(19)
(11) EP 0 083 633 A1

(12)

(43) Date of publication:
20.07.1983 Bulletin 1983/29

(21) Application number: 82902407.0

(22) Date of filing: 28.06.1982
(51) International Patent Classification (IPC): 
G01F 1/ 24( . )
(86) International application number:
PCT/US1982/000875
(87) International publication number:
WO 1983/000220 (20.01.1983 Gazette 1983/02)
(84) Designated Contracting States:
DE FR GB NL

(30) Priority: 09.07.1981 US 19810281618
09.07.1981 US 19810281619

(71) Applicant: AMERICAN FLOW SYSTEMS, INCORPORATED
Sunnyvale, CA 94087 (US)

(72) Inventors:
  • MAHAWILI, Imad
    Sunnyvale, CA 94087 (US)
  • BOYLE, Timothy J.
    Cupertino, CA 95014 (US)
  • NELSON, Norvell A.
    Palo Alto, CA 94303 (US)

   


(54) FLOW CONTROLLER AND FLOW SENSOR