FIELD OF THE INVENTION
[0001] The present invention relates to a miniature pneumatic device, and more particularly
to a slim and silent miniature pneumatic device.
BACKGROUND OF THE INVENTION
[0002] With the advancement of science and technology, fluid transportation devices used
in many sectors such as pharmaceutical industries, computer techniques, printing industries
or energy industries are developed toward elaboration and miniaturization. The fluid
transportation devices are important components that are used in for example micro
pumps, micro atomizers, printheads or industrial printers. Therefore, it is important
to provide an improved structure of the fluid transportation device.
[0003] For example, in the pharmaceutical industries, pneumatic devices or pneumatic machines
use motors or pressure valves to transfer gases. However, due to the volume limitations
of the motors and the pressure valves, the pneumatic devices or the pneumatic machines
are bulky in volume. In other words, the conventional pneumatic device fails to meet
the miniaturization requirement, and is not suitable to be installed in or cooperated
with a portable equipment. Moreover, during operations of the motor or the pressure
valve, annoying noise is readily generated.
[0004] Therefore, there is a need of providing a miniature pneumatic device with small,
miniature, silent, portable and comfortable benefits in order to eliminate the above
drawbacks.
SUMMARY OF THE INVENTION
[0005] The present invention provides a miniature pneumatic device for use with a portable
or wearable equipment or machine. The miniature pneumatic device is a combination
of a miniature fluid control device and a miniature valve device. The miniature pneumatic
device of the present invention is small, slim, portable and silent. Consequently,
the drawbacks of the conventional pneumatic device are overcome.
[0006] In accordance with an aspect of the present invention, a miniature pneumatic device
is provided. The miniature pneumatic device includes a miniature fluid control device
and a miniature valve device. The miniature fluid control device includes a gas inlet
plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. The
gas inlet plate includes at least one inlet, at least one convergence channel and
a central cavity. A convergence chamber is defined by the central cavity. After a
gas is introduced into the at least one convergence channel through the at least one
inlet, the gas is guided by the at least one convergence channel and converged to
the convergence chamber. The resonance plate has a central aperture corresponding
to the convergence chamber of the gas inlet plate. The piezoelectric actuator includes
a suspension plate, an outer frame and a piezoelectric ceramic plate. A length of
the suspension plate is in a range between 2mm and 4.5mm. A width of the suspension
plate is in a range between 2mm and 4.5mm. A thickness of the suspension plate is
in a range between 0.1mm and 0.3mm. The outer frame includes at least one bracket
by which the suspension plate and the outer frame are connected with each other. The
piezoelectric ceramic plate is attached on a first surface of the suspension plate.
A length of a side of the piezoelectric ceramic plate is equal to or less than a length
of a side of the suspension plate. The length of the piezoelectric ceramic plate is
in a range between 2mm and 4.5mm. A width of the piezoelectric ceramic plate is in
a range between 2mm and 4.5mm. A thickness of the piezoelectric ceramic plate is in
a range between 0.05mm and 0.3mm. A length/width ratio of the piezoelectric ceramic
plate is in a range between 0.44 and 2.25. The gas collecting plate includes a first
perforation, a second perforation, a first pressure-releasing chamber, a first outlet
chamber and a fiducial surface. The gas collecting plate further includes a raised
structure disposed in the first outlet chamber and the raised structure is located
at a level higher than the fiducial surface of the gas collecting plate. The first
perforation is in communication with the first pressure-releasing chamber. The second
perforation is in communication with the first outlet chamber. The gas inlet plate,
the resonance plate, the piezoelectric actuator and the gas collecting plate are stacked
on each other sequentially. A gap is formed between the resonance plate and the piezoelectric
actuator to define a first chamber. When the piezoelectric actuator is actuated, the
gas is fed into the miniature fluid control device through the at least one inlet
of the gas inlet plate, converged to the central cavity through the at least one convergence
channel, transferred through the central aperture of the resonance plate, introduced
into the first chamber, transferred downwardly to the gas collecting plate through
a vacant space between the at least one bracket of the piezoelectric actuator, and
exited from the miniature fluid control device. The miniature valve device includes
a valve film and a gas outlet plate. The valve film has a valve opening. A thickness
of the valve film is in a range between 0.1mm and 0.3mm. The raised structure of the
gas collecting plate is aligned with the valve opening of the valve film. The raised
structure of the gas collecting plate is contacted with the valve opening to provide
a pre-force to tightly close the valve opening. The gas outlet plate includes a pressure-releasing
perforation, an outlet perforation, a second pressure-releasing chamber, a second
outlet chamber, at least one position-limiting structure and a fiducial surface. The
second pressure-releasing chamber and the second outlet chamber are concavely formed
in the fiducial surface of the gas outlet plate. The pressure-releasing perforation
is located at a center of the second pressure-releasing chamber. A convex structure
is located beside an end of the pressure-releasing perforation. The convex structure
is located at a level higher than the fiducial surface of the gas outlet plate. The
outlet perforation is in communication with the second outlet chamber. The at least
one position-limiting structure is disposed within the second pressure-releasing chamber.
A thickness of the position-limiting structure is in a range between 0.1mm and 0.5mm.
The gas outlet plate further comprises a communication channel between the second
pressure-releasing chamber and the second outlet chamber. The gas collecting plate,
the valve film and the gas outlet plate are combined together. The pressure-releasing
perforation of the gas outlet plate is aligned with the first perforation of the gas
collecting plate. The second pressure-releasing chamber of the gas outlet plate is
aligned with the first pressure-releasing chamber of the gas collecting plate. The
second outlet chamber of the gas outlet plate is aligned with the first outlet chamber
of the gas collecting plate. The valve film is arranged between the gas collecting
plate and the gas outlet plate for blocking communication between the first pressure-releasing
chamber and the second pressure-releasing chamber. The valve opening of the valve
film is arranged between the second perforation and the outlet perforation. After
the gas is downwardly transferred from the miniature fluid control device to the miniature
valve device, the gas is introduced into the first pressure-releasing chamber and
the first outlet chamber through the first perforation and the second perforation,
and the valve film is quickly contacted with the convex structure of the gas outlet
plate to provide a pre-force to tightly close the pressure-releasing perforation,
and the gas within the first outlet chamber is further transferred to the outlet perforation
of the miniature valve device through the valve opening of the valve film. Consequently,
a pressure-collecting operation is performed. While a pressure-releasing operation
is performed, the gas is transferred from the outlet perforation to the second outlet
chamber to move the valve film, the valve opening of the valve film is contacted with
and closed by the gas collecting plate, the at least one position-limiting structure
assists in supporting the valve film to avoid collapse of the valve film, the gas
is transferred from the second outlet chamber to the second pressure-releasing chamber
through the communication channel, the valve film corresponding to the second pressure-releasing
chamber is moved, and the gas is exited from the pressure-releasing perforation.
[0007] In accordance with another aspect of the present invention, a miniature pneumatic
device is provided. The miniature pneumatic device includes a miniature fluid control
device and a miniature valve device. The miniature fluid control device includes a
gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting
plate. The piezoelectric actuator includes a suspension plate. A length of the suspension
plate is in a range between 2mm and 4.5mm. A width of the suspension plate is in a
range between 2mm and 4.5mm. A thickness of the suspension plate is in a range between
0.1mm and 0.3mm. The gas collecting plate includes a first perforation, a second perforation,
a first pressure-releasing chamber and a first outlet chamber. The gas inlet plate,
the resonance plate, the piezoelectric actuator and the gas collecting plate are stacked
on each other sequentially. A gap is formed between the resonance plate and the piezoelectric
actuator to define a first chamber. A gas-collecting chamber is formed between the
piezoelectric actuator and the gas collecting plate. When the piezoelectric actuator
is actuated, a gas is fed into the miniature fluid control device through the gas
inlet plate, transferred through the resonance plate, introduced into the first chamber,
and transferred downwardly to the gas-collecting chamber. The miniature valve device
includes a valve film and a gas outlet plate. The valve film has a valve opening.
The gas outlet plate includes a pressure-releasing perforation, an outlet perforation,
a second pressure-releasing chamber and a second outlet chamber. The gas collecting
plate, the valve film and the gas outlet plate are combined together. After the gas
is downwardly transferred from the gas-collecting chamber to the miniature valve device,
the gas is transferred through the first perforation, the second perforation, the
first pressure-releasing chamber, the first outlet chamber, the second pressure-releasing
chamber, the second outlet chamber, the pressure-releasing perforation and the outlet
perforation. The gas is transferred in one direction, and the valve opening of the
valve film is correspondingly opened or closed. Consequently, a pressure-collecting
operation or a pressure-releasing operation is selectively performed.
