previously disclosed with reference to
Fig. 3a in that rotor 213 has no bell-shaped cavity receiving rotating shaft 205 and
electric motor 211. Shaft 205 is instead supported by a pair of rolling bearings 207,
for instance ball bearings, and is driven by an electric motor 211, the bearings and
the motor being located in a pump region that is axially separated from the pumping
region where rotor 213 is located.
[0044] That arrangement is generally used for small and medium size turbomolecular pumps
(rotor diameter smaller than about 160 mm).
[0045] Similarly to what described above, according to the invention a pair of displacement
sensors 221A, 221B is provided in basement 203 of pump 201, opposite rotating shaft
205 and at opposite sides of rotor 209 of electric motor 211.
[0046] Also in that second example, said displacement sensors are preferably eddy current
sensors.
[0047] Like in the previous embodiment, further displacement sensors 221C, 221D and 221E,
221F are provided, which are integral with outer bell 219 and face rotor 213.
[0048] More particularly, in the embodiment shown, a second pair of sensors 221C, 221D is
provided close to inner wall 213a of rotor 213, whereas a third pair of sensors 221E,
221F is provided close to outer wall 213b of rotor 213. Said sensors are turned towards
said rotor so that any variation in the distance between the rotor and the sensor
during rotation of the same rotor can be detected.
[0049] In order to properly locate the second pair of sensors 221C, 221D, bell 219 is advantageously
equipped with a central cylindrical projection 219a penetrating into central bore
213c of rotor 213.
[0050] A removable vertical support 220 is provided adjacent to one of the walls of external
bell 219 for the cantilevering of the third pair of displacement sensors 221E, 221F.
[0051] Like in the previously disclosed pump, also pump 201 has multiple threaded bores
223 with axes lying in planes orthogonal to the rotation axis of rotor 223 to allow
locating and displacing additional masses.
[0052] Also in this case, threaded dowels located in radial bores instead of tangentially
oriented bores can be used.
[0053] When, at the end of the balancing phase, bell 219 and support 220, if present, will
be removed, displacement sensors 221C, 221D and 221E, 221F will be removed as well,
whereas sensors 221A, 221B mounted in basement 203 of pump 201 will remain inside
said pump even during operation thereof, and they could be advantageously used to
carry out field measurements.
[0054] It is clear that the turbomolecular pump according to the invention attains the intended
aims, since using displacement sensors directly mounted inside the pump, close to
the rotor or the rotating shaft thereof, allows using simpler and more precise mathematical
models to determine the rotor unbalance. Consequently, the balancing phase might be
carried out in quicker manner and with better results.
[0055] It is also clear that the above description has been given only by way of non-limiting
example and that several modifications are possible without departing from the scope
of the invention.
1. A rotary vacuum pump (101; 201) comprising a stationary portion (103; 203) and a portion
rotating relative to said stationary portion, said rotating portion comprising a rotating
shaft (105; 205) equipped with a rotor assembly (113; 213) co-operating with a stator
assembly for gas pumping, said rotating shaft being driven by an electric motor (111;
211) and being supported by at least one rolling mechanical bearing (107; 207) relative
to said stationary portion, characterised in that at least one displacement sensor (121A-121D; 221A-221B), capable of generating an
electrical signal varying with the distance between said stationary portion and said
rotating portion during the rotation of said shaft and said rotor assembly, is provided
between said stationary portion and said rotating portion.
2. A pump as claimed in claim 1, wherein said pump (101) comprises a basement (103) on
which the rotating shaft (105) supported by a pair of rolling bearings (107) is mounted,
the rotor (109) of the pump electric motor (111) used to rotate the shaft (105) and
the pump rotor (113) being mounted on said rotating shaft (105).
3. The pump as claimed in claim 2, wherein said pump rotor (113) has a bell-shaped cavity
(117) housing the pump rotating shaft (105) and the electric motor (111).
4. The pump as claimed in claim 3, wherein said pump comprises at least one pair of displacement
sensors (121A - 121D) mounted in the basement (103) of the pump (101), close to the
rotor (113) and/or to the rotating shaft (105) thereof, each sensor facing said shaft
(105) or said rotor (113) so that the variation, if any, in the distance between the
rotor and the sensor during rotation of the rotor can be measured.
5. The pump as claimed in claim 4, wherein said pump comprises a first pair of sensors
(121A, 121B) facing the rotating shaft (105) and turned towards it, and a second pair
of sensors (121C, 121D) facing the inner wall (113a) of the rotor (113) and turned
towards such wall.
