[0001] This invention relates to a fluid permeable, fibrous electric heating element for
example for a heat transfer system and to said system, and to a process for manufacturing
the heating element.
[0002] The invention in a first aspect provides a process for manufacturing a fluid permeable,
fibrous electric heating element, the process comprising forming a permeable fibrous
precursor, coating fibres of the precursor with a material so as to form tubular fibres
comprising the material, and heating the coated precursor so as to modify the structure
of the material to provide a desired electrical resistivity of the tubular fibres.
[0003] The precursor may be removed after coating thereof. Alternatively, the precursor
might be retained within the tubular fibres, and might have an electrical resistivity
either greater than or not exceeding that of the tubular fibres.
[0004] In a second aspect, the invention includes a fluid permeable fibrous electric heating
element made by the process of the first aspect of the invention, and might comprise
tubular fibres comprising a silicon containing material for example, silicon, silicon
carbide, or silicon nitride, or silicon and carbon together with silicon carbide,
or silicon together with silicon carbide, or silicon together with silicon nitride.
[0005] Desirably, the coating is produced by thadecomposition of a coating gas, and the
coating gas might include a dopant for modifying the electrical resistivity of the
coating.
[0006] The heating element of the second aspect of the invention may be used for example
in a heat transfer system comprising a circuit. adapted to contain a fluid, a heating
element of the invention extending in a part of the circuit, and a heat transfer surface
portion of the circuit for transferring heat from the fluid through the surface portion.
The heat transfer surface portion may comprise a portion of a device for heating a
material such for example as, a plastics material, a metal, paper, a textile, or a
chemical substance.
[0007] Examples of porous electric heating elements are described in British Patent Specification
Nos 1466240 (United States Patent No 3943330), 1503644, and 1600253 (United States
Patent No 4257157), these Specifications and Patents being incorporated by reference
herein.
[0008] It is frequently necessary to heat a fluid, either a gas or a liquid, electrically
and to utilise a closed loop fluid circulating system to transfer this heat to other
fluids or plant in a heat exchange system. A particular example is the use of a heated
liquid (e.g. oil or water) for the purpose of controlling the temperature of moulds,
dies, extruders and calenders used in the plastics industry. In existing designs of
such temperature control units immersion electric elements of the metal sheathed type
have been used, the heat generated in these elements being transferred by conduction
through the metal sheath wall to the surrounding liquid which flows past the element.
There is a limit to the heat transfer coefficient which can be used with this type
of element if oil breakdown or element burnout is to be avoided, e.g. 1-20 watts cm
2 of the element surface area. This factor exerts a consequent effect on the metal
sheath size, and the size and weight of the heating system especially at tigh power
ratings.
[0009] Furthermore, the response of such units to a requirement for a change in the rate
of heat transfer to the fluid is comparatively slow due to the appreciable heat capacity
of the heating element itself, to the need to limit the element centre temperature
to avoid melting the electrical conductor, and to the need to avoid high surface temperatures
of the element sheath. This slow response can have a controlling influence on production
cycle times when such temperature control units are used to heat moulds and dies in
a production run of identical components.
[0010] The invention largely overcomes these limitations by removing the sheathed metal
element and replacing it with a fluid permeable fibrous electric heating element,
and circulating the fluid through the body of the permeable heating element instead
of over the external surface only. Power densitities exceeding 1 kW/cm
3 of heating element material can then be attained, and this leads not only to a reduction
in size and weight of a heating unit for a given duty but also a decrease in the response
time such that the system can react virtually instantaneously to a demand for a large
step increase in the heat generated and transferred to the circulating fluid.
[0011] A suitable permeable heating element might comprise silicon, silicon carbide, or
a mixture of silicon and silicon carbide, or silicon, carbon and silicon carbide,
of a voidage of 50-98% and a bulk density of 50-750 kg/m
3. The individual heating elements might consist of a matrix of fine or tubular fibres
of a diameter.in the range 5-300 microns and wall thicknesses in the range 1-30 microns,
a preferred range being 4-20 microns, and the space between the fibres providing the
voidage. A thermal barrier/dispenser may be used in conjunction with the heating element
