(19)
(11) EP 0 101 737 A1

(12)

(43) Date of publication:
07.03.1984 Bulletin 1984/10

(21) Application number: 83902631.0

(22) Date of filing: 09.02.1983
(51) International Patent Classification (IPC): 
H01L 29/ 78( . )
H01L 21/ 225( . )
(86) International application number:
PCT/US1983/000169
(87) International publication number:
WO 1983/003029 (01.09.1983 Gazette 1983/20)
(84) Designated Contracting States:
DE FR NL

(30) Priority: 26.02.1982 US 19820352519

(71) Applicant: Western Electric Company, Incorporated
New York, NY 10038 (US)

(72) Inventor:
  • KINSBRON, Eliezer
    Highland Park, NJ 08904 (US)

(74) Representative: Blumbach Weser Bergen Kramer Zwirner Hoffmann Patentanwälte 
Radeckestrasse 43
D-81245 München
D-81245 München (DE)

   


(54) DIFFUSION OF SHALLOW REGIONS