[0008] In accordance with a further aspect of the present invention, a miniature pneumatic
device is provided. The miniature pneumatic device includes a miniature fluid control
device and a miniature valve device. The miniature fluid control device includes a
gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting
plat. The gas inlet plate, the resonance plate, the piezoelectric actuator and the
gas collecting plate are stacked on each other sequentially. A gap is formed between
the resonance plate and the piezoelectric actuator to define a first chamber. When
the piezoelectric actuator is actuated, a gas is fed into the miniature fluid control
device through the gas inlet plate, transferred through the resonance plate, introduced
into the first chamber, and exited from the miniature fluid control device. The piezoelectric
actuator comprises a suspension plate. A length of the suspension plate is in a range
between 2mm and 4.5mm. A width of the suspension plate is in a range between 2mm and
4.5mm. The miniature valve device includes a valve film and a gas outlet plate. The
valve film has a valve opening. The gas collecting plate, the valve film and the gas
outlet plate are combined together. After the gas is transferred from the miniature
fluid control device to the miniature valve device, a pressure-collecting operation
or a pressure-releasing operation is selectively performed.
[0009] The above contents of the present invention will become more readily apparent to
those ordinarily skilled in the art after reviewing the following detailed description
and accompanying drawings, in which:
BRIEF DESCRIPTION OF THE DRAWINGS
[0010]
FIG. 1A is a schematic exploded view illustrating a miniature pneumatic device according
to an embodiment of the present invention and taken along a first viewpoint;
FIG. 1B is a schematic assembled view illustrating the miniature pneumatic device
of FIG. 1A;
FIG. 2A is a schematic exploded view illustrating the miniature pneumatic device according
to the embodiment of the present invention and taken along a second viewpoint;
FIG. 2B is a schematic assembled view illustrating the miniature pneumatic device
of FIG. 2A;
FIG. 3A is a schematic perspective view illustrating the piezoelectric actuator of
the miniature pneumatic device of FIG. 1A and taken along the front side;
FIG. 3B is a schematic perspective view illustrating the piezoelectric actuator of
the miniature pneumatic device of FIG. 1A and taken along the rear side;
FIG. 3C is a schematic cross-sectional view illustrating the piezoelectric actuator
of the miniature pneumatic device of FIG. 1A;
FIGS. 4A to 4C schematically illustrate various exemplary piezoelectric actuator used
in the miniature pneumatic device of the present invention;
FIGS. 5A to 5E schematically illustrate the actions of the miniature fluid control
device of the miniature pneumatic device of FIG. 1A;
FIG. 6A schematically illustrate a gas-collecting operation of the gas collecting
plate and the miniature valve device of the miniature pneumatic device of FIG. 1A;
FIG. 6B schematically illustrate a gas-releasing operation of the gas collecting plate
and the miniature valve device of the miniature pneumatic device of FIG. 1A;
FIGS. 7A to 7E schematically illustrate a gas-collecting operation of the miniature
pneumatic device of FIG. 1A; and
FIG. 8 schematically illustrate the gas-releasing actions or the pressure-reducing
actions of the miniature pneumatic device of FIG. 1A.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
[0011] The present invention will now be described more specifically with reference to the
following embodiments. It is to be noted that the following descriptions of preferred
embodiments of this invention are presented herein for purpose of illustration and
description only. It is not intended to be exhaustive or to be limited to the precise
form disclosed.
[0012] The present invention provides a miniature pneumatic device. The miniature pneumatic
device may be used in many sectors such as pharmaceutical industries, energy industries,
computer techniques or printing industries for transporting gases.
[0013] Please refer to FIGS. 1A, 1B, 2A, 2B and 7A to 7E. FIG. 1A is a schematic exploded
view illustrating a miniature pneumatic device according to an embodiment of the present
invention and taken along a first viewpoint. FIG. 1B is a schematic assembled view
illustrating the miniature pneumatic device of FIG. 1A. FIG. 2A is a schematic exploded
view illustrating the miniature pneumatic device according to the embodiment of the
present invention and taken along a second viewpoint. FIG. 2B is a schematic assembled
view illustrating the miniature pneumatic device of FIG. 2A. FIGS. 7A to 7E schematically
illustrate a gas-collecting operation of the miniature pneumatic device of FIG. 1A.
[0014] As shown in FIGS. 1A and 2A, the miniature pneumatic device 1 comprises a miniature
fluid control device 1A and a miniature valve device 1B. In this embodiment, the miniature
fluid control device 1A comprises a housing 1a, a piezoelectric actuator 13, a first
insulation plate 141, a conducting plate 15 and a second insulation plate 142. The
housing 1a comprises a gas collecting plate 16 and a base 10. The base 10 is composed
of a gas inlet plate 11 and a resonance plate 12. The piezoelectric actuator 13 is
aligned with the resonance plate 12. The gas inlet plate 11, the resonance plate 12,
the piezoelectric actuator 13, the first insulation plate 141, the conducting plate
15, the second insulation plate 142 and the gas collecting plate 16 are stacked on
each other sequentially to be assembled while an outward surface of the gas inlet
plate 11 is towards an input side. Moreover, the piezoelectric actuator 13 comprises
a suspension plate 130, an outer frame 131, at least one bracket 132 and a piezoelectric
ceramic plate 133. In this embodiment, the miniature valve device 1B comprises a valve
film 17 and a gas outlet plate 18.
[0015] As shown in FIG. 1A, the gas collecting plate 16 comprises a bottom plate and a sidewall
168 protruding from the edges of the bottom plate. The gas collecting plate 16 has
a length and a width both in the range between 4mm and 10mm. Meanwhile, the length/width
ratio of the gas collecting plate 16 is preferably in the range between 0.4 and 2.5.
The bottom plate and the sidewall 168 collaboratively define an accommodation space
16a where the piezoelectric actuator 13 is disposed within. The structure of the miniature
pneumatic device 1 in assembled state, taken from the front side, is shown in FIG.
1B and FIGS. 7A to 7E. As the miniature fluid control device 1A and the miniature
valve device 1B are combined together, the valve film 17 and the gas outlet plate
18 of the miniature valve device 1B are stacked on each other and positioned on the
bottom side of the gas collecting plate 16 of the miniature fluid control device 1A.
Please refer to FIG. 1A and FIG. 2B, the gas outlet plate 18 has a pressure-releasing
perforation 181 and an outlet structure 19. The outlet structure 19 is adapted to
be in communication with an inner space inside a target equipment (not shown), and
the pressure-releasing perforation 181 is adapted to discharge the gas inside the
miniature valve device 1B. As so, the gas pressure of the inner space of the target
equipment can be released.
[0016] The miniature pneumatic device 1 in assembled state allows a gas to be fed into the
miniature fluid control device 1A through at least one inlet 110 of the gas inlet
plate 11 from the input side. The piezoelectric actuator 13 is operable to be activated,
and in response of the actions of the piezoelectric actuator 13, the gas is transferred
downwardly through plural pressure chambers to the miniature valve device 1B. In the
miniature valve device 1B, the gas is transferred in one direction, being discharged
from the outlet structure 19 and flows into the inner space of the target equipment
(not shown). As a result, the pressure of the gas in the inner space of the target
equipment is accumulated.
[0017] Please refer to FIGS. 1A and 2A again. The gas inlet plate 11 of the miniature fluid
control device 1A comprises a first surface 11b, a second surface 11a and the at least
one inlet 110. In this embodiment, the gas inlet plate 11 has four inlets 110. The
inlets 110 run through the first surface 11b and the second surface 11a of the gas
inlet plate 11, and the second surface 11a is towards exterior of the miniature pneumatic
device 1 where is defined as the input side. In response to the action of the atmospheric
pressure, the gas is introduced into the miniature fluid control device 1A through
the inlets 110. As shown in FIG. 2A, at least one convergence channel 112 is formed
on the first surface 11b of the gas inlet plate 11, and is in communication with the
at least one inlet 110 of the gas inlet plate 11. The number of the convergence channel
112 is identical to the number of the inlet 110. In this embodiment, the gas inlet
plate 11 has four convergence channels 112. It is noted that the number of the at
least one convergence channel 112 and the number of the at least one inlet 110 may
be varied according to the practical requirements. Moreover, a central cavity 111
is formed on the central of the first surface 11b of the gas inlet plate 11 and located
at the intersection of the four convergence channels 112 that forming a convergence
chamber for temporarily storing the gas. The central cavity 111 is in communication
with all of the convergence channels 112, such that the gas entered by the inlets
110 would be introduced into the at least one convergence channel 112 and is guided
to the central cavity 111. In this embodiment, the at least one inlet 110, the at
least one convergence channel 112 and the central cavity 111 of the gas inlet plate
11 are integrally formed.
[0018] Preferably but not exclusively, the gas inlet plate 11 is made of stainless steel.
The thickness of the gas inlet plate 11 is in the range between 0.3mm and 0.5mm, and
preferably 0.4mm. In some embodiments, the depth of the convergence chamber defined
by the central cavity 111, is equal to the depth of the at least one convergence channel
112, both of which are preferably in the range between 0.15mm and 0.25mm. The resonance
plate 12 is made of a flexible material, which is preferably but not exclusively copper.
The resonance plate 12 further has a central aperture 120 corresponding to the central
cavity 111 of the gas inlet plate 11 that providing the gas for flowing through. The
thickness of the resonance plate 12 is in the range between 0.02mm and 0.07mm, and
preferably 0.04mm.