to produce a uniform fluid flow (See U.K. Patent No 1 466 240), especially where there
is a hydrostatic pressure head variation over the heating element entry surface.
[0012] It may be desirable to maintain a heat generation rate and a fluid flow rate through
the voidage in the heating element which restricts the fluid temperature rise across
the heating element to not more than about 50°C, but this is not essential and temperature
rises of 2-300°C or more are possible with a heating element wall thickness of 2-15
mm for an annular heating element. The heating element may have a predetermined electrical
resistivity at a particular temperature, and a particular temperature coefficient
of resistance, and may be suitable for mains voltage operation without the need for
a transformer.
[0013] The system components include a circulating pump, a heating element assembly, valves
and pipework with the oil passing in series through the element and the mould, die,
extruder, or calender to be heated together with a control system. 'Such units have
been devised and operated at heating element power ratings in the range 1 - 30 kW
for the aforementioned heating element geometry and with a response time of a few
seconds. Very compact units can be designed and for the high power units, the small
size which is attainable by the use of a high heating element power density rating
reduces the cost of construction considerably compared with conventional heat transfer
systems.
[0014] The invention will now be further described by way of example only with reference
to the accompanying drawings in which:-
Figure 1 shows a schematic representation of a heat transfer system for heating a
mould;
Figure 2 shows to an enlarged scale a perspective representation of the mould usec4.
in the system of Figure 1;
Figure 3 shows in medial section and to an enlarged scale, a side view of an electric
heating unit for use in the system of the invention;
Figure 4 shows in medial section and to an enlarged scale, a side view of an alternative
electric heating unit;
Figure 4a shows a fragmentary sectional view on the line IVa-IVa of Figure 4;
Figure 5 shows graphical representations of temperature against time for the unit
of Figure 4; and
Figure 6 shows a diagrammatic representation of a plasma activated vapour deposition
apparatus.
[0015] Referring now to Figure 1, the heat transfer system essentially comprises a mould
10 (e.g. an injection mould) connected by piping 11 to a cooling unit 13 and to a
permeable element electric heating unit 14. A heat transfer oil in the piping 11,
such as British Petroleum (BP) Transcal N,is arranged to be circulated around the
system by a pump 15. An inlet thermocouple 20 and an outlet thermocouple 21 are located
about the mould 10 to sense the temperature of the oil in the piping 11, and a mould
temperature controller 23 senses the temperature of the mould 10 and controls the
operation of the cooling unit 13 and the heating unit 14 to 'maintain the mould 10
at a desired temperature. A by-pass limb 25 having a relief valve 26 is connected
to the piping 11 in parallel with the mould 10.
[0016] The mould 10 as shown in greater detail in Figure 2 to which reference is made, is
in two half-portions 10a and 10b respectively and has oil ducts 18 in series with
the piping 11 for the circulation of the oil through the mould 10, and a connecting
pipe lla which may be flexible to facilitate separation and closure of the two half-portions
10a, lOb, for connecting the oil ducts 18 between the half-portions 10a, lOb,
[0017] Referring now to Figure 3, the permeable element electric heating unit 14 is generally
of circular form in transverse section, and comprises a fluid permeable fibrous heating
element 30 of hollow cylindrical form, for example 120 mm long, and having gold plated
copper electrodes 31 and 32 at the upper and at the lower ends of the heating element
30 respectively. The lower electrode 32 is joined to a brass end cap 34 that is joined
to a steel tube 33 brazed to a copper rod 35 which is connected by a clamp-type terminal
36 to an electric supply (not shown). Two metal cooling discs 38 are disposed about
the rod 35 and are held by a "Starlock" retaining washer 40 located above the uppermost
cooling disc 38, three Schnorr washers 41 between the cooling discs 38 maintaining
a compressive force on a pad 42 which is arranged to bear on a shouldered collar 43
of an electrical insulating material. A shouldered insert 45 of an electrical insulating
material such as polyamide Tufnol locates in a recess 46 in a housing 37 and supports
an 'O' ring seal 48 disposed around the rod 35, a flat annular upper spacer 49 of
the same material as that of the shouldered insert 45 being urged against the 'O'
ring seal 48 by the shouldered collar 43.
[0018] The housing 37 which is joined to the upper electrode 31 has an inner chamber 52
connected to the piping 11 and inlet ports 53 (only two are shown) connecting the
inner chamber 52 to a space 54 between the inside surface of the heating element 30
and the outside surface of the tube 33, the tube 33 having an upper-port 55 and a
lower port 56 connecting the bore of the tube 33 with the space 54 and acts as a thermal