6. The pump as claimed in claim 1, wherein said rotor (113) comprises at least one threaded
cylindrical bore (123) arranged with its axis lying in a plane orthogonal to the rotation
axis of the rotor (113) and tangentially relative to said rotor, in which bore additional
masses consisting of threaded dowels can be located and displaced in order to reduce
the unbalance of said rotating portion.
7. The pump as claimed in claim 1, wherein said rotor (113) comprises at least one threaded
cylindrical bore (123) arranged with its axis lying in a plane orthogonal to the rotation
axis of the rotor (113) and radially relative to said rotor, in which bore additional
masses consisting of threaded dowels can be located and displaced in order to reduce
the unbalance of said rotating portion
8. The pump as claimed in claim 1, wherein the rotating shaft (205) is supported by a
pair of rolling bearings (207) and is driven by an electric motor (211), the bearings
and the motor being located in a pump region that is axially separated from the pumping
region where the rotor (213) is housed.
9. The pump as claimed in claim 8, wherein a pair of displacement sensors (221A, 221B)
is provided in the basement (203) of the pump (201), opposite the rotating shaft (205)
thereof and at opposite sides of the rotor (209) of the electric motor (211).
10. The pump as claimed in claim 1, wherein said displacement sensors are eddy current
displacement sensors.
11. The pump as claimed in claim 10, wherein said sensors comprise a coil (53) in which
a high frequency AC current generating a variable magnetic field flows.
12. The pump as claimed in claim 11, wherein said sensors comprise an impedance-to-voltage
converter (61), such that a variation in the voltage level of an output signal of
said converter (61) corresponds to an impedance variation in the coil of said sensor.
13. The pump as claimed in claim 12, wherein said sensors (121A - 121D; 221A, 221B) provide,
during pump operation, a signal representative of the displacement of the rotating
portion relative to the stationary portions.
14. The pump as claimed in claim 1, wherein said pump is a turbomolecular pump.
15. A structure for balancing a rotary vacuum pump of the kind comprising a stationary
portion (103; 203) and a portion rotating relative to said stationary portion, said
rotating portion comprising a rotating shaft (105; 205) equipped with a rotor assembly
(113; 213) co-operating with a stator assembly for gas pumping, said rotating shaft
being driven by an electric motor (111; 211) and being supported by at least one rolling
mechanical bearing (107; 207) relative to said stationary portion, said structure
comprising a vacuum-tight bell (119; 219) in which the pump can be housed during balancing,
characterised in that at least one displacement sensor (121A-121D; 221A-221B), capable of generating a
electrical signal varying with the distance between said bell and said rotating portion
during the rotation of said shaft and said rotor assembly, is provided between said
bell and said rotating portion.
16. The structure as claimed in claim 15, wherein said pump (101; 201) comprises a basement
(103; 203) on which the rotating shaft (105; 205) supported by a pair of rolling bearings
(107; 207) is mounted, the rotor (109; 209) of the pump electric motor (111; 211)
used to rotate the shaft (105; 205) and the pump rotor (113; 213) being mounted on
said rotating shaft (105; 205).
17. The structure as claimed in claim 16, wherein said pump rotor (113; 213) has a bell-shaped
cavity (117) where the pump rotating shaft (105; 205) and the electric motor (111;
211) are housed.
18. The structure as claimed in claim 17, wherein said pump comprises a plurality of displacement
sensors (121A - 121D; 221A, 221B) mounted in the pump basement (103; 203), close to
the rotor (113; 213) and/or to the rotating shaft (105; 205) thereof, each sensor
facing said shaft (105; 205) or said rotor (113; 213) so that a variation, if any,
in the distance between the rotor and the sensor during rotation of the rotor can
be detected.
19. The structure as claimed in claim 18, wherein said pump comprises a first sensor pair
(121A, 121B; 221A, 221B) facing the rotating shaft (105; 205) and turned towards it,
and a second sensor pair (121C, 121D; 221C, 221D) facing the inner wall (113a; 213a)
of the rotor (113; 213) and turned towards such wall.
20. The structure as claimed in claim 19, wherein, in order the second sensor pair (221C,
221D) can be properly located, the bell (219) is equipped with a central cylindrical
projection (219a) penetrating into the pump rotor (213).
21. The structure as claimed in claim 19, wherein a third pair of displacement sensors
(121E, 121F; 221E, 221F) is provided, which sensors are arranged close to the outer
wall (113b; 213b) of the pump rotor (113; 213), between a pair of said rotor discs
(115; 215), and are turned towards said wall.
22. The structure as claimed in claim 21, wherein said sensors (121E, 121F; 221E, 221F)
of said third pair of displacement sensors are cantilevered on a vertical support
(120; 220) adjacent to one of the walls of the outer bell (119; 219).
