(19)

(11)

EP 0 096 686 A1

(12)

(43) Date of publication: 28.12.1983 Bulletin 1983/52 (21) Application number: 83900057.0 (22) Date of filing: 23.12.1982

(51) International Patent Classification (IPC):  H01L 29/ 68( . ) H01L 27/ 06( . ) H01L 29/ 735( . ) H01L 21/ 331( . ) H01L 29/ 73( . ) (86) International application number: PCT/HU1982/000067 (87) International publication number: WO 1983/002369 (07.07.1983 Gazette 1983/16)

(84) Designated Contracting States: AT DE FR GB NL (30) Priority: 23.12.1981 HU 19810003926 (71) Applicant: MTA KÖZPONTI FIZIKAI KUTATO INTEZET H-1525 Budapest (HU)	(72) Inventors: MOHACSY, Tibor H-1125 Budapest (HU) SZUHAR, Mihály H-1201 Budapest (HU) ZIMMER, György H-1182 Budapest (HU) (74) Representative: Lehn, Werner, Dipl.-Ing., et al  Hoffmann, Eitle & Partner, Patentanwälte, Postfach 81 04 20 D-81904 München D-81904 München (DE)