[0001] The present invention relates to a device for moving liquids and/or gases as well
as the use of this device as valve and/or pump.
[0002] Devices for moving liquids and/or gases in the sense of the present invention are
those capable of setting liquids and/or gases into motion. Movement means both pump
movements and suction movements, but also any other kind of movement of liquids and/or
gases. In the sense of the present invention, there are also included, for example,
any kinds of currents of liquids and/or gases, including circular and vortex-like
ones. Devices in the sense of the present invention for moving liquids and/or gases
are particularly pumps and/or valves, more preferably particularly devices in a construction
size allowing their use in microsystem technology, medical technology, biomedicine,
pharmacy or other areas. In the sense of the present invention, this includes particularly
micropumps and/or microvalves as devices for moving liquids and/or gases of any kind,
including tissue liquids.
[0003] Possible fields of application of devices in the sense of the present invention are
particularly microsystem technology and medical technology. There are considerations
to dispose micropumps and/or microvalves also in the human body. This requires the
corresponding systems to have only a low operational voltage and also to be compatible
with the surrounding human tissue.
[0004] From
DE 103 13 158 A1, there is known a micropump with a membrane-like actuator having pump chambers comprising
internal contours corresponding at least essentially to the deflection line of a membrane-like
actuator. By deforming the membrane-like actuator, the volume of the pump chambers
may thus at least essentially be reduced to zero, wherein the allowable counterpressure
of a fluid to be transported may thus be advantageously and comparatively high without
impacting the function of the pump. Thus, a piezoelectric bending converter is suggested
as actuator. What is disadvantageous in the micropump disclosed in
DE 103 13 158 A1 is that the provided piezoelectric bending converter requires relatively high operational
voltages, so that its use particularly in the human body is not possible.
[0005] DE 101 64 474 A1 also discloses a micropump, wherein a membrane is moved by connection members. The
connection members are designed stamp-shaped. Here, the membrane also consists of
a piezoelectrically operated bending converter.
[0006] From
DE 197 24 240 A1, there is known a transport pump, which has at least two chambers with variable volume,
adjusted via volume adjusting means, arranged essentially one after the other in the
transport direction. The volume adjusting means are particularly formed by piezoelements
or piezoelement stacks and/or electromagnetic lifting elements or overpressure and/or
underpressure generating means. A polymer film may be provided as overpressure and/or
underpressure generation means.
[0007] From
US 2004/0108479 A1, there is finally known a microvalve in which a channel may be closed by an actuator
designed in a film-like way. The actuator comes directly into contact with the liquid
flowing through the microvalve. The actuator consists of a porous membrane which may
be provided, on one side, with a layer of conductive polymer and is coated with a
metal layer on the other side of the film. In order to allow the closure of the valve,
the medium flowing through the microvalve has to comprise conducting salt ions, which
is why the field of application of the microvalve disclosed in
US 2004/0108479 A1 is disadvantageously very limited.
[0008] It is the object of the present invention to provide a device not having the disadvantages
known from prior art and particularly solving the task to provide a species-compatible
device operating with low operational voltages without the need to add particularly
conducting salt ions to the media to be moved.
[0009] According to the invention, this object is achieved by a device for moving liquids
and/or gases including a housing with at least one chamber having a first chamber
wall including at least partially at least one actuator including at least one first
moveable membrane and at least one layer of at least one conductive polymer arranged
on the side facing the interior of the chamber; and having a second chamber wall including
at least partially at least one movement element including at least one second moveable
membrane and at least one metallic layer arranged on the side facing the interior
of the chamber, wherein the chamber is at least partially filled with a conducting
electrolyte.
[0010] The large advantage of the inventive device is that movement of the actuator is initiated
by providing the same with voltage without the need to add conducting salts to the
medium to be moved. This is because they are received in the chamber included in the
inventive device and are thus separate from the medium to be moved. Liquids and/or
gases in the sense of the present invention also include liquid melts and other transportable
media, irrespective of their state of aggregation. The inventive device further has
the large advantage that, due to the provision of electrically conductive polymers,
it may be operated with a very low operational voltage, preferably with an operational
voltage in a range from about 2 volts to about -2 volts, more preferably in a range
from about 1.5 volts to about -1.5 volts. In this way, the inventive device is also
suitable for the use as, for example, micropump or microvalve in human tissue. In
addition, the inventive device may be implemented extremely small-sized, because the
corresponding membranes and layers guarantee the function of the inventive device
with very low thicknesses. The thicknesses are usually in the nanometer range.