dispenser.
[0019] The housing 37 has a tube portion 58 with an external flange 59 which is clamped
to an external flange 62 of a tubular inner casing 63 in which the heating element
30 is disposed, an 'O' ring seal 65 being provided in an annular recess 66 and an
earth terminal 60 attached to the flange 62.
[0020] A thermal insulant such as Kaowool is arranged as a lagging 70 between the inner
casing 63 and an outer casing 71, the piping 11 extending through the lower portion
of the outer casing 71 and the lagging 70 to the lower end of the inner casing 63,
and an air bleed pipe 73 extending through the upper portion of the outer casing 71
and the lagging 70 to the inner casing 63.
[0021] In use of the mould 10 for the forming of plastics articles (not shown), the mould
10 is held at a desired operating temperature by the oil circulated through the mould
10 by the pump 15. The temperature controller 23 senses the temperature of the mould
10 and adjusts as appropriate either the rate of flow of a coolant (e.g. water) through
the cooling unit 13 or the flow of the current to the porous electric heating unit
14 so as to control the temperature of the oil and thus maintain the mould 10 at the
required operating temperature. The oil temperature thermocouples 20, 21 provide an
additional monitoring capacity and can actuate the heating unit 14 at some predetermined
oil temperature or temperature difference of the oil across the mould 10.
[0022] In an alternative arrangement, the oil may flow through the heating unit 14 in the
reverse direction to that shown.
[0023] A shorter heating element 30 may be used in the heating unit 14, to overcome the
problem of non-uniform flow which arises with long heating elements 30 as a result
of hydrostatic pressure differences along the heating element 30, and to increase
the fluid velocity through the heating element 30 so that a high power generation
density may be employed. An example of such a compact heating element is shown in
Figure 4 in which an electric heating unit 14a incorporates a fluid permeable fibrous
heating element 80 of hollow cylindrical form and typically about 45 mm outside diameter,
35 mm inside diameter, and 10 mm long. Gold plated annular copper electrodes 81 and
82 are disposed at respective ends of the heating element 80, and each electrode 81,
82 is supported on a boss 83, 84 from a respective stainless steel annular backing
disc 85 or 86. The backing disc 85 is supported on a .boss 87 from an annular electrical
insulator 88 of polyamide TUFNOL, and the backing disc 86 is similarly supported on
a boss 89 from an annular insulator 90 of polyamide TUFNOL. Thin gaskets (not shown)
of a deformable material such as graphite, copper or aluminium may be provided between
the ends of the element 80 and the electrodes 81 and 82.
[0024] A stainless steel dispenser rod 96 extends through and supports the insulators 88,
90, and has a circular flange 97. The insulator 90 is held against one side of the
flange 97 by the action of a compression spring 98 which at one end thereof fits over
a boss 110 from a cap 99. The boss 110 locates around one end of the dispenser rod
96, and the cap 99 is secured to the dispenser rod 96 by a screw 111. The other end
of the spring 98 butts against the insulator 88 to press the insulators 88, 90, the
electrodes 81, 82, and the insulator 90 tightly together. An axial hole 112 extends
in the dispenser rod 96 from two axially spaced sets of four (only three are shown)
equi-spaced radially extending outlet holes 113, 114, respectively, the axial hole
112 extending in a direction towards the other end of the dispenser rod 96.
[0025] The dispenser rod 96 at the other side of the flange 97 is screw threaded at 115,
and locates inside a correspondingly threaded hole 116 in a hollow cylindrical bush
117 of polyamide TUFNOL to butt against a shoulder 119, and is held firmly in the
threaded hole 116 by a stainless steel lock nut 121. The bush 117 is threaded on its
outside surface to locate inside a correspondingly threaded hole 123 extending from
one side of a stainless steel mounting member 125 and butts against a shoulder 126,
the bush 117 being firmly held thereto by a stainless steel lock nut 128. A relatively
small diameter cylindrical hole 130 at the axial centre of the shoulder 119 and the
mounting member 125 leads to a threaded hole 132 at the other side of the mounting
member 125 in which a compression-type pipe coupling 134 locates to connect the piping
11 to the mounting member 125. The mounting member 125 is integral with a circular
flange 137 which is held by several bolts 138 (only two are shown) to an annular flange
140 of a hollow cylindrical casing 142, an annular soft copper gasket 144 providing
a seal between the flanges 137, 140. Two electrode assemblies 146, 147 respectively
locate in respective holes 148, 149 in the flange 137, and are welded to the flange
137 to provide a pressure tight joint. Each electrode assembly 146, 147 provides a
pressure tight, electric feedthrough from respective electric supply cables 150, 151
