DEVICE MANUFACTURE INVOLVING PATTERN DELINEATION IN THIN LAYERS - Patent 0035529

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EP 0 035 529 A1

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(43)	Date of publication:
	16.09.1981 Bulletin 1981/37

(21)	Application number: 80901737.0

(22)	Date of filing: 28.07.1980

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International Patent Classification (IPC):

H01L 21/ 306^{( . )}
G01R 31/ 302^{( . )}
H01L 21/ 311^{( . )}

G01N 17/ 02^{( . )}
G03F 7/ 30^{( . )}
H01L 21/ 66^{( . )}

(86)	International application number:
	PCT/US1980/000934

(87)	International publication number:
	WO 1981/000646 (05.03.1981 Gazette 1981/06)

(84)	Designated Contracting States:
	DE FR GB

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Priority:

30.08.1979 US 19790071408

(71)	Applicant: Western Electric Company, Incorporated
	New York, N.Y. 10038 (US)

(72)	Inventor:
	McGILLIS, Daniel Albert Northampton, PA 18067 (US)

(74)	Representative: Watts, Christopher Malcolm Kelway, Dr., et al
	AT&T (UK) Ltd. 5, Mornington Road Woodford Green Essex, IG8 0TU Woodford Green Essex, IG8 0TU (GB)

(54)	DEVICE MANUFACTURE INVOLVING PATTERN DELINEATION IN THIN LAYERS