[0011] The housing of the inventive device may be made of any suitable material, particularly
of glass materials, particularly borosilicate glass and/or other quartz glasses, but
also of plastics, such as polymethyl methacrylate, but also of silicon and/or SU8
photoresist resins, particularly in the implementation as microvalve, micropump or
other species-compatible devices usable in microsystem or medical technology. SU8
photoresist resins are modified epoxy resins produced by cationic polymerization,
as they are disclosed, for example, in
US 4,882,245 and are available from the company Microchem Corp., Newton, Massachusetts, USA. The
chamber walls preferably form at least part of the housing wall at the same time,
so that the actuator and the movement element have sufficient room for movement. However,
there may also accordingly be provided recesses in the housing in the area of the
chamber, which allow the movement of the actuator and the movement element. The recesses
may be essentially adapted to the bending contour of the actuator and the movement
element, wherein dead volumes can readily be tolerated. The amount of movement, particularly
the curvature, of the actuator and the movement element may be controlled by the strength
and the direction of the applied operational voltage. Specifically, the operational
voltage may also be given in a pulsed form and/or in the form of triangular or rectangular
voltages, wherein feed rates of up to about 100 V/s may be provided, so that a uniform,
reversible movement of the actuator and the movement element is achieved. The movement
element serves to equalize pressure in the chamber by deflection.
[0012] It is not required that the whole first and second chamber walls have to be formed
of the actuator and the movement element, it is also possible that only parts thereof
may be formed of the one or more actuators or movement elements arranged separately,
wherein these may have any geometric dimensions, particularly also in the form of
a stripe, but also circular etc. In a preferred embodiment of the present invention,
the actuator and the movement element are arranged opposite to each other. This allows
an extremely effective pressure equalization in.the case of movement of the actuator
and the corresponding parallel movement of the movement element, so that the volume
of the chamber contents essentially does not change. The membranes of the actuator
and the movement element may be such that they change their shape by stretching, when
there is movement, wherein any change of shape should be reversible, though.
[0013] Preferably, the conductive polymer is selected from a group including polypyrroles,
polythiophenes, polyanilines, polyphenylenes, polyparaphenylenes and/or polyvinylenes
and derivatives thereof. Polypyrrole and poly-(3,4-ethylene-dioxy-thiophene) are particularly
preferred. The conductive polymers may also be present in the form of copolymers,
block copolymers or random block copolymers. In particular, the layer of conductive
polymer may also consists of mixtures of several conductive polymers and may be structured
not only with a single layer, but also with several layers, for example by successive
electrochemical depositions.
[0014] Preferably, the layer of conductive polymer has a thickness in the range of about
10 nm to about 150 µm. This layer may simply be electrochemically deposited directly
onto the membrane by polymerization of monomers provided in the chamber. Preferably,
it may be provided that, between the layer of conductive polymer and the membrane,
there, is arranged at least one further metallic layer which may, for example, be
formed of platinum, gold, silver, chromium, titanium and/or stainless steel or alloys
thereof. By the provision of this at least one further layer, the adhesion of the
layer of conductive polymers on the membrane may be improved.
[0015] In a preferred embodiment of the inventive device, the at least one metallic layer
of the movement element is formed of metal, for example selected from a group including
platinum, gold, silver, chromium, titanium and/or stainless steel or alloys thereof.
This metallic layer, as well as the further metallic intermediate layer of the actuator,
may be obtained by sputtering and/or vapor deposition of the corresponding metals
on the first and/or the second membrane. Preferably, the metallic layer of the movement
element has a thickness in a range from about 1 nm to about 250 nm, more preferably
in a range from about 5 nm to about 100 nm. The metallic intermediate layer of the
actuator may have a corresponding thickness. If several layers are provided on the
actuator and/or movement element, these may also be formed of different metals and/or
alloys.
[0016] The first and/or second movable membrane is preferably formed of a single-layer or
multi-layer film, made of polymers selected from a group including polyimides, polyamides,
polyurethanes, polytetrafluoroethylenes, polydimethylsiloxanes, polymethyl methacrylates,
polyester, polyvinyl chlorides, polyethylenes, polyethylene terephthalates, parylenes
and/or silicone rubber. Parylenes in the sense of the present invention are thermoplastic
polymers with phenylene groups linked via ethylene groups in 1,4-position, for example
poly-(p-xylylene). The thickness of the first and/or second membrane is preferably
in a range from about 0.1 µm to about 100 µm, more preferably in a range from about
0.1 µm to about 20 µm. Preferably, the first and/or second membrane has a modulus
of elasticity in a range from about 4 MPa to about 10,000 MPa, measured in accordance
with EN ISO 527. Due to the selection of materials for the first and/or second membrane
with relatively low values for the modulus of elasticity, an extremely long life of
the inventive device is guaranteed. The film may be made of copolymers, block copolymers
and random block copolymers and particularly also of mixtures of the mentioned polymers
and may, in addition, have added substances commonly contained in films, such as softening
agents, fillers etc. The first and/or second membrane is preferably impermeable. This
advantageously prevents conducting electrolyte from the chamber of the inventive device
to exit and to result in a contamination of the moved medium.
[0017] Preferably, the conducting electrolyte includes a conducting electrolyte solution
selected from a group including water, polar aprotic solvents and/or ionic liquids.