[0019] FIG. 3A is a schematic perspective view illustrating the piezoelectric actuator of
the miniature pneumatic device of FIG. 1A and taken along the front side. FIG. 3B
is a schematic perspective view illustrating the piezoelectric actuator of the miniature
pneumatic device of FIG. 1A and taken along the rear side. FIG. 3C is a schematic
cross-sectional view illustrating the piezoelectric actuator of the miniature pneumatic
device of FIG. 1A. As shown in FIGS. 3A, 3B and 3C, the piezoelectric actuator 13
comprises the suspension plate 130, the outer frame 131, the at least one bracket
132, and the piezoelectric ceramic plate 133. The piezoelectric ceramic plate 133
is attached on a first surface 130b of the suspension plate 130. In response to an
applied voltage, the piezoelectric ceramic plate 133 would be subjected to a curvy
vibration. The suspension plate 130 comprises a middle portion 130d and a periphery
portion 130e. When the piezoelectric ceramic plate 133 is subjected to the curvy vibration,
the suspension plate 130 is also subjected to the curvy vibration and vibrates from
the middle portion 130d to the periphery portion 130e. The at least one bracket 132
is connected between the suspension plate 130 and the outer frame 131, while the two
ends of the bracket 132 are connected with the outer frame 131 and the suspension
plate 130 respectively that the bracket 131 can elastically support the suspension
plate 130. At least one vacant space 135 is formed between the bracket 132, the suspension
plate 130 and the outer frame 131 for allowing the gas to go through. The type of
the suspension plate 130 and the outer frame 131, and the type and the number of the
at least one bracket 132 may be varied according to the practical requirements. Moreover,
a conducting pin 134 is protruding outwardly from the outer frame 131 so as to be
electrically connected with an external circuit (not shown).
[0020] In this embodiment, the suspension plate 130 has a bulge 130c that makes the suspension
plate 130 a stepped structure. The bulge 130c is formed on a second surface 130a of
the suspension plate 130, wherein the second surface 130a is opposing to the first
surface 130b. The bulge 130c may be a circular convex structure, the thickness of
which is in the range between 0.02mm and 0.08mm, and preferably 0.03mm. Preferably
but not exclusively, the diameter of the bulge 130c is 0.55 times as large as a length
of a shortest side of the suspension plate 130. As shown in FIGS. 3A and 3C, a top
surface of the bulge 130c of the suspension plate 130 is coplanar with a second surface
131a of the outer frame 131, while the second surface 130a of the suspension plate
130 is coplanar with a second surface 132a of the bracket 132. Moreover, there is
a drop of specified amount from the bulge 130c of the suspension plate 130 (or the
second surface 131a of the outer frame 131) to the second surface 130a of the suspension
plate 130 (or the second surface 132a of the bracket 132). As shown in FIGS. 3B and
3C, a first surface 130b of the suspension plate 130, a first surface 131b of the
outer frame 131 and a first surface 132b of the bracket 132 are coplanar with each
other. The piezoelectric ceramic plate 133 is attached on the first surface 130b of
the suspension plate 130. The suspension plate 130 may be a square plate structure
with two flat surfaces but the type of the suspension plate 130 may be varied according
to the practical requirements. In this embodiment, the suspension plate 130, the at
least bracket 132 and the outer frame 131 are integrally formed and produced by using
a metal plate (e.g., a stainless steel plate). The thickness of the suspension plate
130 is in the range between 0.1mm and 0.3mm, and preferably 0.2mm. The length of the
suspension plate 130 is in the range between 2mm and 4.5mm, and preferably in the
range between 2.5mm and 3.5mm. The width of the suspension plate 130 is in the range
between 2mm and 4.5mm, and preferably in the range between 2.5mm and 3.5mm. The thickness
of the outer frame 131 is in the range between 0.1mm and 0.4mm, and preferably 0.3mm.
[0021] The piezoelectric ceramic plate 133 has the same shape with the suspension plate
130 but in smaller size, which means the longest side of the piezoelectric ceramic
plate 133 is always equal to or shorter than the longest side of the suspension plate
130. As the suspension plate 130 has a square shape in this embodiment, the piezoelectric
ceramic plate 133 also has a square shape. The thickness of the piezoelectric ceramic
plate 133 is in the range between 0.05mm and 0.3mm, and preferably 0.10mm. A length
of a side of the piezoelectric ceramic plate 133 is equal to or less than a length
of a side of the suspension plate 130. Meanwhile, the length of the side of the piezoelectric
ceramic plate 133 is in the range between 2mm and 4.5mm, and preferably in the range
between 2.5mm and 3.5mm. In some other embodiments, the suspension plate 130 and the
piezoelectric ceramic plate 133 may have a rectangular shape, and the width and the
length of the rectangular shape is in the range between 2mm and 4.5mm, preferably
in the range between 2.5mm and 3.5mm. Moreover, the length/width ratio of the piezoelectric
ceramic plate 133 is in the range between 0.44 and 2.25.
[0022] Preferably, the suspension plate 130 of the piezoelectric actuator 13 used in the
miniature pneumatic device 1 of the present invention is a square suspension plate.
In comparison with the circular suspension plate (e.g., the circular suspension plate
j0 with the types (j)∼(1) as shown in FIG. 4A), the square suspension plate can make
the miniature pneumatic device 1 more power-saving.
[0023] Generally, the consumed power of the capacitive load at the resonance frequency is
positively related to the resonance frequency. Since the resonance frequency of the
square suspension plate is obviously lower than that of the circular square suspension
plate, the consumed power of the square suspension plate is lower. Since the square
suspension plate is more power-saving than the circular suspension plate, the piezoelectric
actuator 13 with the square suspension plate is suitably used in the portable/wearable
devices.
[0024] FIGS. 4A, 4B and 4C schematically illustrate various exemplary piezoelectric actuator
used in the miniature pneumatic device of the present invention. As shown in the drawings,
the suspension plate 130, the outer frame 131 and the at least one bracket 132 of
the piezoelectric actuator 13 have various types.
[0025] FIG. 4A schematically illustrates the types (a)∼(1) of the piezoelectric actuator.
In the type (a), the outer frame a1 and the suspension plate a0 are square, the outer
frame a1 and the suspension plate a0 are connected with each other through eight brackets
a2, each two of which are disposed by one side of the square suspension plate a0.
Several vacant spaces a3 are formed between the brackets a2, the suspension plate
a0 and the outer frame a1 for allowing the gas to go through. In the type (i), the
outer frame i1 and the suspension plate i0 are also square, but the outer frame i1
and the suspension plate i0 are connected with each other through merely two brackets
i2. In addition, the outer frame i1 and the suspension plate i0 in each of the types
(b)∼(h) are also square. In each of the types (j)∼(l), the suspension plate is circular,
and the outer frame has a square with arc-shaped corners. For example, in the type
(j), the suspension plate j0 is circular, and the outer frame has a square with arc-shaped
corners.
[0026] FIG. 4B schematically illustrates the types (m)∼(r) of the piezoelectric actuator.
In these types (m)∼(r), the suspension plate 130 and the outer frame 131 are square.
In the type (m), the outer frame m1 and the suspension plate m0 are square, the outer
frame m1 and the suspension plate m0 are connected with each other through four brackets
m2, each of which is disposed by one side of the suspension plate m0. Meanwhile, a
vacant space m3 is formed between the brackets m2, the suspension plate m0 and the
outer frame m1. The bracket m2 has two ends m2' and m2" respectively connected with
the outer frame m1 and the suspension plate m0. The two ends m2' and m2" are opposed
to each other and arranged along the same horizontal line.
[0027] In the type (n), the outer frame n1 and the suspension plate n0 are also connected
with each other through four brackets n2, and a vacant space n3 is formed between
the brackets n2, the suspension plate n0 and the outer frame n1. Nonetheless, the
two ends n2' and n2" of the bracket n2, which are respectively connected with the
outer frame n1 and the suspension plate n0, are not arranged along the same horizontal
line. Instead, the two ends n2' and n2" are inclined at 0∼45 degrees with respect
to the horizontal line.
[0028] In the type (o), the outer frame o1 and the suspension plate o0 are square, the outer
frame o1 and the suspension plate o0 are connected with each other through four brackets
o2 in circular profiles, and a vacant space o3 is formed between each two of the brackets
o2, the suspension plate o0 and the outer frame o1. The bracket o2 includes a connecting
part and two ends o2' and o2". The end o2' of the bracket o2 is connected with the
outer frame o1. The end o2" of the bracket o2 is connected with the suspension plate
o0. The two ends o2' and o2" are opposed to each other and arranged along the same
horizontal line.
[0029] In the type (p), the outer frame p1 and the suspension plate p0 are square, the outer
frame p1 and the suspension plate p0 are connected with each other through four brackets
p2, and a vacant space p3 is formed between each two of the brackets p2, the suspension
plate p0 and the outer frame p1. The bracket p2 includes a first connecting part p20,
an intermediate part p21 and a second connecting part p22. The intermediate part p21
is formed in the vacant space p3 and in parallel with the outer frame p1 and the suspension
plate p0. The first connecting part p20 is arranged between the intermediate part
p21 and the suspension plate p0. The second connecting part p22 is arranged between
the intermediate part p21 and the outer frame p1. The first connecting part p20 and
the second connecting part p22 are opposed to each other and arranged along the same
horizontal line.