23. The structure as claimed in claim 22, wherein said sensors are eddy current displacement
sensors.
24. A method of balancing a rotary vacuum pump of the kind comprising a stationary portion
(103; 203) and a rotating portion comprising a rotating shaft (105; 205) equipped
with a rotor assembly (113; 213) co-operating with a stator assembly for gas pumping,
said rotating shaft being driven by an electric motor (111; 211) and being supported
by at least one rolling mechanical bearing (107; 207) relative to said stationary
portion, the method comprising the steps of:
a) providing a vacuum-tight bell (119; 219) in which the pump can be housed during
balancing;
b) coupling said pump, without said stator assembly, to said bell;
c) making vacuum in said bell;
d) driving said rotating pump portion into rotation;
e) measuring the displacement, at the rotation frequency, of said rotating portion
relative to said stationary portion;
f) stopping said rotating portion;
g) balancing said rotating portion by means of additional masses;
h) repeating, if necessary, steps b) to g);
and being
characterised in that said displacement measurement is obtained by means of at least one displacement sensor
(121A - 121F; 221A - 221F), capable of generating an electrical signal varying with
the distance between said stationary portion or said bell and said rotating portion
during the rotation of said shaft (105; 205) and said rotor assembly (113; 213).
Amended claims in accordance with Rule 86(2) EPC.
1. A rotary vacuum pump (101; 201) comprising a stationary portion (103; 203) and a
portion rotating relative to said stationary portion, said rotating portion comprising
a rotating shaft (105; 205) equipped with a rotor assembly (113; 213) co-operating
with a stator assembly for gas pumping, said rotating shaft being driven by an electric
motor (111; 211) and being supported by at least one rolling mechanical bearing (107;
207) relative to said stationary portion, characterised in that at least two displacement sensors (121A-121D; 221A-221B), capable of generating an
electrical signal varying with the distance between said stationary portion and said
rotating portion during the rotation of said shaft and said rotor assembly, are provided
between said stationary portion and said rotating portion.
2. A pump as claimed in claim 1, wherein said pump (101) comprises a basement (103)
on which the rotating shaft (105) supported by a pair of rolling bearings (107) is
mounted, the rotor (109) of the pump electric motor (111) used to rotate the shaft
(105) and the pump rotor (113) being mounted on said rotating shaft (105).
3. The pump as claimed in claim 2, wherein said pump rotor (113) has a bell-shaped cavity
(117) housing the pump rotating shaft (105) and the electric motor (111).
4. The pump as claimed in claim 3, wherein said pump comprises at least one pair of
displacement sensors (121A - 121D) mounted in the basement (103) of the pump (101),
close to the rotor (113) and/or to the rotating shaft (105) thereof, each sensor facing
said shaft (105) or said rotor (113) so that the variation, if any, in the distance
between the rotor and the sensor during rotation of the rotor can be measured.
5. The pump as claimed in claim 4, wherein said pump comprises a first pair of sensors
(121A, 121B) facing the rotating shaft (105) and turned towards it, and a second pair
of sensors (121C, 121D) facing the inner wall (113a) of the rotor (113) and turned
towards such wall.
6. The pump as claimed in claim 1, wherein said rotor (113) comprises at least one threaded
cylindrical bore (123) arranged with its axis lying in a plane orthogonal to the rotation
axis of the rotor (113) and tangentially relative to said rotor, in which bore additional
masses consisting of threaded dowels can be located and displaced in order to reduce
the unbalance of said rotating portion.
7. The pump as claimed in claim 1, wherein said rotor (113) comprises at least one threaded
cylindrical bore (123) arranged with its axis lying in a plane orthogonal to the rotation
axis of the rotor (113) and radially relative to said rotor, in which bore additional
masses consisting of threaded dowels can be located and displaced in order to reduce
the unbalance of said rotating portion
8. The pump as claimed in claim 1, wherein the rotating shaft (205) is supported by
a pair of rolling bearings (207) and is driven by an electric motor (211), the bearings
and the motor being located in a pump region that is axially separated from the pumping
region where the rotor (213) is housed.
9. The pump as claimed in claim 8, wherein a pair of displacement sensors (221A, 221B)
is provided in the basement (203) of the pump (201), opposite the rotating shaft (205)
thereof and at opposite sides of the rotor (209) of the electric motor (211).
10. The pump as claimed in claim 1, wherein said displacement sensors are eddy current
displacement sensors.
11. The pump as claimed in claim 10, wherein said sensors comprise a coil (53) in which
a high frequency AC current generating a variable magnetic field flows.