Particularly preferred polar aprotic solvents are propylene carbonate, dichloromethane
and/or acetonitrile. The polar aprotic solvents with a maximum boiling point are particularly
preferred. For application in the human body, water is particularly provided as electrolyte
solvent. Preferably, ionic liquids are used, because they have the large advantage
to have virtually no vapor pressure. This may also allow to omit the addition of solvents,
depending on the application. Furthermore, they advantageously do not perform any
nucleophile attack at the polymer backbone both of the layer of the conductive polymer
and of the material of the first and/or second membrane, as with polar aprotic solvents,
as it may, for example, occur by the hydroxide ion of the water. In addition, ionic
liquids generally have a very wide electrochemical window, so that the danger of electrochemical
decomposition is significantly minimized. Possible ionic liquids in the sense of the
present invention are butyl-3-methyl-imidazolium tetrafluoroborate, but also further
related imidazolium derivatives or corresponding pyridinium, pyrrolidinium derivatives,
phosphonium, ammonium and sulphonium derivatives. The conducting electrolyte is formed
of the electrolyte solvent and the conducting salt, but it may also contain further
useful additives, depending on the application, if necessary. Particularly, the conducting
electrolyte includes a conducting salt selected from a group including fluorides,
chlorides, bromides, iodides, perfluorides, perchlorates, perbromates, periodides,
sulphates, sulphonates, borates, tetrafluoroborates, phosphates, hexafluorophosphates,
hydroxides, cyanides, nitrates, chromates, tosylates, salts of trifluoromethane sulfonic
acid, polyalkyl sulphate, polyalkyl sulphonates, polydodecyl benzyl sulphonates and/or
polystyrene sulphonates. Tetrabutylammonium hexafluorophosphate and lithium perchlorate
are especially preferred. The conducting salts are present in the electrolyte solution
in a quantity sufficient to guarantee the function of the inventive device. Preferably,
the system conducting salt/electrolyte solvent is selected such that the conducting
salts are completely solved in the electrolyte solvent.
[0018] In a preferred embodiment, the first and/or second membrane is fixed to the housing
of the inventive device. Particularly when the first and/or second chamber wall is
formed completely by the actuator and/or the movement element, the membrane may correspondingly
be mounted in subareas of the actuator and/or movement element on the housing of the
inventive device. It may also be provided that the metallic layer and/or the layer
of conductive polymer is applied over the whole side of the membrane facing the interior
of the chamber, either on the full area or only on parts of the area or in traces,
similarly to a power trace on a board, particularly to generate a safe connection
to a voltage source arranged outside the chamber housing.
[0019] Furthermore, it may advantageously be provided that a reference electrode is inserted
in the chamber, for example a silver/silver chloride electrode (Ag/AgCl), so that
the inventive device may precisely be provided with a particular operational voltage.
Advantageously, the chamber of the inventive device comprises at least one opening.
[0020] Through this opening, the conducting electrolyte may, for example, be exchanged,
or there may be inserted a reference electrode, and subsequently the opening may be
closed again.
[0021] In a preferred embodiment, the actuator is connected as working electrode, whereas
the movement element is connected as counter-electrode. When an operational voltage
is provided, the actuator and the movement element perform a parallel movement. Whether
the actuator moves in the direction towards the chamber interior or away therefrom
and the movement element performs a corresponding movement, depends on the provided
voltage and the chemical structure of the actuator and potentially also of the movement
element.
[0022] In a particularly preferred embodiment, the inventive device further includes a channel
arranged directly adjacent to the actuator and conducting liquid and/or gas, generally
conducting a medium. The actuator is in direct contact with the medium flowing through
the channel, so that the channel may preferably be closed by the actuator. The channel
may also be closed multiple times by arranging several chamber housings with several
actuators one after the other, and/or a directional movement of a liquid may be generated
by corresponding control and regulation of the individual actuators.
[0023] Furthermore, the present invention relates to the use of the inventive device as
valve and/or pump, particularly as microvalve and/or micropump. Possible fields of
application are medical technology and microsystem technology, particularly with respect
to biological, biomedical and/or pharmaceutical fields of application. Possible fields
of application are also biological systems, body liquids and lab-on-chip devices,
drug delivery systems, dispensers, sample dispensers, inkjet printers, micro-dosing
systems of all kinds, etc.
[0024] These and further advantages of the present invention will be explained in more detail
with respect to the following figures, in which:
- Fig. 1
- shows an inventive device in side view;
- Figs. 2a
- to 2c show disk-shaped members for producing the housing of the device of Fig. 1;
- Fig. 3
- shows a top view of the device of Fig. 1;
- Fig. 4
- shows a sectional view in a section plane 13 of the device of Fig. 1 in idle position;
- Fig. 5
- shows a sectional view in a section plane 13 of the device of Fig. 1 in deflected
position;
- Fig. 6
- shows an alternative embodiment of the device in an idle state and in a deflected
state; and
- Fig. 7
- shows a further embodiment of the inventive device as micropump.