[0030] More specifically, the intermediate part p21 is a bar perpendicular to both the first
connecting part p20 and the second connecting part p22, which makes the bracket p2
in the shape of a cross. Thus, the whole structure of the bracket p2 is strengthened,
which is beneficial for vibration of the suspension plate p0 in a fixed direction.
Meanwhile, the bracket p2 can be made of a material with a lesser rigidity, and therefore
increases vibration frequency of the suspension plate p0. As a result, the gas pressure
output efficiency could be improved.
[0031] In the type (q), the outer frame q1, the suspension plate q0, the bracket q2 and
the vacant space q3 are similar to those of the type (m) and the type (o). Each side
of the suspension plate q0 is connected with the corresponding side of the outer frame
q1 through two connecting parts q2. The two ends q2' and q2" of each connecting part
q2 are opposed to each other and arranged along the same horizontal line. In the type
(r), the outer frame r1, the suspension plate r0, the bracket r2 and the vacant space
r3 are similar to those of the above embodiments. However, the bracket r2 is a V-shaped
connecting part. That is, the bracket r2 is connected with the outer frame r1 and
the suspension plate r0 at an inclined angle 0∼45 degrees. An end r2" of the bracket
r2 is connected with the suspension plate r0, and two ends r2' of the bracket r2 are
connected with the outer frame r1. That is, the ends b2' and b2" are not arranged
along the same horizontal line.
[0032] FIG. 4C schematically illustrates the types (s)∼(x) of the piezoelectric actuator.
The structures of the types (s)∼(x) are similar to those of the types (m)∼(r), respectively.
However, in the types (s)∼(x), the suspension plate 130 of the piezoelectric actuator
13 has a bulge 130c. The bulges 130c in the types (s)∼(x) are indicated as s4, t4,
u4, v4, w4 and x4, respectively. Regarding the types (m)∼(r) and the types (s)∼(x)
of the piezoelectric actuator, the suspension plate 130 is square for achieving power-saving
efficacy, and both the stepped structure with bulge and the flat structure with two
flat surfaces are in the scope of the present invention. Meanwhile, the number of
the brackets 132 between the outer frame 131 and the suspension plate 130 may be varied
according to the practical requirements. The suspension plate 130, the outer frame
131 and the at least one bracket 132 may be integrally formed with each other, and
produced by but not limited to a conventional machining process, a photolithography
and etching process, a laser machining process, an electroforming process, an electric
discharge machining process and so on.
[0033] Please refer to FIGS. 1A and 2A again. The miniature fluid control device 1A further
comprises the first insulation plate 141, the conducting plate 15 and the second insulation
plate 142. The first insulation plate 141, the conducting plate 15 and the second
insulation plate 142 are stacked on each other sequentially and located under the
piezoelectric actuator 13. The profiles of the first insulation plate 141, the conducting
plate 15 and the second insulation plate 142 substantially match the profile of the
outer frame 131 of the piezoelectric actuator 13. The first insulation plate 141 and
the second insulation plate 142 are made of an insulating material (e.g. a plastic
material) for providing insulating efficacy. The conducting plate 15 is made of an
electrically conductive material (e.g. a metallic material) for providing electrically
conducting efficacy. Moreover, the conducting plate 15 has a conducting pin 151 so
as to be electrically connected with an external circuit (not shown).
[0034] FIGS. 5A to 5E schematically illustrate the actions of the miniature fluid control
device of the miniature pneumatic device of FIG. 1A. As shown in FIG. 5A, the gas
inlet plate 11, the resonance plate 12, the piezoelectric actuator 13, the first insulation
plate 141, the conducting plate 15 and the second insulation plate 142 of the miniature
fluid control device 1A are stacked on each other sequentially. Moreover, there is
a gap g0 between the resonance plate 12 and the outer frame 131 of the piezoelectric
actuator 13, which is formed and maintained by a filler (e.g. a conductive adhesive)
inserted therein in this embodiment. The gap g0 ensures the proper distance between
the resonance plate 12 and the bulge 130c of the suspension plate 130, so that the
contact interference is reduced and the generated noise is largely reduced.
[0035] Please refer to FIGS. 5A to 5E again. A convergence chamber is defined by the resonance
plate 12 and the central cavity 111 of the gas inlet plate 11 collaboratively for
converging the gas. A first chamber 121 is formed between the resonance plate 12 and
the piezoelectric actuator 13, and is in communication with the convergence chamber
through the central aperture 120 of the resonance plate 12. Meanwhile, the peripheral
regions of the first chamber 121 are in communication with the underlying miniature
valve device 1B through the vacant spaces 135 of the piezoelectric actuator 13.
[0036] Please refer to FIG. 5B. When the miniature fluid control device 1A of the miniature
pneumatic device 1 is enabled, the piezoelectric actuator 13 is actuated in response
to an applied voltage. Consequently, the piezoelectric actuator 13 vibrates along
a vertical direction in a reciprocating manner, while the brackets 132 are served
as the fulcrums. The resonance plate 12 except for the part of it fixed on the gas
inlet plate 11 is hereinafter referred as a movable part 12a, while the rest is referred
as a fixed part 12b. Since the resonance plate 12 is light and thin, the movable part
12a vibrates along with the piezoelectric actuator 13 because of the resonance of
the piezoelectric actuator 13. In other words, the movable part 12a is reciprocated
and subjected to a curvy deformation.
[0037] As shown in FIG. 5C, during the vibration of the movable part 12a of the resonance
plate 12, the movable part 12a moves down till being contacted with the bulge 130c
of the suspension plate 130. In the meantime, the volume of the first chamber 121
is shrunken and a middle space which was communicating with the convergence chamber
is closed. As a result, the pressure gradient occurs to push the gas in the first
chamber 121 moving toward peripheral regions of the first chamber 121 and flowing
downwardly through the vacant spaces 135 of the piezoelectric actuator 13.
[0038] Please refer to FIG. 5D, which illustrates consecutive action following the action
in FIG. 5C. The movable part 12a has returned its original position when the piezoelectric
actuator 13 has ascended at a vibration displacement d to an upward position. Consequently,
the volume of the first chamber 121 is consecutively shrunken that generating the
pressure gradient which makes the gas in the first chamber 121 continuously pushed
toward peripheral regions and results in an exterior gas continuously fed into the
inlets 110 of the gas inlet plate 11 and transferred to the central cavity 111.
[0039] Then, as shown in FIG. 5E, the resonance plate 12 moves upwardly, which is caused
by the resonance of the upward motion of the piezoelectric actuator 13. Under this
circumstance, the volume of the first chamber 121 expends, which results in suction
applied to the gas in the central cavity 111. The gas in the central cavity 111 is
transferred to the first chamber 121 through the central aperture 120 of the resonance
plate 12, then transferred downwardly through the vacant spaces 135 of the piezoelectric
actuator 13, exiting from the miniature fluid control device 1A.
[0040] From the above description, please notice the gap g0 between the resonance plate
12 and the piezoelectric actuator 13 providing space for vibration of the resonance
plate 12. That is, the thickness of the gap g0 affects the amplitude of vibration
of the resonance plate 12. A difference x between the gap g0 and the vibration displacement
d of the piezoelectric actuator 13 is given by a formula: x=g0 - d. A series of tests
about the maximum output pressure of the miniature pneumatic device 1 corresponding
to different values of x are performed. In case that x≤0µm, the miniature pneumatic
device 1 generates noise. In case that x= 1∼5µm, the maximum output pressure of the
miniature pneumatic device 1 reaches 350mmHg. In case that x= 5∼10µm, the maximum
output pressure of the miniature pneumatic device 1 is 250mmHg. In case that x= 10∼15
µm, the maximum output pressure of the miniature pneumatic device 1 is 150mmHg. The
relationships between the difference x and the maximum output pressure are listed
in Table 1 below. The data shown in Table 1 are obtained when the operating voltage
is in the range between ±10V and ±20V. A pressure gradient is generated in the fluid
channels of the miniature fluid control device 1A to facilitate the gas to flow at
a high speed. Moreover, since there is an impedance difference between the feeding
direction and the exiting direction, the gas can be transmitted from the input side
to the inner space of the target equipment. Even if the inner space of the target
equipment has a certain gas pressure, the miniature fluid control device 1A still
has the capability of pushing out the gas as well as achieving the silent efficacy.
Table 1:
Test |
X |
Maximum output pressure |
1 |
x=1∼5µm |
350mmHg |
2 |
x=5∼10µm |
250mmHg |
3 |
x=10∼15µm |
150mmHg |
[0041] In some embodiments, the vibration frequency of the resonance plate 12 along the
vertical direction in the reciprocating manner is identical to the vibration frequency
of the piezoelectric actuator 13. That is, the resonance plate 12 and the piezoelectric
actuator 13 are synchronously vibrated along the upward direction or the downward
direction. It is noted that numerous modifications and alterations of the actions
of the miniature fluid control device 1A may be made while retaining the teachings
of the invention.
