(19)

(11)

EP 0 067 987 A1

(12)

(43) Date of publication: 05.01.1983 Bulletin 1983/01 (21) Application number: 81900255.0 (22) Date of filing: 23.12.1980

(51) International Patent Classification (IPC):  F16C 29/ 02( . ) F16J 15/ 00( . ) H01J 37/ 18( . ) F16C 32/ 06( . ) F16J 15/ 40( . ) H01L 21/ 30( . ) (86) International application number: PCT/US1980/001718 (87) International publication number: WO 1982/002235 (08.07.1982 Gazette 1982/17)

(84) Designated Contracting States: DE FR GB (30) Priority: 26.12.1979 US 19790107207 (71) Applicant: VARIAN ASSOCIATES, INC. Palo Alto, CA 94303 (US)	(74) Representative: Cline, Roger Ledlie, et al  STANLEY, POPPLEWELL, POOLE 57 Lincoln's Inn Fields London WC2A 3LS London WC2A 3LS (GB)