(19)

(11)

EP 0 051 598 A1

(12)

(43) Date of publication: 19.05.1982 Bulletin 1982/20 (21) Application number: 81900532.0 (22) Date of filing: 08.05.1980

(51) International Patent Classification (IPC):  H01L 21/ 027( . ) (86) International application number: PCT/US1980/000544 (87) International publication number: WO 1981/003240 (12.11.1981 Gazette 1981/27)

(84) Designated Contracting States: DE FR GB NL (71) Applicant: ROCKWELL INTERNATIONAL CORPORATION El Segundo California 90245 (US)	(72) Inventors: SPLINTER, Michael R. Silverado Canyon, CA 92676 (US) MADDOX, Patrica D. Westminster, CA 92683 (US)