[0042] Please refer to FIGS. 1A, 2A, 6A and 6B. FIG. 6A schematically illustrate a gas-collecting
operation of the gas collecting plate and the miniature valve device of the miniature
pneumatic device of FIG. 1A. FIG. 6B schematically illustrate a gas-releasing operation
of the gas collecting plate and the miniature valve device of the miniature pneumatic
device of FIG. 1A. As shown in FIGS. 1A and 6A, the valve film 17 and the gas outlet
plate 18 of the miniature valve device 1B are stacked on each other sequentially.
Moreover, the miniature valve device 1B cooperates with the gas collecting plate 16
of the miniature fluid control device 1A.
[0043] In this embodiment, the gas collecting plate 16 comprises a first surface 160 and
a second surface 161 (also referred as a fiducial surface). The first surface 160
of the gas collecting plate 16 is concaved to define a gas-collecting chamber 162
which accommodates the piezoelectric actuator 13. The gas that is transferred downwardly
by the miniature fluid control device 1A is temporarily accumulated in the gas-collecting
chamber 162. The gas collecting plate 16 has a first perforation 163 and a second
perforation 164. A first end of the first perforation 163 and a first end of the second
perforation 164 are in communication with the gas-collecting chamber 162. A second
end of the first perforation 163 and a second end of the second perforation 164 are
respectively in communication with a first pressure-releasing chamber 165 and a first
outlet chamber 166, which are formed on the second surface 161 of the gas collecting
plate 16. Moreover, the gas collecting plate 16 has a raised structure 167 corresponding
to the first outlet chamber 166. For example, the raised structure 167 includes but
is not limited to a cylindrical post. The raised structure 167 is located at a level
higher than the second surface 161 of the gas collecting plate 16. Moreover, a thickness
of the raised structure 167 is in a range between 0.1mm and 0.55mm, and preferably
0.2mm.
[0044] The gas outlet plate 18 comprises a pressure-releasing perforation 181, an outlet
perforation 182, a first surface 180 (also referred as a fiducial surface) and a second
surface 187. The pressure-releasing perforation 181 and the outlet perforation 182
run through the first surface 180 and the second surface 187. The first surface 180
of the gas outlet plate 18 is concaved to define a second pressure-releasing chamber
183 and a second outlet chamber 184. The pressure-releasing perforation 181 is located
at a center of the second pressure-releasing chamber 183. Moreover, the gas outlet
plate 18 further comprises a communication channel 185 between the second pressure-releasing
chamber 183 and the second outlet chamber 184 for allowing the gas to go through.
A first end of the outlet perforation 182 is in communication with the second outlet
chamber 184. A second end of the outlet perforation 182 is in communication with an
outlet structure 19 to gain access to the inner space of the target equipment. The
outlet structure 19 is in connected with the target equipment (not shown). The equipment
is for example but not limited to a gas-pressure driving equipment.
[0045] The valve film 17 comprises a valve opening 170 and plural positioning openings 171
(see FIG. 1A). The thickness of the valve film 17 is in the range between 0.1mm and
0.3mm, and preferably 0.2mm.
[0046] After the gas collecting plate 16, the valve film 17 and the gas outlet plate 18
are combined together, the pressure-releasing perforation 181 of the gas outlet plate
18 is aligned with the first perforation 163 of the gas collecting plate 16, the second
pressure-releasing chamber 183 of the gas outlet plate 18 is aligned with the first
pressure-releasing chamber 165 of the gas collecting plate 16, and the second outlet
chamber 184 of the gas outlet plate 18 is aligned with the first outlet chamber 166
of the gas collecting plate 16. The valve film 17 is arranged between the gas collecting
plate 16 and the gas outlet plate 18 for blocking the communication between the first
pressure-releasing chamber 165 and the second pressure-releasing chamber 183. The
valve opening 170 of the valve film 17 is arranged between the second perforation
164 and the outlet perforation 182. Moreover, the valve opening 170 of the valve film
17 is aligned with the raised structure 167 corresponding to the first outlet chamber
166 of the gas collecting plate 16. Due to such arrangement of the single valve opening
170, the gas can be transferred through the miniature valve device 1B in one direction
in response to the pressure difference.
[0047] In this embodiment, the gas outlet plate 18 has the convex structure 181a beside
a first end of the pressure-releasing perforation 181. Preferably but not exclusively,
the convex structure 181a is a cylindrical post. The thickness of the convex structure
181a is in the range between 0.1mm and 0.55mm, and preferably 0.2mm. The top surface
of the convex structure 181a is located at a level higher than the first surface 180
of the gas outlet plate 18. Consequently, the pressure-releasing perforation 181 can
be quickly contacted with and closed by the valve film 17. Moreover, the convex structure
181a can provide a pre-force against the valve film 17 to achieve a good sealing effect.
[0048] In this embodiment, the gas outlet plate 18 further comprises a position-limiting
structure 188. The thickness of the position-limiting structure 188 is 0.2mm. The
position-limiting structure 188 is disposed within the second pressure-releasing chamber
183. Preferably but not exclusively, the position-limiting structure 188 is a ring-shaped
structure. While the gas-collecting operation of the miniature valve device 1B is
performed, the position-limiting structure 188 can assist in supporting the valve
film 17 and avoid collapse of the valve film 17. Consequently, the valve film 17 can
be opened or closed more quickly.
[0049] Hereinafter, the gas-collecting operation of the miniature valve device 1B will be
illustrated with reference to FIG. 6A. In case that the gas from the miniature fluid
control device 1A is being transferred downwardly to the miniature valve device 1B,
or the ambient air pressure is higher than the gas pressure of the inner space of
the target equipment which is in communication with the outlet structure 19, the gas
will be transferred from the miniature fluid control device 1A to the gas-collecting
chamber 162 of the gas collecting plate 16. Then, the gas is transferred downwardly
to the first pressure-releasing chamber 165 and the first outlet chamber 166 through
the first perforation 163 and the second perforation 164. In response to the downward
gas, the flexible valve film 17 is subjected to a downward curvy deformation. Consequently,
the volume of the first pressure-releasing chamber 165 is expanded, and the valve
film 17 is in close contact with the first end of the pressure-releasing perforation
181 corresponding to the first perforation 163. Under this circumstance, the pressure-releasing
perforation 181 of the gas outlet plate 18 is closed, and thus the gas within the
second pressure-releasing chamber 183 is not leaked out from the pressure-releasing
perforation 181. In this embodiment, the gas outlet plate 18 has the convex structure
181a beside of the first end of the pressure-releasing perforation 181. Due to the
arrangement of the convex structure 181a, the pressure-releasing perforation 181 can
be quickly closed by the valve film 17. Moreover, the convex structure 181a can provide
a pre-force to achieve a good sealing effect. The position-limiting structure 188
is arranged around the pressure-releasing perforation 181 to assist in supporting
the valve film 17 and avoid collapse of the valve film 17. On the other hand, the
gas is transferred downwardly to the first outlet chamber 166 through the second perforation
164. In response to the downward gas, the valve film 17 corresponding to the first
outlet chamber 166 is also subjected to the downward curvy deformation. Consequently,
the valve opening 170 of the valve membrane 17 is correspondingly opened to the downward
side. Under this circumstance, the gas is transferred from the first outlet chamber
166 to the second outlet chamber 184 through the valve opening 170. Then, the gas
is transferred to the outlet structure 19 through the outlet perforation 182 and then
transferred to the inner space of the target equipment which is in communication with
the outlet structure 19. Consequently, the purpose of collecting the gas pressure
is achieved.
[0050] Hereinafter, the gas-releasing operation of the miniature valve device 1B will be
illustrated with reference to FIG. 6B. For performing the gas-releasing operation,
the user may adjust the amount of the gas to be fed into the miniature fluid control
device 1A, so that the gas is no longer transferred to the gas-collecting chamber
162. Alternatively, in case that the inner pressure of the target equipment which
is in communication with the outlet structure 19 is higher than the ambient air pressure,
which means the gas pressure of the inner space of the target equipment is greater
than the gas pressure of the input side, the gas-releasing operation may be performed.
Under this circumstance, the gas is transferred from the outlet structure 19 to the
second outlet chamber 184 through the outlet perforation 182. Consequently, the volume
of the second outlet chamber 184 is expanded, and the flexible valve film 17 corresponding
to the second outlet chamber 184 is subjected to the upward curvy deformation. In
addition, the valve film 17 is in close contact with the gas collecting plate 16.
