(19)

(11)

EP 0 069 728 A1

(12)

(43) Date of publication: 19.01.1983 Bulletin 1983/03 (21) Application number: 81901109.0 (22) Date of filing: 10.04.1981

(51) International Patent Classification (IPC):  G03F 7/ 20( . ) H01J 37/ 30( . ) (86) International application number: PCT/US1981/000488 (87) International publication number: WO 1982/002623 (05.08.1982 Gazette 1982/19)

(84) Designated Contracting States: AT CH DE FR GB LI LU NL SE (30) Priority: 23.01.1981 US 19810227620 (71) Applicant: VEECO INSTRUMENTS INC. Melville, NY 11747 (US)	(72) Inventors: WESTERBERG, Eugene R. Palo Alto, CA 94303 (US) BRODIE, Ivor Palo Alto, CA 94306 (US) (74) Representative: Sorrell, Terence Gordon  Sorrell & Son Otham Maidstone Kent ME15 8RR Maidstone Kent ME15 8RR (GB)