to respective copper braid electrical connections 152, 153 each terminating at a respective
copper terminal member 155, 156 secured as shown in Figure 4a to a shoulder 157 of
the respective electrode 81 or 82. Suitable such electrode assemblies 146, 147 may
be obtained for example from VG Electronics Limited, Hastings, Sussex, England, or
Ferranti Limited, Hollinwood, Lancashire, England, or Friedrichsfeld GmbH, Mannheim,
West Germany, (United Kingdom Agents: Bush Beach Engineering Limited, Cheadle, Cheshire,
England).
[0026] An end plate 160 closes the casing 142, and has a threaded hole 162 for a thermocouple
connection 164, an axially located threaded hole 166 for another compression type
pipe coupling 134 to connect the interior of the casing 142 with the piping 11, a
threaded hole 168 for a hydraulic pressure valve 169, and a narrow threaded hole 171
for an automatic air relief valve 172. A thermal insulant 174 (e.g. Kaowool) surround
the heating unit 14a but is shown only partially distributed thereabout for clarity.
[0027] In operation, with the heating unit 14a in place of the heating unit 14 in the heat
transfer system of Figure 1, oil flows through the piping 11 (typically at 1-10 litre/minute)
and enters the axial hole 112 in the dispenser rod 96 to emerge through the outlet
holes 113, 114, inside the heating element 80. After flowing through the heating element
80, the oil issues into the casing 142, and leaves through the pipe coupling 134 to
re-enter the piping 11 and circulate through the mould 10. With the cables 150, 151
connected to a 240 volts alternating current electric supply (not shown) a power output
is provided from the heating element 80 to heat the oil to a desired temperature (e.g.
200-300°C). The temperature controller 23 senses the temperature of the mould 10 and
switches the electric supply to the heating element 80 off and on as desired to control
the temperature of the oil flowing through the heating unit 14a and thus to maintain
the mould 10 at the required operating temperature. Because of the rapid speed of
response of the heating element 80 when the electric supply is switched on, close
control of the temperature of the mould 10 is obtained, and an example of this is
shown graphically in Figure 5 which illustrates for a heating element 80 containing
silicon carbide rated at 3.4 kW" at 231.5°C a plot of temperature v time for
(1) oil into the mould 10
(2) oil leaving the mould 10
(3) temperature of the mould 10
[0028] The magnitude of the heating unit 14 power output depends inter alia on the electric
supply voltage, the electrical resistance of the heating element 80 and the number
of such elements 80, and is typically in the range 1-50 kW per element.
[0029] The succession of short vertical lines relating to the temperature of the oil entering
the mould 10 when a steady temperature condition is reached indicates the rapid response
of the heating element 80 as the electric supply thereto is repetitively switched
on and off to maintain the mould 10 at the required operating temperature, which in
the case illustrated in Figure 5 is 225°C.
[0030] If desired the oil may be arranged to flow through the heating unit 14a in the reverse
direction to that shown.
[0031] The porous electric heating element may be made from a precursor in the form of a
permeable fibrous carbon electric heating element comprising carbon fibres, made for
example as described in the aforementioned patent Specifications, and coated with
material conveniently applied by a plasma assisted deposition process (hereinafter
referred to as P
AVD). The electrical properties of this deposited material, which may be modified after
deposition by appropriate heat treatments may largely determine the electrical operating
characteristics of the porous electric heating element. The permeable fibrous carbon
precursor on which the material is deposited by the PAVD process may be retained,
or may be removed from beneath the deposited material by means of an oxidation process.
[0032] In the PAVD process a plasma is used as a medium for chemical reaction, and deposition
of a coating on a substrate is achieved through the decomposition of a gas in an electrically-induced
plasma. An example of the plasma assisted deposition process is described in British
Patent Specification No 2056829A, and related techniques are disclosed in the paper
"Codeposition of Glassy Silica and Germania inside a Tube by Plasma Activated CVD"
by D. Kuppers et al, Journal of the Electrochemical Society Vol 123 No 7 pages 1079-1082
July 1976.
[0033] One form of apparatus for performing the PAVD coating process is shown in Figure
6 to which reference is now made. In Figure 6 a fibrous carbon permeable heating element
200 is supported horizontally by an alumina tube 201 inside the central region along
the bore of a cylindrical silica tube 202 having enlarged ends 204, 205, the alumina
tube 201 extending axially inside the silica tube 202 from an end cap 203 which closes
the enlarged end 204. An outlet pipe 206 from the enlarged end 204 is connected through
a vacuum-type valve 208 to a vacuum pump 209. The other enlarged end 205 is closed