[0025] First it is to be noted that the present invention is not limited to the feature
combinations indicated in the individual figures, but that the features given in the
description including the description of the figures may be combined with each other
for further embodiments.
[0026] Fig. 1 shows a side view of an inventive device designated with the reference numeral
10 in its entirety. It comprises a housing 12 with a chamber 14, wherein, in the view
of Fig. 1, the chamber 14 is completely covered by an actuator 24. In the interior
of the housing 12, a bore 20 is provided for an opening 22. The actuator 24 includes
a membrane with a metallic intermediate layer partially designed as power trace 45
to allow driving the actuator 24.
[0027] Figs. 2a to 2c explain the structure of the device of Fig. 1 in more detail. It consists
of two disk-shaped members 16.1 and 16.3 forming the two exterior sides of the housing.
The central part of the housing is formed of a disk-shaped member 16.2. The members
16.1, 16.2 and 16.3 comprise a bore 18.1, 18.2 and 18.3, wherein the member 16.2 additionally
comprises a slot 20 for an opening 22. The disk-shaped members 16.1, 16.2 and 16.3
forming the housing 12 may be made of any suitable material, particularly of borosilicate
glass and/or quartz glass, but also of an SU8 photoresist resin or silicon. By providing
the bores 18.1 and 18.3 in the external disk-shaped members 16.1 and 16.3 of the housing
12 of the inventive device 10, the chamber walls of the chamber 14 are in direct contact
with the surroundings of the housing 12, as it is particularly illustrated by Fig.
3. The disk-shaped structure of the housing 12 of the disk-shaped members 16.1, 16.2
and 16.3 is readily apparent from Fig. 3, wherein the chamber 14 is indicated by a
dashed line in the top view shown in Fig. 3. The chamber 14 comprises chamber walls
15.1 and 15.2, which are thus simultaneously part of the exterior sides of the housing
12.
[0028] Fig. 4 shows the inventive device 10 in section corresponding to a sectional plane
13 of Fig. 1, wherein the disk-shaped structure of the housing 12 was not taken into
account for simplicity. However, it is to be understood that the housing 12 may not
only be structured in a disk-shaped way in the sense of Figs. 1 to 3, but may be formed
in any way corresponding to the task of the present invention, for example also of
massive, particularly integral members. The device 10 is shown in an operational state
A, which represents the idle position thereof. Device 10 comprises an actuator 24
and a movement element 30. The actuator 24 consists of a membrane 26 mounted to the
housing 12. In the area of the chamber interior 36, this membrane 26 is first provided
with a metallic intermediate layer 46, on which a layer of conductive polymer 28 is
disposed. The movement element 30 comprises a membrane 32 mounted to the housing 12,
which is provided with a metallic layer 34 at least in the area of the chamber interior
36. The chamber interior 36 contains a conducting salt and/or conducting electrolyte
38, including an electrolyte solvent and/or at least one ionic liquid, possibly with
the addition of an electrolyte solvent and/or conducting salt. The chamber interior
36 is thus preferably completely filled with the conducting electrolyte 38. The chamber
walls 15.1 and 15.2 are thus formed by the membranes 26 and 32, which are at the same
time parts of the housing walls of the housing 12. In the operational state A of Fig.
4, no voltage is applied to the actuator 24. The membranes 26 and/or 32 with metallic
layers 34 and 46, respectively, or only the metallic layers 34 and/or 46 may form
power traces (not shown) extending on the housing wall to allow driving.
[0029] Fig. 5 shows the device of Fig. 4 in an operational state B, in which the actuator
24 is provided with an operational voltage. When the actuator 24 is provided with
a voltage, the actuator 24 moves into the chamber interior 36 in the direction of
arrow 42.1, whereas, as a reaction, the movement element 30 moves away from the chamber
interior 36 in the direction of arrow 42.2. What is not shown in Figs. 4 and 5 are
the possible connections of current-carrying lines to the actuator 24, but they may
be effected in any known manner. If an operational voltage is applied to the device
of Figs. 4 and 5, for example in the form of a triangular voltage or rectangular voltage,
a pulsed movement of the actuator 24 and correspondingly of the movement element 30
may occur, wherein pressure equalization is not necessary due to the parallel movements
of the actuator 24 and the movement element 30. The first and the second membrane
26 and 32 of the actuator 24 and the movement element 30 are preferably formed of
identical materials and preferably also have the same physical-chemical parameters,
particularly also more or less identical modulus of elasticity.