12. The pump as claimed in claim 11, wherein said sensors comprise an impedance-to-voltage
converter (61), such that a variation in the voltage level of an output signal of
said converter (61) corresponds to an impedance variation in the coil of said sensor.
13. The pump as claimed in claim 12, wherein said sensors (121A - 121D; 221A, 221B) provide,
during pump operation, a signal representative of the displacement of the rotating
portion relative to the stationary portions.
14. The pump as claimed in claim 1, wherein said pump is a turbomolecular pump.
15. A structure for balancing a rotary vacuum pump of the kind comprising a stationary
portion (103; 203) and a portion rotating relative to said stationary portion, said
rotating portion comprising a rotating shaft (105; 205) equipped with a rotor assembly
(113; 213) for gas pumping when co-operating with a stator assembly, said rotating
shaft being driven by an electric motor (111; 211) and being supported by at least
one rolling mechanical bearing (107; 207) relative to said stationary portion, said
structure comprising a vacuum-tight bell (119; 219) in which the pump can be housed
during balancing, characterised in that at least two displacement sensors (121A-121D; 221A-221B), capable of generating a
electrical signal varying with the distance between said bell and said rotating portion
during the rotation of said shaft and said rotor assembly, are provided between said
bell and said rotating portion.
16. The structure as claimed in claim 15, wherein said pump (101; 201) comprises a basement
(103; 203) on which the rotating shaft (105; 205) supported by a pair of rolling bearings
(107; 207) is mounted, the rotor (109; 209) of the pump electric motor (111; 211)
used to rotate the shaft (105; 205) and the pump rotor (113; 213) being mounted on
said rotating shaft (105; 205).
17. The structure as claimed in claim 16, wherein said pump rotor (113; 213) has a bell-shaped
cavity (117) where the pump rotating shaft (105; 205) and the electric motor (111;
211) are housed.
18. The structure as claimed in claim 17, wherein said pump comprises a plurality of
displacement sensors (121A - 121D; 221A, 221B) mounted in the pump basement (103;
203), close to the rotor (113; 213) and/or to the rotating shaft (105; 205) thereof,
each sensor facing said shaft (105; 205) or said rotor (113; 213) so that a variation,
if any, in the distance between the rotor and the sensor during rotation of the rotor
can be detected.
19. The structure as claimed in claim 18, wherein said pump comprises a first sensor
pair (121A, 121B; 221A, 221B) facing the rotating shaft (105; 205) and turned towards
it, and a second sensor pair (121C, 121D; 221C, 221D) facing the inner wall (113a;
213a) of the rotor (113; 213) and turned towards such wall.
20. The structure as claimed in claim 19, wherein, in order the second sensor pair (221C,
221D) can be properly located, the bell (219) is equipped with a central cylindrical
projection (219a) penetrating into the pump rotor (213).
21. The structure as claimed in claim 19, wherein a third pair of displacement sensors
(121E, 121F; 221E, 221F) is provided, which sensors are arranged close to the outer
wall (113b; 213b) of the pump rotor (113; 213), between a pair of said rotor discs
(115; 215), and are turned towards said wall.
22. The structure as claimed in claim 21, wherein said sensors (121E, 121F; 221E, 221F)
of said third pair of displacement sensors are cantilevered on a vertical support
(120; 220) adjacent to one of the walls of the outer bell (119; 219).
23. The structure as claimed in claim 22, wherein said sensors are eddy current displacement
sensors.
24. A method of balancing a rotary vacuum pump of the kind comprising a stationary portion
(103; 203) and a rotating portion comprising a rotating shaft (105; 205) equipped
with a rotor assembly (113; 213) for gas pumping when co-operating with a stator assembly,
said rotating shaft being driven by an electric motor (111; 211) and being supported
by at least one rolling mechanical bearing (107; 207) relative to said stationary
portion, the method comprising the steps of:
a) providing a vacuum-tight bell (119; 219) in which the pump can be housed during
balancing;
b) coupling said pump, without said stator assembly, to said bell;
c) making vacuum in said bell;
d) driving said rotating pump portion into rotation;
e) measuring the displacement, at the rotation frequency, of said rotating portion
relative to said stationary portion;
f) stopping said rotating portion;
g) balancing said rotating portion by means of additional masses;
h) repeating, if necessary, steps b) to g);
and being
characterised in that said displacement measurement is obtained by means of at least two displacement sensors
(121A - 121F; 221A - 221F), capable of generating an electrical signal varying with
the distance between said stationary portion or bell and said rotating portion during
the rotation of said shaft (105; 205) and said rotor assembly (113; 213).