(84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL
PT RO SE SI SK TR |
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Designated Extension States: |
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AL BA MK RS |
(30) |
Priority: |
19.10.2007 US 999566 P 28.12.2007 US 966850
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(71) |
Applicant: QUALCOMM MEMS Technologies, Inc. |
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San Diego, CA 92121 (US) |
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(72) |
Inventors: |
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- Kothari, Manish
Cupertino, CA 95014 (US)
- Xu, Gang
Cupertino, CA 95014 (US)
- Khazeni, Kasra
San Jose, CA 95120 (US)
- Bita, Ion
San Jose, CA 95134 (US)
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(74) |
Representative: Witte, Weller & Partner |
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Postfach 10 54 62 70047 Stuttgart 70047 Stuttgart (DE) |
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