[0030] Fig. 6 now shows an alternative embodiment of the inventive device 10, wherein, unlike
the embodiment shown in Figs. 4 and 5, an idle state A is shown with an operational
state C for purposes of explanation in a single illustration. A further difference
is that, in the chamber interior 36, a reference electrode 40 is arranged, for example
in the form of a silver/silver chloride electrode, to allow a maximally precise adjustment
of the operational voltage. Furthermore, unlike the embodiment of device 10 shown
in Figs. 4 and 5, an implementation is indicated here that allows movement of the
actuator 24 with a membrane 26 and the movement element 30 in an opposite direction
with respect to the one of Fig. 5, namely one in the direction of arrows 44.1 and
44.2. Finally, the metallic layer 34 of the movement element 30 is disposed on the
membrane 32 not only in the area of the chamber, but the membrane 32 is rather provided
continuously with the metallic layer 34, wherein it may, however, also extend only
on part of the area, particularly in the area of the housing 12. This allows a simplification
of providing the second actuator 30 with an operational voltage. Correspondingly,
the membrane 26 of the first actuator 24 comprises a metallic intermediate layer 46,
which, like the metallic layer 34 of the movement element 30, is disposed on the membrane
26 not only in the area of the chamber, but is present on the whole side of the membrane
26 facing the chamber and/or the housing 12. This also allows a simple operational
voltage supply to the actuator 24.
[0031] Fig. 7 now shows the implementation of the invention in the form of a micropump,
wherein here it comprises, for example, a total of three chambers 50, 52 and 54. The
micropump is designated with the reference numeral 48 in its entirety. The first chamber
50 comprises an actuator 56 with a layer of a conductive polymer 68.1 and a metallic
intermediate layer 72.1 and a movement element 62 consisting of a metallic layer 70.1
disposed in the area of the chamber interior. The second chamber comprises a first
actuator 58 and correspondingly a movement element 64, wherein the actuator 58 comprises
a layer of a conductive polymer 68.2 and a metallic intermediate layer 72.1, whereas
the movement element 64 comprises a metallic layer 70.2. The third chamber 54 comprises
an actuator 60 and correspondingly a movement element 66, wherein the actuator 60
comprises a layer of a conductive polymer 68.3 and a metallic intermediate layer 72.3,
and the movement element 66 comprises a metallic layer 70.3. All actuators 56, 58
and 60 and all movement elements 62, 64 and 66 comprise a common membrane 69 and 67,
respectively, so that they may also be referred to as actuator membrane 69 and movement
element membrane 67. The individual chambers 50, 52 and 54 are separated from each
other and/or formed by housing parts 88.1 to 88.4.
[0032] Furthermore, the micropump 48 comprises pump housing parts 86.1, 86.2 and 86.3, which
are arranged in connection with the housing parts 88.1 to 88.4 such that a channel
78 is formed. The channel 78 comprises recesses 82.1 to 82.4. Between the pump housing
parts 68.1 to 68.3, an inlet 74 and an outlet 76 are formed. In the state of the micropump
48 shown in Fig. 7, the channel 78 is closed, which is made possible by a special
design of the channel 78 by providing projections 80.1 and 80.2 in the channel wall
at the inlet 74 and projections 80.3 and 80.4 at the outlet 78, which are sealingly
fitted against the first actuators 56 and 60.
[0033] If now an operational voltage of the micropump 48 is applied, the actuator 56 of
chamber 50 moves in the direction of arrow 84.1, the actuator 58 of chamber 52 moves
in the direction of arrow 84.2, and the actuator 60 of chamber 54 moves in the direction
of arrow 84.3 into the chamber interior. Correspondingly, the movement element 62
of the first chamber 50, the movement element 64 of the second chamber 52 and the
movement element 66 of the third chamber 54 move away from the chamber interior in
the direction of arrows 84.1, 84.2 and 84.3. By the movement of the actuators 56 and
60 and for achieving a pressure equalization of the movement elements 62 and 66, the
channel 78 is opened, and a medium flowing therethrough, for example gas or liquid,
may flow in the direction of the outlet 76 via the inlet 74. If, specifically, a pulsed
operational voltage of the micropump 48 is applied and the driving of the individual
chambers 50, 52 and 54 is done separately and independently of each other, a directional
movement of medium flowing into the channel 78 via the inlet 74 may occur in the direction
of the outlet 76. The medium is thus drawn in through the inlet 74 and passed out
of the channel 78 via the outlet 76 by the actuators 56, 58 and 60.
[0034] When the channel 74 is opened and the channel 76 is closed at the same time, the
movement of the actuator 58 allows to draw in the medium, and by closing the channel
74 and opening the channel 76, by moving the actuator 58 back, the medium may subsequently
be expelled via the channel 76. The transport direction of the medium is determined
by the order in which the actuators 56, 58 and 60 are driven. The transport amount
may be varied by the driving times and the applied voltage.
[0035] Due to the micropump 48 of Fig. 7, but also the device 10 of Figs. 1 to 6, it is
not necessary to add a conducting electrolyte to the medium to be moved, thus considerably
extending the field of application as compared to the devices known from prior art.
