<?xml version="1.0" encoding="UTF-8"?><!DOCTYPE ep-patent-document PUBLIC "-//EPO//EP PATENT DOCUMENT 1.4//EN" "ep-patent-document-v1-4.dtd"><ep-patent-document id="EP0067987A1" file="EP81900255NWA1.xml" lang="en" doc-number="0067987" date-publ="19830105" kind="A1" country="EP" status="n" dtd-version="ep-patent-document-v1-4"><SDOBI lang="en"><B000><eptags><B001EP>......DE....FRGB....................................................................................</B001EP><B003EP>*</B003EP><B007EP>EPregister to ST.36 EBD process v 1.0 kbaumeister@epo.org (15 Jan 2013)</B007EP><B009EP><text>Der Erfinder hat auf seine Nennung verzichtet</text><text>The inventor has agreed to waive his entitlement of designation</text><text>L'inventeur a renoncé à sa désignation</text></B009EP></eptags></B000><B100><B110>0067987</B110><B130>A1</B130><B140><date>19830105</date></B140><B190>EP</B190></B100><B200><B210>81900255.0</B210><B220><date>19801223</date></B220><B240><B241><date>19820927</date></B241></B240><B250>en</B250><B251EP>en</B251EP><B260>en</B260></B200><B300><B310>19790107207</B310><B320><date>19791226</date></B320><B330><ctry>US</ctry></B330></B300><B400><B405><date>19830105</date><bnum>198301</bnum></B405><B430><date>19830105</date><bnum>198301</bnum></B430></B400><B500><B510EP><classification-ipcr sequence="1"><text>F16C  29/    02            A I                    </text></classification-ipcr><classification-ipcr sequence="2"><text>F16C  32/    06            A I                    </text></classification-ipcr><classification-ipcr sequence="3"><text>F16J  15/    00            A I                    </text></classification-ipcr><classification-ipcr sequence="4"><text>F16J  15/    40            A I                    </text></classification-ipcr><classification-ipcr sequence="5"><text>H01J  37/    18            A I                    </text></classification-ipcr><classification-ipcr sequence="6"><text>H01L  21/    30            A I                    </text></classification-ipcr></B510EP><B540><B541>en</B541><B542>PLANAR VACUUM SEAL FOR ISOLATING AN AIR BEARING</B542><B541>fr</B541><B542>JOINT D'ETANCHEITE PLAT SOUS VIDE POUR L'ISOLATION D'UN PALIER PNEUMATIQUE</B542><B541>de</B541><B542>FLACHE LUFTLEERE DICHTUNG ZUR ISOLIERUNG EINES LUFTKISSENS</B542></B540></B500><B700><B710><B711><snm>VARIAN ASSOCIATES, INC.</snm><adr><str>611 Hansen Way</str><city>Palo Alto, CA 94303</city><ctry>US</ctry></adr></B711></B710><B740><B741><snm>Cline, Roger Ledlie, et al</snm><adr><str>STANLEY, POPPLEWELL, POOLE 57 Lincoln's Inn Fields</str><city>London WC2A 3LS</city><ctry>GB</ctry></adr></B741></B740></B700><B800><B840><ctry>DE</ctry><ctry>FR</ctry><ctry>GB</ctry></B840><B860><B861><dnum><anum>US1980001718</anum></dnum><date>19801223</date></B861><B862>en</B862></B860><B870><B871><dnum><pnum>WO1982002235</pnum></dnum><date>19820708</date><bnum>198217</bnum></B871></B870></B800></SDOBI></ep-patent-document>