(19)

(11)

EP 0 070 859 A1

(12)

(43) Date of publication: 09.02.1983 Bulletin 1983/06 (21) Application number: 82900426.0 (22) Date of filing: 14.12.1981

(51) International Patent Classification (IPC):  H01L 21/ 58( . ) H01L 23/ 31( . ) H01L 23/ 051( . ) (86) International application number: PCT/US1981/001657 (87) International publication number: WO 1982/002797 (19.08.1982 Gazette 1982/20)

(84) Designated Contracting States: DE FR GB SE (30) Priority: 30.01.1981 US 19810229695 (71) Applicant: MOTOROLA, INC. Schaumburg, IL 60196 (US)	(72) Inventor: ELLSWORTH, Kenneth A. Gilbert, AZ 85234 (US) (74) Representative: Ibbotson, Harold  Motorola European Intellectual Property Midpoint Alencon Link Basingstoke Hampshire RG21 1PL Basingstoke Hampshire RG21 1PL (GB)