Depending on the choice of the conducting electrolyte and the membrane material as
well as the conductive polymer, disadvantageously occurring electrochemical processes,
such as nucleophile attacks of hydroxide ions against polymers, hydrolyses or overoxidations,
may be avoided. In addition, the devices 10 or the micropump 48 may readily be operated
with low operational voltages below ± 2 Volt, so that battery operation is possible.
The actuators of a micropump may be driven separately in the present sense, so that
the transport means may also be varied. The micropump may also comprise several inlet
and outlet valves as well as pump chambers in a different arrangement.
[0036] The invention will be explained in more detail based on the following example:
Flat glass plates with a length of 2.8 cm, a width of 2.5 cm and a thickness of 3
mm are produced of borosilicate glass, in which a hole with a diameter of 1 cm was
centrally bored. A slot 20 with a width of 1.5 mm was introduced into the central
glass plate, which subsequently forms the opening 22 of the device 10. These three
glass plates were bonded with an epoxy resin glue for forming the housing 12.
Subsequently, the opening of the bores 18.1 and 18.3 of Figs. 2a and 2c was covered
externally with a film of polyethylene terephthalate sputtered with platinum. The
film was sputtered not only in the area of the chamber, but over the whole area facing
the housing and the chamber interior. The thickness of the platinum layer was about
60 nm to about 80 nm, the thickness of the film was about 12 µm.
For coating one of the two membrane films sputtered with platinum with a conductive
polymer, the formed chamber was filled with a monomer-containing electrolyte solution
via the opening 22. 0.1 M pyrrole in propylene carbonate with tetrabutylammonium hexafluorophosphate
(0.1 M) and/or lithium perchlorate (0.1 M) as conducting electrolyte was used as monomer,
wherein the polymerization was done potentiostatically at 850 mV. In a further embodiment,
3,4-ethylene dioxythiophene in propylene carbonate with tetrabutylammonium hexafluorophosphate,
alternatively in lithium perchlorate, 0.1 M each, was used as monomer, wherein here
the polymerization was done potentiostatically at about 1,000 mV. For the potentiostatic
polymerization, the plastic membrane sputtered with platinum which was to be coated
was connected as working electrode, the opposite membrane was connected as counter-electrode.
In addition, a silver wire coated with silver chloride was introduced into the chamber
interior via the opening 22 as reference electrode.
After the coating with polypyrrole and/or poly(3-4-ethylene dioxythiophene) was completed,
the chamber was emptied, rinsed and filled with monomer-free electrolyte solution.
Propylene carbonate with tetrabutylammonium hexafluoro phosphate or lithium perchlorate,
0.1 M each, served as electrolyte. After the filling with monomer-free electrolyte
solution, a silver wire coated with silver chloride was again introduced via the opening
22 as reference electrode, and the opening was tightly closed.
Subsequently, triangular and rectangular potentials in the range between 0 V and 1
V were applied with a feed rate of up to 1 V/sec, resulting in pulsed curvature of
the first actuator 24 and the second actuator 30.
1. Device (10) for moving liquids and/or gases including a housing (12) with at least
one chamber (14) having a first chamber wall (15.1) including at least partially at
least one actuator (24) including at least one first movable membrane (26) and at
least one layer (28) of at least one conducive polymer arranged on the side facing
the chamber interior (36); and having a second chamber walls (15.2) including at least
partially at least one movement element (30) including at least one second movable
membrane (32) and at least one metallic layer (34) arranged on the side facing the
chamber interior (36), wherein the chamber (14) is at least partially filled with
a conducting electrolyte (38), and wherein the actuator (24) and the movement element
(30) are moveable by applying a voltage between the conductive polymer and the metallic
layer (34).
2. Device of claim 1, characterized in that the actuator (24) and the movement element (30) are arranged opposite each other.
3. Device of once of the preceding claims, characterized in that the first and/or second moveable membrane (26, 32) is formed of a film selected from
a group including polyimides, polyamides, polyurethanes, polytetrafluoroethylenes,
polydimethylsiloxanes, polymethyl methacrylates, polyester, polyvinyl chlorides, polyethylenes,
polyethylene terephthalates, parylenes and/or silicon rubber.
4. Device of one of the preceding claims, characterized in that the first and/or second membrane (26, 32) is impermeable.
5. Device of one of the preceding claims, characterized in that the conducting electrolyte (38) includes a conducting electrolyte solution selected
from a group including water, aprotic solvents and/or ionic liquids.
6. Device of one of the preceding claims, characterized in that the conducting electrolyte (38) includes a conducting salt selected from a group
including fluorides, chlorides, bromides, iodides, perfluorides, perchlorates, perbromates,
periodides, sulphates, sulphonates, borates, tetrafluoroborates, phosphates, hexafluorophosphates,
hydroxides, cyanides, nitrates, chromates, tosylates, salts of trifluoromethane sulfonic
acid, polyalkyl sulphates, polyalkyl sulphonates, polydodecyl benzyl sulphonates and/or
polystyrene sulphonates.
