Title of the Invention
[0001] Spindle tilting control device for plane and' spherical rotary grinding machine,
fine gliding machine, lapping machine and polishing machine. _ _
Field of the Art
[0002] According to the advance of electronics, the development of semiconductors has remarkably
progressed. It has been necessary to gradually miniaturize computers, microcomputers
and office computers by the shift from miniaturization and precision to microminiaturization
and super precision, namely the shift from transitors to ICs, ICs to LSIs and LSIs
to super LSIs. Super precise machines have been required for producing these microminiature
electronic part components.
[0003] This invention is to provide a spindle tilting control device for a plane and spherical
rotary grinding machine, fine gliding machine, lapping machine and polishing machine,
which device can machine these semiconductor materials such as silicon, magnetic materials
such as ferrite and Sendust, ceramics and hard metals or the like, to a super precise
planeness or sphericity.
Background of the Art
[0004] These processing had been chiefly done by hands and depended on the skilled in the
art. After a flat lapping machine was invented in the United States in 1919, several
kinds of grinding machines, lapping machines and polishing machines have subsequently
appeared, and the processing is now being in rapid progress of the mechanization.
Disclosure of the Invention
[0005] A device of this invention is to provide improved models of a conventional plane
and spherical rotary grinding machine, fine gliding machine, lapping machine and polishing
machine and is developed in order to achieve a super precise plane and an extreme
machining precision by freely tilting its spindle in four quarter directions.
Brief Description of the Drawings
[0006] The drawings show an embodiment according to this invention.
[0007] Fig. 1 is a right side view of a spindle tilting control device of this invention,
[0008] Fig. 2 is a front view of the spindle tilting control device of this invention.
[0009] In these drawings, numeral 1 represents a rotary table, numeral 2 represents a grindstone
or surface plate, numeral 3 represents a spindle head, numeral 4 and 5 represent clamp
bolts, numeral 6 represents a motor and numeral 7 represents a joint for tilting a
spindle.
Best Form for Working the Invention
[0010] The actions and effects of the device according to this invention will be explained
with reference to these drawings, as follows.
[0011] Numeral 1 represents a rotary table for retaining a work magnetically or by vacuum
and revolving the work, numeral 2 represents a grindstone or a lapping or polishing
surface plate for grinding, lapping or polishing the work, numeral 3 represents a
spindle head for revolving the grindstone or surface plate 2, numerals 4 and 5 represent
clamp bolts for clamping on tilting the spindle head in one of four quarter directions
or on setting the spindle completely perpendicular to the rotary table and numeral
6 represents a motor for driving a spindle head 3.
[0012] The device according to this invention is thus composed and can be used for a spherical
grinding machine as the angle between the rotary table and a spindle shaft can be
adjusted within a degree of a by tilting the spindle head 3 in one of four quarter
directions with use of a joint 7 provided for tilting the spindle as illustrated in
a detailed drawing in Fig. 1 differring from those in the conventional plane, spherical
and rotary grinding machines, and also can achieve a complete planeness or sphericity
of the work as the plane of the grindstone or the lapping or polishing surface plate
and the plane of the rotary table can be kept completely in parallel to each other
by setting the spindle completely perpendicular to the rotary table l.
Applicability in Industry
[0013] The device according to this invention will be required to be improved with a growing
necessity for higher-grade machine tools for producing further extremely precise microminiature
electronic part components, and the development for such improved machines is an urgent
necessity.
A spindle tilting control device for a plane and spherical rotary grinding machine,
fine gliding machine, lapping machine and polishing machine, which device can perpendicularly
secure a spindle with respect to a rotary table by clamp bolts and can machine a spherical
surface by tilting the spindle employing a - - spindle tilting joint with use of electric
and chemical methods.