by an inlet end cap 210 which has a feed pipe 212 to a mercury pressure gauge 214,
and an inlet 216 connected to a manifold 218 fed by gas supply lines 220, 222, and
224 each controlled by a respective valve 221, 223, and 225. A silica vessel 226 of
annular form is movable along the outside of the tube 202 and is shown surrounding
the central region of the tube 202. The vessel 226 supports an electrically isolated
susceptor 228 (e.g. graphite), and is evacuated down to about 1 to 10 Torr through
a vacuum valve 230 by a vacuum pump 232. The vessel 226 is itself surrounded by a
helical water-cooled copper coil 236 having eight turns and which is coupled to a
high frequency power supply 238 for working in the frequency range of 10
4-10
8 Hertz. Earth connections 240, 241, 242 are made to the heating element 200, the end
cap 203, and the enlarged end 204 respectively. The high frequency generator 238 is
similarly earthed by a connection 246. It may in some instances be advantageous to
bias the connection 240 positively or negatively to earth and to connect the element
200 to the connection 240 by a metallic conductor strip (not shown).
[0034] In operation, the tube 202 is evacuated down to about 1-10
-2 Torr by the vacuum pump 209, and then filled with argon through the gas supply line
220 to a vacuum pressure inside the tube 202 of between IO-
2-100 Torr. The high frequency power supply 238 is energised typically at an anode voltage
of 1-4 kV and 4 x 10
5 Hertz, and a plasma is created about the carbon precursor 200 whilst the susceptor
228 is heated by electrical induction and heats the carbon precursor 200. After about
15 to 30 minutes when the carbon precursor 200 has reached thermal equilibrium and
its surfaces have been cleaned by ion bombardment from the ionised gaseous argon,
the selected reactant gas or gases are introduced through the appropriate gas supply
lines 222 and/or 224 into the tube 202, and the pressure inside the tube 202 maintained
in the range 10-
1 to 100 Torr by adjustment of the appropriate valve 223, 225 and use of the vacuum
valve 208 and the vacuum pump 209. A coating of the selected material is now applied
to the surfaces of the fibres of the carbon precursor 200 by the reactant gases, and
the thickness of the material deposited is proportional to time. For example a coating
of 1 to 20 pm might be deposited in about 24 hours. The valves 221, 223, and 225 are
then closed, the high frequency power supply 238 switched off, whilst the tube 202
continues to be evacuated by the vacuum pump 209 to allow the coated element 200 to
cool under vacuum conditions (e.g. 10-
2 Torr), after which the coated precursor 200 is removed from the tube 202.
[0035] Subsequently the original fibrous carbon precursor 200 on which the coating has been
deposited may either be retained, or removed by a heat treatment comprising oxidation
in air at a temperature above 300°C so that a structure of tubular fibres of the deposited
material remains. A suitable heat treatment may be used to adjust the electrical conductivity
and temperature coefficient of resistance of the deposited material to desired values.
In cases where the fibrous carbon precursor 200 is retained, this heat treatment must
be carried out in an inert environment since it would normally take place above the
carbon oxidation threshold temperature of about 300°C. When the fibrous carbon precursor
is removed by oxidation and the coating is subjected to a heat treatment to adjust
its electrical characteristics, this heat treatment may be effected before or after
the carbon precursor is removed, or simultaneously with removal. The coating of the
fibrous carbon precursor 200 may be performed in the apparatus of Figure 6 using,
for example gases containing silicon and carbon, e.g. a silane/ethylene mixture, as
the reactant gases to deposit a coating containing silicon and carbon on the fibrous
carbon element 200. Phosphine gas may be used as a dopant together with the silane/ethylene
if desired to assist in modifying the coating's electrical conductivity by co-depositing
phosphorous with silicon and carbon in the coating. Other suitable dopants may be
aluminium, or boron, or arsenic, or nitrogen, or oxygen, the purpose of the dopant
being to increase the electrical conductivity of the deposited material by providing
an electron donor or acceptor material, so that the final desired electrical resistivity
of the heating element can be obtained at lower heat treatment temperatures than would
otherwise be required. The heat treatment of the coating to modify its electrical
resistivity is normally carried out at 800°-1400°C to achieve a particular resistivity
of the deposited coating at a selected temperature. In many instances the use of phosphine
gas as a dopant allows the heat treatment temperature to achieve a particular coating
resistivity to be reduced to about 600-l100°C. An Example of the production of such
a heating element by the PAVD process is as follows:-
Example I Heating Element Containing Phosphorous-doped Silicon Carbide
[0036] Typical fabrication procedure parameters used are given below:-
Y,
Fibrous Carbon Element Precursor
[0037]