7. Device of one of the preceding claims, characterized in that the first chamber wall (15.1) is formed by the actuator (24) and the second chamber
wall (15.2) is formed by the movement element (30).
8. Device of one of the preceding claims, characterized in that the first and/or second membrane (26, 32) is mounted to the housing (12).
9. Device of one of the preceding claims, characterized in that, between the first membrane (26) and the layer (28) of conductive polymer, at least
one further metallic layer (36) is disposed.
10. Device of one of the preceding claims, characterized in that a reference electrode (40) is arranged in the chamber (14).
11. Device of one of the preceding claims, characterized in that the first actuator (24) is connected as working electrode.
12. Device of one of the preceding claims, characterized in that the chamber (14) comprises at least one opening (22).
13. Device of one of the preceding claims, characterized in that it further includes a channel (78) arranged directly adjacent to the actuator (24)
and conducting liquid and/or gas.
14. Device of one of the preceding claims, characterized in that the channel (78) may be closed by the actuator (24).
15. Use of a device according to one of claims 1 to 14 as valve and/or pump.
1. Vorrichtung (10) zum Bewegen von Flüssigkeiten und/oder Gasen, die ein Gehäuse (12)
mit zumindest einer Kammer (14) umfasst, welche eine erste Kammerwand (15.1) aufweist,
die zumindest teilweise zumindest ein Betätigungsglied (24) umfasst, das zumindest
eine erste bewegliche Membran (26) und zumindest eine Schicht (28) zumindest eines
leitfähigen Polymers, das auf der dem Kammerinneren (36) zugewandten Seite angeordnet
ist, umfasst; und welche eine zweite Kammerwand (15.2) aufweist, die zumindest teilweise
zumindest ein Bewegungselement (30) umfasst, das zumindest eine zweite bewegliche
Membran (32) und zumindest eine auf der dem Kammerinneren (36) zugewandten Seite angeordnete
metallische Schicht (34) umfasst, wobei die Kammer (14) zumindest teilweise mit einem
leitenden Elektrolyten (38) gefüllt ist und wobei das Betätigungsglied (24) und das
Bewegungselement (30) bewegbar sind, indem eine Spannung zwischen das leitfähige Polymer
und die metallische Schicht (34) angelegt wird.
2. Vorrichtung gemäß Anspruch 1, dadurch gekennzeichnet, dass das Betätigungsglied (24) und das Bewegungselement (30) einander gegenüberliegend
angeordnet sind.
3. Vorrichtung gemäß einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die erste und/oder die zweite bewegliche Membran (26, 32) aus einem Film gebildet
ist, der aus einer Gruppe ausgewählt ist, die Polyimide, Polyamide, Polyurethane,
Polytetrafluorethylene, Polydimethylsiloxane, Polymethylmethacrylate, Polyester, Polyvinylchloride,
Polyethylene, Polyethylenterephthalate, Parylene und/oder Siliziumkautschuk umfasst.
4. Vorrichtung gemäß einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die erste und/oder zweite Membran (26, 32) undurchlässig ist.
5. Vorrichtung gemäß einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der leitende Elektrolyt (38) eine leitende Elektrolytlösung umfasst, die aus einer
Gruppe ausgewählt ist, die Wasser, aprotische Lösungsmittel und/oder ionische Flüssigkeiten
umfasst.
6. Vorrichtung gemäß einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der leitende Elektrolyt (38) ein leitendes Salz umfasst, das aus einer Gruppe ausgewählt
ist, die Fluoride, Chloride, Bromide, Iodide, Perfluoride, Perchlorate, Perbromate,
Periodide, Sulfate, Sulfonate, Borate, Tetrafluorborate, Phosphate, Hexafluorphosphate,
Hydroxide, Cyanide, Nitrate, Chromate, Tosylate, Salze von Trifluormethansulfonsäure,
Polyalkylsulfate, Polyalkylsulfonate, Polydodecylbenzylsulfonate und/oder Polystyrensulfonate
umfasst.
7. Vorrichtung gemäß einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die erste Kammerwand (15.1) durch das Betätigungsglied (24) gebildet ist und die
zweite Kammerwand (15.2) durch das Bewegungselement (30) gebildet ist.
8. Vorrichtung gemäß einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die erste und/oder zweite Membran (26, 32) an dem Gehäuse (12) angebracht ist.
9. Vorrichtung gemäß einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass zwischen der ersten Membran (26) und der Schicht (28) aus leitfähigem Polymer zumindest
eine weitere metallische Schicht (36) angeordnet ist.
10. Vorrichtung gemäß einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass eine Referenzelektrode (40) in der Kammer (14) angeordnet ist.
11. Vorrichtung gemäß einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das erste Betätigungsglied (24) als Arbeitselektrode angeschlossen ist.
