(57) A heat treatment method for performing a uniform heat treatment on the whole substrate
(22), by carrying out temperature control in such a manner that the temperatures of
each of the respective heating means (14) provided in the heating chamber (25,26,27)
are set at different values in the transporting direction of the object (22) to be
thermally treated, and maintaining temperatures in the chamber (25,26,27) larger in
deviation in temperature distribution than a target temperature distribution within
the substrate (22) by using a heat treatment furnace. The furnace comprises a plurality
of sectioned heating chambers (25,26,27); transporting means (20) for transporting
the substrate (22) to the next heating chamber (25,26,27); and separated heating means
(14) provided in each heating chamber (25,26,27) in the transporting direction; each
heating means (14) being capable of separately controlling a temperature by an independent
control system; and a radiant heating means for selectively heating the portion lower
in atmosphere temperature.
|
|
