(19)

(11)

EP 0 083 368 A1

(12)

(43) Date of publication: 13.07.1983 Bulletin 1983/28 (21) Application number: 82902426.0 (22) Date of filing: 06.07.1982

(51) International Patent Classification (IPC):  G01J 1/ 04( . ) G01N 21/ 25( . ) G01J 1/ 42( . ) H01L 25/ 04( . ) (86) International application number: PCT/US1982/000898 (87) International publication number: WO 1983/000257 (20.01.1983 Gazette 1983/02)

(84) Designated Contracting States: CH DE FR GB LI NL SE (30) Priority: 06.07.1981 US 19810280038 (71) Applicant: BECKMAN INSTRUMENTS, INC. Fullerton California 92634 (US)	(72) Inventor: KAYE, Wilbur I. Corona del Mar, CA 92625 (US)