PAVD Coating Conditions
[0038]

Gas Flow Rates: ml/min
Heat Treatment Conditions
[0040]

Electrical Properties After Heat Treatment (Heating Element)
[0041]

[0042] The fibrous carbon precursor is placed in the tube 202 of Figure 6, and the tube
202 subsequently evacuated down to a vacuum pressure of about 10-
2 Torr. Argon is admitted through the gas supply line 220 to a vacuum pressure inside
the tube 202 of about 1.0 Torr. The high frequency generator 238 is subsequently energised,
and after about one hour, the silane/ethylene mixture to deposit the silicon and carbon
is introduced into tube 202 through the gas supply line 222, and a mixture of phosphine/argon
is introduced into the tube 202 through the gas supply line 224, the vacuum pressure
inside the tube 202 being maintained at about 0.9 Torr. After a suitable time interval
(e.g. 48 hours) depending on the thickness of coating required (typically 0.8 grammes/hour
are deposited), the valves 221, 223 and 225 are closed, the tube 202 evacuated to
about 10-
2 Torr and the high frequency generator 238 switched off to allow the coated precursor
to cool under vacuum conditions. The coated precursor is subsequently removed from
the tube 202 and cut into appropriate lengths prior to oxidation to remove the fibrous
carbon precursor and such further heat treatment as may be required to modify the
electrical resistivity of the coating.
[0043] An oxidation process to remove the fibrous carbon precursor may be carried out at
any convenient temperature above about 300°C, but the time taken to oxidise the carbon
can be reduced by increasing the oxidation temperature. Too high an oxidation temperature
may however have an effect on the electrical properties of the coating which is not
desired, and this possibility arises as a result of the nature of the material deposited
during the PAVD coating process.
[0044] The as deposited material in Example I essentially consists of free carbon, free
silicon, carbon combined chemically with silicon as silicon carbide, and a relatively
small amount of phosphorous. Heat treatment of this material changes the electrical
properties of the coating to a degree which is influenced by the heat treatment temperature
and time. Thus it is possible to either heat treat in an inert atmosphere at a relatively
high temperature to obtain a selected resistivity, and to follow this by oxidation
at a lower temperature, or to oxidise at a relatively low temperature and to follow
this process with one or more heat treatment stages in an inert or oxidising atmosphere
to adjust the coating restivity to the desired value. In some cases depending on the
PAVD coating process parameters employed it will be possible to carry out a one stage
heat treatment process which both removes the fibrous carbon precursor by oxidation
and adjusts the resistivity of the coating to a desired value. Oxidation removes not
only the carbon precursor but also may remove some or all of the elemental carbon
in the coating. Consequently the final coating resistivity depends not only on the
temperature and time of the heat treatment but also on whether or not the oxidation
stage is carried out first. Additionally some-of the free silicon may become oxidised
if the oxidation temperature is very high.
[0045] The heat treatment time and temperature to produce a required coating resitivity
is not a unique process, and depends not only on the PAVD coating parameters, for
example the gas composition and flow rates and RF conditions, but also on the electrical
properties of the carbon precursor on which the coating is deposited. The electrical
resistivity of the fibrous carbon precursor during the coating process is a function
not only of the carbonisation temperature of the carbon precursor but also of the
RF field conditions through its effect on the temperature of the carbon precursor
during the coating process. It has been found that the composition of the material
deposited during the coating process and its electrical properties is influenced by
both the RF field voltage and the carbonisation temperature to which the carbon precursor
was subjected, and that the heat treatment procedure required to obtain a particular
electrical resistivity of the deposited material depends on its composition. Consequently
some combinations of PAVD parameters and carbon precursor carbonisation temperatures
can allow a given resistivity of the deposited material to be obtained together with
a low temperature coefficient of resistance of the deposited material after heat treatment,
whereas others may not. Furthermore the use of a dopant such as phosphorous in the
PAVD coating process changes the relationship between resistivity, heat treatment
conditions, and temperature coefficient of resistance.
[0046] Removing the phosphorous from the coating gases and substituting arsenic or boron
for phosphorous also changes the composition of the material deposited and affects
the heat treatment process required to attain a particular resistivity. Properties
of heating elements made in a way similar to that outlined in Example I but with or
without a dopant respectively are described in the following Examples II and III.
Example II: Heating Element Containing Undoped Silicon Carbide
Fibrous Carbon Element Precursor
[0047] As in Example I: Elements carbonised at 725°C Density 103 kg/m
3
PAVD Coating Conditions
[0048]