12. Vorrichtung gemäß einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Kammer (14) zumindest eine Öffnung (22) aufweist.
13. Vorrichtung gemäß einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie ferner einen Kanal (78) umfasst, der direkt neben dem Betätigungsglied (24) angeordnet
ist und Flüssigkeit und/oder Gas leitet.
14. Vorrichtung gemäß einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Kanal (18) durch das Betätigungsglied (24) geschlossen werden kann.
15. Verwendung einer Vorrichtung gemäß einem der Ansprüche 1 bis 14 als Ventil und/oder
Pumpe.
1. Dispositif (10) pour déplacer des liquides et/ou des gaz, comportant un boîtier (12)
avec au moins une chambre (14) présentant une première paroi de chambre (15.1) comportant
au moins partiellement au moins un actionneur (24) comportant au moins une première
membrane mobile (26) et au moins une couche (28) d'au moins un polymère conducteur
disposée sur le côté faisant face à l'intérieur de la chambre (36); et présentant
une deuxième paroi de chambre (15.2) comportant au moins partiellement au moins un
élément de déplacement (30) comportant au moins une deuxième membrane mobile (32)
et au moins une couche métallique (34) disposée sur le côté faisant face à l'intérieur
de la chambre (36), dans lequel la chambre (14) est au moins partiellement remplie
d'un électrolyte conducteur (38), et dans lequel l'actionneur (24) et l'élément de
déplacement (30) sont déplaçables par application d'une tension entre le polymère
conducteur et la couche métallique (34).
2. Dispositif selon la revendication 1, caractérisé par le fait que l'actionneur (24) et l'élément de déplacement (30) sont disposés opposés l'un à l'autre.
3. Dispositif selon l'une des revendications précédentes, caractérisé par le fait que la première et/ou la deuxième membrane mobile (26, 32) est formée d'un film sélectionné
parmi un groupe comportant les polyimides, les polyamides, les polyuréthanes, les
polytétrafluoréthylènes, les polydiméthylsiloxanes, les polyméthacrylates de méthyle,
le polyester, les chlorures de polyvinyle, les polyéthylènes, les téréphtalates de
polyéthylène, les parylènes et/ou le caoutchouc à base de silicium.
4. Dispositif selon l'une des revendications précédentes, caractérisé par le fait que la première et/ou la deuxième membrane (26, 32) est imperméable.
5. Dispositif selon l'une des revendications précédentes, caractérisé par le fait que l'électrolyte conducteur (38) comporte une solution d'électrolyte conducteur sélectionnée
parmi un groupe comportant l'eau, les solvants aprotiques et/ou les liquides ioniques.
6. Dispositif selon l'une des revendications précédentes, caractérisé par le fait que l'électrolyte conducteur (38) comporte un sel conducteur sélectionné parmi un groupe
comportant les fluorures, les chlorures, les bromures, les iodures, les perfluorures,
les perchlorates, les perbromates, les periodures, les sulfates, les sulfonates, les
borates, les tétrafluoroborates, les phosphates, les hexafluorophosphates, les hydroxydes,
les cyanures, les nitrates, les chromates, les tosylates, les sels de l'acide sulfonique
de trifluorométhane, les sulfates de polyalcoyle, les sulfonates de polyalcoyle, les
polysulfonates de dodécyle et benzyle et/ou les sulfonates de polystyrène.
7. Dispositif selon l'une des revendications précédentes, caractérisé par le fait que la première paroi de chambre (15.1) est formée par l'actionneur (24) et la deuxième
paroi de chambre (15.2) est formée par l'élément de déplacement (30).
8. Dispositif selon l'une des revendications précédentes, caractérisé par le fait que la première et/ou la deuxième membrane (26, 32) est montée sur le boîtier (12).
9. Dispositif selon l'une des revendications précédentes, caractérisé par le fait qu'entre la première membrane (26) et la couche (28) de polymère conducteur est disposée
au moins une autre couche métallique (36).
10. Dispositif selon l'une des revendications précédentes, caractérisé par le fait qu'une électrode de référence (40) est disposée dans la chambre (14).
11. Dispositif selon l'une des revendications précédentes, caractérisé par le fait que le premier actionneur (24) est connecté comme électrode de travail.
12. Dispositif selon l'une des revendications précédentes, caractérisé par le fait que la chambre (14) comprend au moins une ouverture (22).
13. Dispositif selon l'une des revendications précédentes, caractérisé par le fait qu'il comporte par ailleurs un canal (78) disposé directement adjacent à l'actionneur
(24) et conduisant du fluide et/ ou du gaz.
14. Dispositif selon l'une des revendications précédentes, caractérisé par le fait que le canal (78) peut être obturé par l'actionneur (24).
15. Utilisation d'un dispositif selon l'une des revendications 1 à 14 comme soupape et/
ou pompe.