(19)
(11)
EP 0 101 737 A1
(12)
(43)
Date of publication:
07.03.1984
Bulletin 1984/10
(21)
Application number:
83902631.0
(22)
Date of filing:
09.02.1983
(51)
International Patent Classification (IPC):
H01L
29/
78
( . )
H01L
21/
225
( . )
(86)
International application number:
PCT/US1983/000169
(87)
International publication number:
WO 1983/003029
(
01.09.1983
Gazette 1983/20)
(84)
Designated Contracting States:
DE FR NL
(30)
Priority:
26.02.1982
US 19820352519
(71)
Applicant:
Western Electric Company, Incorporated
New York, NY 10038 (US)
(72)
Inventor:
KINSBRON, Eliezer
Highland Park, NJ 08904 (US)
(74)
Representative:
Blumbach Weser Bergen Kramer Zwirner Hoffmann Patentanwälte
Radeckestrasse 43
D-81245 München
D-81245 München (DE)
(54)
DIFFUSION OF SHALLOW REGIONS