Gas Flow Rates: ml/min
[0049]
Electrical Properties After Heat Treatment (Heating Element)
[0050]

Example III: Heating Element Containing Arsenic Doped Silicon Carbide
Fibrous Carbon Precursor
[0051] As in Example I: Element carbonised at 1000°C Density 106 kg/m
3
PAVD Coating Conditions
Gas Composition
[0052]

Gas Flow Rates: ml/min
[0053]

Heat Treatment Conditions
[0054]

[0055] Electrical Properties After Heat Treatment (Heating Element)

[0056] The method of Example I may also be used to produce a coating which contains silicon
but not to a substantial extent, if at all, silicon carbide. This is achieved by substituting
silane for the mixture of silane and ethylene in Example 1. Such coatings may also
be doped, for example with phosphorous, arsenic, boron, nitrogen, or oxygen, or be
undoped. Example IV illustrates such a silicon element doped with nitrogen.
Example IV: Heating Element Containing Nitrogen - Doped Silicon
Fibrous Carbon Precursor
[0057]
PAVD Coating Conditions
Gas Composition
[0058]

Gas Flow Rates: ml/min
[0059]

Heat Treatment Conditions
[0060]

Electrical Properties After Heat Treatment (Heating Element)
[0061]

[0062] As a general rule increasing the time and the temperature of heat treatment of the
coating up to a heat treatment temperature of about 1400°C, reduces the electrical
resistivity of the coating provided material is not lost by evaporation.
[0063] When the heating element is to be used over a relatively wide temperature range (e.g.
20°C to 200°C), the temperature coefficient of electrical resistance (TCR) of the
heating element may become of importance. Examples V and VI illustrate the variation
in TCR values arising from different precursor and process conditions.
Example V: Heating Element Containing Undoped Silicon Carbide
Fibrous Carbon Precursor
[0064] As in Example I: Element carbonised at 650°C Density 150 kg/m
3
PAVD Coating Conditions
Gas Composition
[0065]

Gas Flow Rates: ml/min
[0066]
Heat Treatment Conditions
[0067]

[0068] Electrical Properties After Heat Treatment (Heating Element)

Example VI: Heating Element Containing Undoped Silicon Carbide
Fibrous Carbon Precursor
[0069] As in Example I: Element carbonised at 725°C Density 130 kg/m
3
PAVD Coating Conditions
Gas Composition
[0070]
Gas Flow Rates ml/min
[0071]

Heat Treatment Conditions
[0072]

[0073] Subsequent heat treatment
[0074]

Electrical Properties After Heat Treatment
[0075]

[0076] Comparison of Examples V and VI gives the following:-
[0077]