Consequently, the valve opening 170 of the valve film 17 is closed by the gas collecting
plate 16. Moreover, the gas collecting plate 16 has the raised structure 167 corresponding
to the first outlet chamber 166. Due to the arrangement of the raised structure 167,
the flexible valve film 17 can be bent upwardly more quickly. Moreover, the raised
structure 167 can provide a pre-force to achieve a good sealing effect of the valve
opening 170. Since the valve opening 170 of the valve film 17 is contacted with and
closed by the raised structure 167, the gas in the second outlet chamber 184 will
not be reversely returned to the first outlet chamber 166. Consequently, the efficacy
of avoiding gas leakage is enhanced. Moreover, since the gas in the second outlet
chamber 184 is transferred to the second pressure-releasing chamber 183 through the
communication channel 185, the volume of the second pressure-releasing chamber 183
is expanded. Consequently, the valve film 17 corresponding to the second pressure-releasing
chamber 183 is also subjected to the upward curvy deformation. Since the valve film
17 is no longer in contact with the first end of the pressure-releasing perforation
181, the pressure-releasing perforation 181 is opened. Under this circumstance, the
gas in the second pressure-releasing chamber 183 is outputted through the pressure-releasing
perforation 181. Consequently, the pressure of the gas is released. Similarly, due
to the convex structure 181a beside the pressure-releasing perforation 181 or the
position-limiting structure 188 within the second pressure-releasing chamber 183,
the flexible valve film 17 can be subjected to the upward curvy deformation more quickly.
Consequently, the pressure-releasing perforation 181 can be quickly opened. After
the gas-releasing operation in one direction is performed, the gas within the inner
space of the target equipment is partially or completely exited to the surrounding.
Under this circumstance, the gas pressure of the target equipment is reduced.
[0051] FIGS. 7A to 7E schematically illustrate the gas-collecting actions of the miniature
pneumatic device of FIG. 2A. Please refer to FIGS. 1A, 2A and 7A to 7E. As shown in
FIG. 7A, the miniature pneumatic device 1 comprises the miniature fluid control device
1A and the miniature valve device 1B. As mentioned above, the gas inlet plate 11,
the resonance plate 12, the piezoelectric actuator 13, the first insulation plate
141, the conducting plate 15, the second insulation plate 142 and the gas collecting
plate 16 of the miniature fluid control device 1A are stacked on each other sequentially.
There is a gap g0 between the resonance plate 12 and the piezoelectric actuator 13.
Moreover, the first chamber 121 is formed between the resonance plate 12 and the piezoelectric
actuator 13. The valve film 17 and the gas outlet plate 18 of the miniature valve
device 1B are stacked on each other and disposed under the gas collecting plate 16
of the miniature fluid control device 1A. The gas-collecting chamber 162 is arranged
between the gas collecting plate 16 and the piezoelectric actuator 13. The first pressure-releasing
chamber 165 and the first outlet chamber 166 are formed in the second surface 161
of the gas collecting plate 16. The second pressure-releasing chamber 183 and the
second outlet chamber 184 are concavely formed in the first surface 180 of the gas
outlet plate 18. In an embodiment, the operating voltage of the miniature pneumatic
device 1 is in the range between ±10V and ±16V. Moreover, due to the arrangements
of the plural pressure chambers, the actuation of the piezoelectric actuator 13 and
the vibration of the plate 12 and the valve film 17, the gas can be transferred downwardly.
[0052] As shown in FIG. 7B, the piezoelectric actuator 13 of the miniature fluid control
device 1A is vibrated downwardly in response to the applied voltage. Consequently,
the gas is fed into the miniature fluid control device 1A through the at least one
inlet 110 of the gas inlet plate 11 from the input side. The gas is sequentially converged
to the central cavity 111 through the at least one convergence channel 112 of the
gas inlet plate 11, transferred through the central aperture 120 of the resonance
plate 12, and introduced downwardly into the first chamber 121.
[0053] As the piezoelectric actuator 13 is actuated, the resonance of the resonance plate
12 occurs. Consequently, the resonance plate 12 is also vibrated along the vertical
direction in the reciprocating manner. As shown in FIG. 7C, the resonance plate 12
is vibrated downwardly and contacted with the bulge 130c of the suspension plate 130
of the piezoelectric actuator 13. Due to the deformation of the resonance plate 12,
the volume of the chamber corresponding to the central cavity 111 of the gas inlet
plate 11 is expanded but the volume of the first chamber 121 is shrunken. Under this
circumstance, the gas is pushed toward peripheral regions of the first chamber 121.
Consequently, the gas is transferred downwardly through the vacant spaces 135 of the
piezoelectric actuator 13. Then, the gas is transferred to the gas-collecting chamber
162 between the miniature fluid control device 1A and the miniature valve device 1B.
After that, the gas is transferred downwardly to the first pressure-releasing chamber
165 and the first outlet chamber 166 through the first perforation 163 and the second
perforation 164, which are in communication with the gas-collecting chamber 162. Consequently,
when the resonance plate 12 is vibrated along the vertical direction in the reciprocating
manner, the gap g0 between the resonance plate 12 and the piezoelectric actuator 13
is helpful to increase the amplitude of the resonance plate 12. That is, due to the
gap g0 between the resonance plate 12 and the piezoelectric actuator 13, the amplitude
of the resonance plate 12 is increased when the resonance occurs.
[0054] As shown in FIG. 7D, the resonance plate 12 of the miniature fluid control device
1A is returned to its original position, and the piezoelectric actuator 13 is vibrated
upwardly in response to the applied voltage. The difference x between the gap g0 and
the vibration displacement d of the piezoelectric actuator 13 is given by a formula:
x=g0 - d. A series of tests about the maximum output pressure of the miniature pneumatic
device 1 corresponding to different values of x are performed. The operating voltage
of the miniature pneumatic device 1 is in the range between ±10V and ±16V. In case
that x= 1∼5µm, the maximum output pressure of the miniature pneumatic device 1 is
at least 300mmHg. Consequently, the volume of the first chamber 121 is also shrunken,
and the gas is continuously pushed toward peripheral regions of the first chamber
121. Moreover, the gas is continuously transferred to the gas-collecting chamber 162,
the first pressure-releasing chamber 165 and the first outlet chamber 166 through
the vacant spaces 135 of the piezoelectric actuator 13. Consequently, the pressure
in the first pressure-releasing chamber 165 and the first outlet chamber 166 will
be gradually increased. In response to the increased gas pressure, the flexible valve
film 17 is subjected to the downward curvy deformation. Consequently, the valve film
17 corresponding to the second pressure-releasing chamber 183 is moved downwardly
and contacted with the convex structure 181a corresponding to the first end of the
pressure-releasing perforation 181. Under this circumstance, the pressure-releasing
perforation 181 of the gas outlet plate 18 is closed. In the second outlet chamber
184, the valve opening 170 of the valve film 17 corresponding to the outlet perforation
182 is opened downwardly. Then, the gas within the second outlet chamber 184 is transferred
downwardly to the outlet structure 19 through the outlet perforation 182 and then
transferred to the inner space of the target equipment which is in communication with
the outlet structure 19. Consequently, the inner space of the target equipment is
pressurized, and the purpose of collecting the gas pressure is achieved.
[0055] Then, as shown in FIG. 7E, the resonance plate 12 of the miniature fluid control
device 1A is vibrated upwardly. Under this circumstance, the gas in the central cavity
111 of the gas inlet plate 11 is transferred to the first chamber 121 through the
central aperture 120 of the resonance plate 12, and then the gas is transferred downwardly
to the gas collecting plate 16 through the vacant space 135 of the piezoelectric actuator
13. As the gas pressure is continuously increased along the downward direction, the
gas is continuously transferred to the gas-collecting chamber 162, the second perforation
164, the first outlet chamber 166, the second outlet chamber 184 and the outlet perforation
182 and then transferred to the target equipment which is in communication with the
outlet structure 19. Such pressure-collecting operation may be but not limited to
be triggered by the pressure difference between the ambient pressure of the input
side and the gas pressure of the inner space of the target equipment.
[0056] FIG. 8 schematically illustrate the gas-releasing actions or the pressure-reducing
actions of the miniature pneumatic device of FIG. 1A. In case that the inner pressure
of the target equipment is greater than the ambient air pressure of the input side,
the gas-releasing operation (or a pressure-reducing operation) may be performed. As
mentioned above, the user may adjust the amount of the gas to be fed into the miniature
fluid control device 1A, so that the gas is no longer transferred to the gas-collecting
chamber 162. Under this circumstance, the gas is transferred from the outlet structure
19 to the second outlet chamber 184 through the outlet perforation 182. Consequently,
the volume of the second outlet chamber 184 is expanded, and the flexible valve film
17 corresponding to the second outlet chamber 184 is bent upwardly. In addition, the
valve film 17 is in close contact with the raised structure 167 corresponding to the
first outlet chamber 166. Since the valve opening 170 of the valve film 17 is closed
by the raised structure 167, the gas in the second outlet chamber 184 will not be
reversely returned to the first outlet chamber 166. Moreover, the gas in the second
outlet chamber 184 is transferred to the second pressure-releasing chamber 183 through
the communication channel 185, and then the gas in the second pressure-releasing chamber
183 is transferred to the pressure-releasing perforation 181. Under this circumstance,
the gas-releasing operation is performed. After the gas-releasing operation of the
miniature valve device 1B in one direction is performed, the gas within the inner
space of the target equipment is partially or completely exited to the surrounding.
Under this circumstance, the inner pressure of the equipment is reduced.
