(19)

(11)

EP 0 092 586 A1

(12)

(43) Date of publication: 02.11.1983 Bulletin 1983/44 (21) Application number: 83900103.0 (22) Date of filing: 02.11.1982

(51) International Patent Classification (IPC):  C23C 16/ 50( . ) H01L 31/ 20( . ) H01L 31/ 06( . ) (86) International application number: PCT/US1982/001552 (87) International publication number: WO 1983/001710 (11.05.1983 Gazette 1983/11)

(84) Designated Contracting States: AT CH DE FR GB LI NL SE (30) Priority: 02.11.1981 US 19810317512 (71) Applicant: CAMPBELL, William Patrick, III Washington, D.C. 20008 (US)	(72) Inventor: CAMPBELL, William Patrick, III Washington, D.C. 20008 (US)