[0078] In Example V the resistance ratio is lower than in
[0079] Example VI in spite of the fact that the heat treatment was carried out at a lower
temperature than was used for Example
VI. This illustrates the significant effect of substrate carbonisation temperature and
kv since it has also been found that the resistance ratio normally falls as the heat
treatment temperature is increased and on this basis alone the resistance ratio of
Example VI would be expected to be lower than the value established by Example V.
Selection of substrate carbonisation temperature and kV is therefore one way of obtaining
a desired value of the resistance ratio R20/R200.
[0080] By way of comparison, a silicon carbide heating element made by carbonisation at
1700°C of a fibrous carbon precursor, coating of the precursor, and subsequent heat
treatment of the coated precursor at 1385°C, was found to have a resistance ratio
(R20/R200) of 8.49, whereas a precursor carbonised at 650°C and the coated precursor
heat treated at 1185°C was found to have a resistance ratio (
R20/R200) of 1.48. Thus by appropriate selection of the carbonisation temperature,
the coating conditions and the heat treatment temperature, heating elements having
a required electrical resistivity and TCR may be made.
[0081] Although the coating of the fibrous carbon has been described in relation to PAVD,
it will be understood that appropriate alternative coating processes may be used.
[0082] The permeable electric heating elements may be of alternative shapes or sizes to
those aforedescribed, and it will be understood that the heat transfer system in the
aforedescribed aspects may be used in alternative applications, for example where
the heat transfer fluid comprises a gas. Furthermore, the aforedescribed permeable
electric heating elements may be used in alternative applications to heat a fluid.
[0083] It will be understood that where the carbon fibres in the fibrous carbon precursor
are contiguous, the coatings about the fibres may merge together at these positions
of contiguity. Hence when the coated precursor is oxidised, the tubular fibres that
remain may be integral with closely adjacent tubular fibres at the positions of contiguity.
Otherwise the coating material deposited substantially replicates the geometry and
fibre distribution pattern of the original fibrous carbon precursor.
[0084] For some applications the fibrous carbon precursor need not be removed, but may be
allowed to remain in situ during any heat treatment of the coating which should then
be carried out in an inert atmosphere. The electrical resistivity of the heating element
would then be a combination of the resistivity of the fibrous carbon precursor and
the selected resistivity of the coating. The electrical resistivity of the coating
may be the same or greater than that of the carbon precursor, but in some cases it
may be desirable that the electrical resistivity of the heating element is determined
mainly by the coating, so that under operating conditions the coating carries the
majority of the electric current. The electrical resistivity of the fibrous carbon
precursor should, therefore, be substantially greater than the electrical resistivity
of the coating after the final heat treatment to adjust the electrical resistivity
of the coating has been completed.
[0085] A relatively high electrical resistivity of the fibrous carbon precursor may be achieved
by selecting a relatively low carbonisation temperature, e.g. below about 800°C, and
this implies that the PAVD coating parameters must be selected so as to ensure that
the heat treatment required to achieve a desired coating resistivity may be carried
out at a temperature which is preferably below the carbonisation temperature of the
fibrous carbon precursor. It will be appreciated that for some applications a precursor
of an insulating material may be used for the precursor for coating in the PAVD apparatus
of Figure 6, and retention during subsequent heat treatment stages.
[0086] If desired, coatings of alternative materials to those aforedescribed may be deposited
in the PAVD apparatus of Figure 6, not necessarily silicon-containing coatings, depending
on the application to which the heating elements are to be put. Coatings may also
be applied in the PAVD apparatus of Figure 6 on precursors for alternative applications,
which precursors might be retained as aforementioned, the coating being subjected
to subsequent heat treatment to provide a desired electrical resistivity of the coating.
1. A process for manufacturing a fluid permeable fibrous electric heating element,
characterised by forming a permeable fibrous precursor (200), coating fibres of the
precursor (200) with a material so as to form tubular fibres comprising the material,
and heating the coated precursor (200) so as to modify the structure of the material
to provide a desired electrical resistivity of the tubular fibres.
2. A process as claimed in Claim 1, wherein the precursor is retained within the tubular
fibres.
3. A process as claimed in Claim 2, wherein the precursor has a greater electrical
resistivity than that of the tubular fibres.
4. A process as claimed in Claim 2, wherein the precursor has an electrical resistivity
that does not exceed that of the tubular fibres.
5. A process as claimed in Claim 2 or Claim 4, wherein the precursor comprises an
electrical insulating material.
6. A process as claimed in any one of the preceding Claims, wherein the heating includes
a heating stage in an inert atmosphere.
7. A process as claimed in Claim 1, wherein the precursor comprises an oxidisable
substance, and the heating includes a heating step in an oxidising environment so
as to remove the precursor by oxidation thereof.
8. A process as claimed in Claim 7, wherein the heating includes a heating step in
an inert atmosphere, and the heating step in the oxidising environment takes place
before the heating stage in the inert atmosphere.
9. A process as claimed in Claim 7, wherein the heating includes a heating stage in
an inert atmosphere, and the heating step in the oxidising environment takes place
after the heating stage in the inert atmosphere.
10. A process as claimed in any one of Claims 1 to 3 or Claims 7 to 9, wherein the
precursor (200) comprises carbon.
11. A process as claimed in Claim 10, wherein the precursor (200) is formed by carbonisation
of an acrylic fibrous body at a temperature below 800°C.
12. A process as claimed in any one of the preceding Claims, wherein the coating is
applied by the decomposition of a coating gas.
13. A process as claimed in Claim 12, wherein the coating gas comprises a silicon-containing
gas so as to deposit a silicon-containing coating.
14. A process as claimed in Claim 13, wherein the heating takes place below about
1400°C.
15. A process as claimed in any one of Claim 12 to 14, wherein the coating gas includes
a carbon-containing gas so as to deposit a carbon-containing coating.
16. A process as claimed in any one of Claims 12 to 14, wherein the coating gas includes
nitrogen so as to deposit a nitrogen-containing coating. N,
17. A process as claimed in any one of Claims 12 to 15, wherein the coating gas includes
at least one dopant material for modifying the electrical resistivity of the coating.
18. A process as claimed in Claim 17, wherein the dopant is selected from the group
consisting of: aluminium, nitrogen, or oxygen.
19. A process as claimed in any one of the preceding Claims, wherein the fibrous tubes
have an outside diameter in the range 5 µm to 300 µm.
20. A process as claimed in any one of the preceding Claims, wherein the fibrous tubes
are formed by a thickness of the coating in the range 1 µm to 30 µm.
21. A process as claimed in Claim 20, wherein the coating thickness. is in the range
4 to 20 µm.
22. A fluid permeable fibrous electric heating element made by the process as claimed
in any one of the preceding Claims.
23. A heat transfer system comprising, a circuit adapted to contain a fluid, a heating
element extending in a part of the circuit so as to heat the fluid, means for circulating
the fluid around the circuit, and a heat transfer surface portion of the circuit for
transferring heat from the fluid through the surface portion, . characterised in that
the heating element comprises the heating element as claimed in Claim 22.