[0057] As mentioned above, the suspension plate 130 used in the present invention is a square
suspension plate. As the length of the suspension plate 130 is reduced, the area of
the suspension plate 130 is correspondingly reduced. Since the size of the suspension
plate 130 is reduced, the rigidity of the suspension plate 130 is increased. Moreover,
since the volume of the internal gas channel is reduced, the efficacy of pushing or
compressing the gas is increased and the output pressure value is increased. Moreover,
since the deformation of the suspension plate 130 in the horizontal direction is reduced
while the suspension plate 130 is operating the vertical vibration, the piezoelectric
actuator 13 is not readily inclined in the same vertical direction during operation.
Moreover, since the collision interference between the suspension plate 13 and the
resonance plate 12 or other components can be reduced, the noise is reduced and the
defect rate is reduced. All in all, as the size of the suspension plate 130 is reduced,
the size of the piezoelectric actuator 13 can be correspondingly reduced. Under this
circumstance, the output pressure is increased, the noise is reduced, and the product
yield is enhanced. On the contrary, as the size of the suspension plate 130 is increased,
the output pressure value becomes low, and the defect rate of the miniature pneumatic
device is increased.
[0058] The suspension plate 130 and the piezoelectric ceramic plate 133 are the core components
of the miniature pneumatic device 1. As the areas of the two components are reduced,
the area and the weight of the miniature pneumatic device 1 are correspondingly reduced.
Consequently, the miniature pneumatic device 1 can be easily installed in a portable/wearable
device. Since the volume is reduced, the applications of the miniature pneumatic device
1 are expanded.
[0059] After the miniature fluid control device 1A and the miniature valve device 1B are
combined together, the total thickness of the miniature pneumatic device 1 is in the
range between 1.5mm and 4mm. Since the miniature pneumatic device is slim and portable,
the miniature pneumatic device is suitably applied to medical equipment or any other
appropriate equipment.
[0060] From the above descriptions, the present invention provides the miniature pneumatic
device. The miniature pneumatic device comprises the miniature fluid control device
and the miniature valve device. After the gas is fed into the miniature fluid control
device through the inlet, the piezoelectric actuator is actuated. Consequently, a
pressure gradient is generated in the fluid channels of the miniature fluid control
device and the gas-collecting chamber to facilitate the gas to flow to the miniature
valve device at a high speed. Moreover, due to the one-way valve film of the miniature
valve device, the gas is transferred in one direction. Consequently, the pressure
of the gas is accumulated to any equipment that is connected with the outlet structure,
which is referred as the target equipment above. For performing a gas-releasing operation
(or a pressure-reducing operation), the user may adjust the amount of the gas to be
fed into the miniature fluid control device, so that the gas is no longer transferred
to the gas-collecting chamber. Under this circumstance, the gas is transferred from
the outlet structure to the second outlet chamber of the miniature valve device, then
transferred to the second pressure-releasing chamber through the communication channel,
and finally exited from the pressure-releasing perforation. By the miniature pneumatic
device of the present invention, the gas can be quickly transferred while achieving
silent efficacy. Moreover, due to the special configurations, the miniature pneumatic
device of the present invention has small volume and small thickness. Consequently,
the miniature pneumatic device is portable and suitable to be applied to medical equipment
or any other appropriate equipment. In other words, the miniature pneumatic device
of the present invention has significant advantages that creating industrial values.
1. A miniature pneumatic device (1), comprising:
a miniature fluid control device (1A) comprising:
a gas inlet plate (11) comprising at least one inlet (110), at least one convergence
channel (112) and a central cavity (111), wherein a convergence chamber is defined
by the central cavity (111), wherein after a gas is introduced into the at least one
convergence channel (112) through the at least one inlet (110), the gas is guided
by the at least one convergence channel (112) and converged to the convergence chamber;
a resonance plate (12) having a central aperture (120) corresponding to the convergence
chamber of the gas inlet plate (11);
a piezoelectric actuator (13) comprising a suspension plate (130), an outer frame
(131) and a piezoelectric ceramic plate (133), wherein a length of the suspension
plate (130) is in a range between 2mm and 4.5mm, a width of the suspension plate (130)
is in a range between 2mm and 4.5mm, and a thickness of the suspension plate (130)
is in a range between 0.1mm and 0.3mm, wherein the outer frame (131) comprises at
least one bracket (132), and the suspension plate (130) and the outer frame (131)
are connected with each other through the at least one bracket (132), wherein the
piezoelectric ceramic plate (133) is attached on a first surface (130b) of the suspension
plate (130), a length of the piezoelectric ceramic plate (133) is equal to or less
than a length of the suspension plate (130), the length of the piezoelectric ceramic
plate (133) is in a range between 2mm and 4.5mm, a width of the piezoelectric ceramic
plate (133) is in a range between 2mm and 4.5mm, a thickness of the piezoelectric
ceramic plate (133) is in a range between 0.05mm and 0.3mm, and a length/width ratio
of the piezoelectric ceramic plate (133) is in a range between 0.44 and 2.25;
a gas collecting plate (16) comprising a first perforation (163), a second perforation
(164), a first pressure-releasing chamber (165), a first outlet chamber (166) and
a fiducial surface (161), wherein the gas collecting plate (16) further comprises
a raised structure (167) disposed in the first outlet chamber (166) and located at
a level higher than the fiducial surface (161) of the gas collecting plate (16), the
first perforation (163) is in communication with the first pressure-releasing chamber
(165), and the second perforation (164) is in communication with the first outlet
chamber (166),
wherein the gas inlet plate (11), the resonance plate (12), the piezoelectric actuator
(13) and the gas collecting plate (16) are stacked on each other sequentially, and
a gap (g0) is formed between the resonance plate (12) and the piezoelectric actuator
(13) to define a first chamber (121), wherein when the piezoelectric actuator (13)
is actuated, the gas is fed into the miniature fluid control device (1A) through the
at least one inlet (110) of the gas inlet plate (11), converged to the central cavity
(111) through the at least one convergence channel (112), transferred through the
central aperture (120) of the resonance plate (12), introduced into the first chamber
(121), transferred downwardly to the gas collecting plate (16) through a vacant space
(135) between the at least one bracket (132) of the piezoelectric actuator (13), and
exited from the miniature fluid control device (1A); and
a miniature valve device (1B) comprising:
a valve film (17) having a valve opening (170), wherein a thickness of the valve film
(17) is in a range between 0.1mm and 0.3mm, the raised structure (167) of the gas
collecting plate (16) is aligned with the valve opening (170) of the valve film (17)
and is contacted with the valve film (17) that providing a pre-force against the valve
film (17) to tightly close the valve opening (170); and
a gas outlet plate (18) comprising a pressure-releasing perforation (181), an outlet
perforation (182), a second pressure-releasing chamber (183), a second outlet chamber
(184), at least one position-limiting structure (188) and a fiducial surface (180),
wherein the second pressure-releasing chamber (183) and the second outlet chamber
(184) are concavely formed in the fiducial surface (180) of the gas outlet plate (18),
the pressure-releasing perforation (181) is located at a center of the second pressure-releasing
chamber (183), a convex structure (181a) is located beside an end of the pressure-releasing
perforation (181), the convex structure (181a) is located at a level higher than the
fiducial surface (180) of the gas outlet plate (18), the outlet perforation (182)
is in communication with the second outlet chamber (184), the at least one position-limiting
structure (188) is disposed within the second pressure-releasing chamber (183), a
thickness of the position-limiting structure (188) is in a range between 0.1mm and
0.5mm, and the gas outlet plate (18) further comprises a communication channel (185)
between the second pressure-releasing chamber (183) and the second outlet chamber
(184),
wherein the valve film (17) and the gas outlet plate (18) are sequentially disposed
on the gas collecting plate (16), the pressure-releasing perforation (181) of the
gas outlet plate (18) is aligned with the first perforation (163) of the gas collecting
plate (16), the second pressure-releasing chamber (183) of the gas outlet plate (18)
is aligned with the first pressure-releasing chamber (165) of the gas collecting plate
(16), and the second outlet chamber (184) of the gas outlet plate (18) is aligned
with the first outlet chamber (166) of the gas collecting plate (16), wherein the
valve film (17) is arranged between the gas collecting plate (16) and the gas outlet
plate (18) for blocking communication between the first pressure-releasing chamber
(165) and the second pressure-releasing chamber (183), and the valve opening (170)
of the valve film (17) is arranged between the second perforation (164) and the outlet
perforation (182), wherein after the gas is downwardly transferred from the miniature
fluid control device (1A) to the miniature valve device (1B), the gas is introduced
into the first pressure-releasing chamber (165) through the first perforation (163)
and is introduced into the first outlet chamber (166) through the second perforation
(164), while the valve film (17) is quickly contacted with the convex structure (181a)
of the gas outlet plate (18) to provide a pre-force to tightly close the pressure-releasing
perforation (181), and the gas within the first outlet chamber (166) is further transferred
to the outlet perforation (182) of the miniature valve device (1B) through the valve
opening (170) of the valve film (17) and is discharged to an inner space of a target
equipment, so that a pressure-collecting operation is performed, wherein while a pressure-releasing
operation is performed, the gas in the inner space of the target equipment is transferred
from the outlet perforation (182) to the second outlet chamber (184) to move the valve
film (17) so that the valve opening (170) thereof is contacted with and closed by
the gas collecting plate (16), the at least one position-limiting structure (188)
assists in supporting the valve film (17) to avoid collapse thereof, the gas is transferred
from the second outlet chamber (184) to the second pressure-releasing chamber (183)
through the communication channel (185), a part of the valve film (17) corresponding
to the second pressure-releasing chamber (183) is moved such that the gas is exited
from the pressure-releasing perforation (181) to release the pressure of the inner
space of the target equipment.
2. The miniature pneumatic device (1) according to claim 1, wherein an operating voltage
of the miniature pneumatic device (1) is ±15V, and when the miniature pneumatic device
(1) is operated at the operating voltage, an output pressure of the miniature pneumatic
device (1) is at least 300mmHg.
3. The miniature pneumatic device (1) according to claim 1 or 2, wherein the length of
the piezoelectric ceramic plate (133) is in a range between 2.5mm and 3.5mm, the width
of the piezoelectric ceramic plate (133) is in a range between 2.5mm and 3.5mm, and
the thickness of the piezoelectric ceramic plate (133) is 0.1mm.
4. The miniature pneumatic device (1) according to one of the preceding claims, wherein
the length of the suspension plate (130) is in a range between 2.5mm and 3.5mm, the
width of the suspension plate (130) is in a range between 2.5mm and 3.5mm, and the
thickness of the suspension plate (130) is 0.2mm.
5. The miniature pneumatic device (1) according to one of the preceding claims, wherein
the thickness of the position-limiting structure (188) of the miniature valve device
(1B) is 0.2mm.
6. A miniature pneumatic device (1), comprising:
a miniature fluid control device (1A) comprising:
a gas inlet plate (11);
a resonance plate (12);
a piezoelectric actuator (13) comprising a suspension plate (130), wherein a length
of the suspension plate (130) is in a range between 2mm and 4.5mm, a width of the
suspension plate (130) is in a range between 2mm and 4.5mm, and a thickness of the
suspension plate (130) is in a range between 0.1mm and 0.3mm; and
a gas collecting plate (16) comprising a first perforation (163), a second perforation
(164), a first pressure-releasing chamber (165) and a first outlet chamber (166),
wherein the gas inlet plate (11), the resonance plate (12), the piezoelectric actuator
(13) and the gas collecting plate (16) are stacked on each other sequentially, and
a gap (g0) is formed between the resonance plate (12) and the piezoelectric actuator
(13) to define a first chamber (121), and a gas-collecting chamber (162) is formed
between the piezoelectric actuator (13) and the gas collecting plate (16), wherein
when the piezoelectric actuator (13) is actuated, a gas is fed into the miniature
fluid control device (1A) through the gas inlet plate (11), transferred through the
resonance plate (12), introduced into the first chamber (121), and transferred downwardly
to the gas-collecting chamber (162); and
a miniature valve device (1B) comprising:
a valve film (17) having a valve opening (170); and
a gas outlet plate (18) comprising a pressure-releasing perforation (181), an outlet
perforation (182), a second pressure-releasing chamber (183) and a second outlet chamber
(184),
wherein the valve film (17) and the gas outlet plate (18) are sequentially disposed
on the gas collecting plate (16) of the miniature fluid control device (1A), wherein
after the gas is downwardly transferred from the gas-collecting chamber (162) to the
miniature valve device (1B), the gas is transferred through the first perforation
(163), the second perforation (164), the first pressure-releasing chamber (165), the
first outlet chamber (166), the second pressure-releasing chamber (183), the second
outlet chamber (184), the pressure-releasing perforation (181) and the outlet perforation
(182), wherein the gas is transferred in one direction, and the valve opening (170)
of the valve film (17) is correspondingly opened or closed, so that a pressure-collecting
operation or a pressure-releasing operation is selectively performed.
7. The miniature pneumatic device (1) according to claim 6, wherein the gas inlet plate
(11) comprises at least one inlet (110), at least one convergence channel (112) and
a central cavity (111), wherein after the gas is introduced into the at least one
convergence channel (112) through the at least one inlet (110), the gas is guided
by the at least one convergence channel (112) and converged to the central cavity
(111), wherein the resonance plate (12) has a central aperture (120) corresponding
to the central cavity (111) of the gas inlet plate (11), and the piezoelectric actuator
(13) further comprises an outer frame (131), wherein the outer frame (131) and the
suspension plate (130) are connected with each other through at least one bracket
(132), and a piezoelectric ceramic plate (133) is attached on a first surface (130b)
of the suspension plate (130).
8. The miniature pneumatic device (1) according to claim 6 or 7, wherein the first perforation
(163) is in communication with the first pressure-releasing chamber (165), and the
second perforation (164) is in communication with the first outlet chamber (166).
9. The miniature pneumatic device according to one of the claims 6-8, wherein the gas
outlet plate (18) further comprises a communication channel (185) between the second
pressure-releasing chamber (183) and the second outlet chamber (184).
10. The miniature pneumatic device (1) according to claim 9, wherein the valve film (17)
is arranged between the gas collecting plate (16) and the gas outlet plate (18) for
blocking communication between the first pressure-releasing chamber (165) and the
second pressure-releasing chamber (183), and the valve opening (170) of the valve
film (17) is arranged between the second perforation (164) and the outlet perforation
(182), wherein after the gas is downwardly transferred from the miniature fluid control
device (1A) to the miniature valve device (1B), the gas is introduced into the first
pressure-releasing chamber (165) and the first outlet chamber (166) through the first
perforation (163) and the second perforation (164), and the gas within the first outlet
chamber (166) is further transferred to the outlet perforation (182) through the valve
opening (170) of the valve film (17) and is discharged to an inner space of a target
equipment where is consequently pressurized, wherein while a pressure-releasing operation
is performed, the gas is transferred from the outlet perforation (182) to the second
outlet chamber (184) to move the valve film (17) so that the valve opening (170) of
the valve film (17) is contacted with and closed by the gas collecting plate (16),
the gas is transferred from the second outlet chamber (184) to the second pressure-releasing
chamber (183) through the communication channel (185), a part of the valve film (17)
corresponding to the second pressure-releasing chamber (183) is moved, and the gas
is exited from the pressure-releasing perforation (181) to release the pressure of
the inner space of the target equipment.
11. The miniature pneumatic device (1) according to one of the claims 7-10, wherein a
length of the piezoelectric ceramic plate (133) is equal to or less than a length
of the suspension plate (130), the length of the piezoelectric ceramic plate (133)
is in a range between 2mm and 4.5mm, a width of the piezoelectric ceramic plate (133)
is in a range between 2mm and 4.5mm, a thickness of the piezoelectric ceramic plate
(133) is in a range between 0.05mm and 0.3mm, and a length/width ratio of the piezoelectric
ceramic plate (133) is in a range between 0.44 and 2.25.
12. The miniature pneumatic device (1) according to one of the claims 6-11, wherein a
length of the suspension plate (130) is in a range between 2.5mm and 3.5mm, a width
of the suspension plate (130) is in a range between 2.5mm and 3.5mm, and a thickness
of the suspension plate (130) is 0.2mm.
13. A miniature pneumatic device (1), comprising:
a miniature fluid control device (1A) comprising a gas inlet plate (11), a resonance
plate (12), a piezoelectric actuator (13) and a gas collecting plat (16), wherein
the gas inlet plate (11), the resonance plate (12), the piezoelectric actuator (13)
and the gas collecting plate (16) are stacked on each other sequentially, and a gap
(g0) is formed between the resonance plate (12) and the piezoelectric actuator (13)
to define a first chamber (121), wherein when the piezoelectric actuator (13) is actuated,
a gas is fed into the miniature fluid control device (1A) through the gas inlet plate
(11), transferred through the resonance plate (12), introduced into the first chamber
(121), and exited from the miniature fluid control device (1A), wherein the piezoelectric
actuator (13) comprises a suspension plate (130), a length of the suspension plate
(130) is in a range between 2mm and 4.5mm, and a width of the suspension plate (130)
is in a range between 2mm and 4.5mm; and
a miniature valve device (1B) comprising a valve film (17) and a gas outlet plate
(18), wherein the valve film (17) has a valve opening (170), and the gas collecting
plate (18), the valve film (17) and the gas outlet plate (18) are combined together,
wherein after the gas is transferred from the miniature fluid control device (1A)
to the miniature valve device (1B), a pressure-collecting operation or a pressure-releasing
operation is selectively performed.
14. The miniature pneumatic device (1) according to claim 13, wherein a gas-collecting
chamber (162) is formed between the piezoelectric actuator (13) and the gas collecting
plate (16), and the gas is exited from the miniature fluid control device (1A) to
the miniature valve device (1B) through the gas-collecting chamber (162).
15. The miniature pneumatic device (1) according to claim 13 or 14, wherein each of the
gas collecting plate (16) and the gas outlet plate (18) comprises at least two perforations
(163, 164, 181, 182) and at least two chambers (165, 166, 183, 184) in which the gas
is transferred in one direction and the valve opening (170) of the valve film (17)
is correspondingly opened or closed.